DE60307578D1 - Kristallziehvorrichtung für Metallfluoride - Google Patents
Kristallziehvorrichtung für MetallfluorideInfo
- Publication number
- DE60307578D1 DE60307578D1 DE60307578T DE60307578T DE60307578D1 DE 60307578 D1 DE60307578 D1 DE 60307578D1 DE 60307578 T DE60307578 T DE 60307578T DE 60307578 T DE60307578 T DE 60307578T DE 60307578 D1 DE60307578 D1 DE 60307578D1
- Authority
- DE
- Germany
- Prior art keywords
- pulling device
- crystal pulling
- metal fluorides
- fluorides
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title 1
- 229910001512 metal fluoride Inorganic materials 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/12—Halides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1056—Seed pulling including details of precursor replenishment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002334528 | 2002-11-19 | ||
JP2002334528 | 2002-11-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60307578D1 true DE60307578D1 (de) | 2006-09-28 |
DE60307578T2 DE60307578T2 (de) | 2007-08-23 |
Family
ID=32290323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60307578T Expired - Lifetime DE60307578T2 (de) | 2002-11-19 | 2003-11-19 | Kristallziehvorrichtung für Metallfluoride |
Country Status (6)
Country | Link |
---|---|
US (1) | US7060133B2 (de) |
EP (1) | EP1424408B1 (de) |
KR (1) | KR20040044146A (de) |
CN (1) | CN1502726A (de) |
DE (1) | DE60307578T2 (de) |
RU (1) | RU2003133469A (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200928018A (en) * | 2007-12-21 | 2009-07-01 | Green Energy Technology Inc | Crystal-growing furnace with convectional cooling structure |
CN102605419B (zh) * | 2012-03-25 | 2015-04-22 | 杭州慧翔电液技术开发有限公司 | 用于拉晶设备的可调式多晶料夹持装置 |
CN102616745B (zh) * | 2012-04-06 | 2016-12-14 | 周俊和 | 一种氟化盐生产方法 |
CN104514032B (zh) * | 2014-12-18 | 2017-03-08 | 华中科技大学 | 一种热场协调控制的提拉法晶体生长炉 |
TWI771007B (zh) * | 2020-05-19 | 2022-07-11 | 環球晶圓股份有限公司 | 矽單晶錠的製造方法、矽單晶錠及其製造裝置 |
CN114875476B (zh) * | 2022-06-07 | 2023-03-24 | 眉山博雅新材料股份有限公司 | 一种晶体制备装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3359077A (en) * | 1964-05-25 | 1967-12-19 | Globe Union Inc | Method of growing a crystal |
DE1960088C3 (de) * | 1969-11-29 | 1974-07-25 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes |
JPS63270385A (ja) | 1987-04-30 | 1988-11-08 | Hitachi Metals Ltd | 酸化物単結晶の製造方法 |
JP3016897B2 (ja) * | 1991-03-20 | 2000-03-06 | 信越半導体株式会社 | シリコン単結晶の製造方法及び装置 |
JP3128795B2 (ja) * | 1995-06-09 | 2001-01-29 | 信越半導体株式会社 | チョクラルスキー法による結晶製造装置および製造方法 |
JPH09110582A (ja) * | 1995-10-11 | 1997-04-28 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | 結晶製造装置 |
JP3892496B2 (ja) * | 1996-04-22 | 2007-03-14 | Sumco Techxiv株式会社 | 半導体単結晶製造方法 |
US6485807B1 (en) * | 1997-02-13 | 2002-11-26 | Samsung Electronics Co., Ltd. | Silicon wafers having controlled distribution of defects, and methods of preparing the same |
KR19980079891A (ko) * | 1997-03-27 | 1998-11-25 | 모리 레이자로 | 단결정 성장장치 및 단결정 성장방법 |
JPH10338594A (ja) | 1997-06-03 | 1998-12-22 | Fuji Elelctrochem Co Ltd | 引き上げ法による単結晶育成装置 |
JP4174086B2 (ja) | 1997-07-02 | 2008-10-29 | キヤノン株式会社 | 結晶成長用の種結晶及びフッ化物結晶 |
JP3400312B2 (ja) * | 1997-09-05 | 2003-04-28 | 株式会社スーパーシリコン研究所 | 単結晶引上げ装置及び単結晶引上げ方法 |
US6369392B1 (en) * | 2000-01-10 | 2002-04-09 | Inrad | Cerium doped crystals |
-
2003
- 2003-11-18 KR KR1020030081300A patent/KR20040044146A/ko not_active Application Discontinuation
- 2003-11-19 DE DE60307578T patent/DE60307578T2/de not_active Expired - Lifetime
- 2003-11-19 EP EP03257315A patent/EP1424408B1/de not_active Expired - Fee Related
- 2003-11-19 US US10/717,018 patent/US7060133B2/en not_active Expired - Fee Related
- 2003-11-19 RU RU2003133469/15A patent/RU2003133469A/ru not_active Application Discontinuation
- 2003-11-19 CN CNA2003101165003A patent/CN1502726A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US20040099210A1 (en) | 2004-05-27 |
US7060133B2 (en) | 2006-06-13 |
EP1424408A1 (de) | 2004-06-02 |
DE60307578T2 (de) | 2007-08-23 |
EP1424408B1 (de) | 2006-08-16 |
KR20040044146A (ko) | 2004-05-27 |
CN1502726A (zh) | 2004-06-09 |
RU2003133469A (ru) | 2005-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |