DE60306472D1 - Monolitischer Tintenstrahldruckkopf mit konischen Düse und Verfahren zu seiner Herstellung - Google Patents

Monolitischer Tintenstrahldruckkopf mit konischen Düse und Verfahren zu seiner Herstellung

Info

Publication number
DE60306472D1
DE60306472D1 DE60306472T DE60306472T DE60306472D1 DE 60306472 D1 DE60306472 D1 DE 60306472D1 DE 60306472 T DE60306472 T DE 60306472T DE 60306472 T DE60306472 T DE 60306472T DE 60306472 D1 DE60306472 D1 DE 60306472D1
Authority
DE
Germany
Prior art keywords
making
same
ink jet
jet printhead
conical nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60306472T
Other languages
English (en)
Other versions
DE60306472T2 (de
Inventor
Hyung-Taek Lim
Jong-Woo Shin
Hoon Song
Yong-Soo Oh
Chang-Seung Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE60306472D1 publication Critical patent/DE60306472D1/de
Application granted granted Critical
Publication of DE60306472T2 publication Critical patent/DE60306472T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14137—Resistor surrounding the nozzle opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60306472T 2002-10-21 2003-10-16 Monolithischer Tintenstrahldruckkopf mit konischer Düse und Verfahren zu seiner Herstellung Expired - Lifetime DE60306472T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR2002064344 2002-10-21
KR10-2002-0064344A KR100493160B1 (ko) 2002-10-21 2002-10-21 테이퍼 형상의 노즐을 가진 일체형 잉크젯 프린트헤드 및그 제조방법

Publications (2)

Publication Number Publication Date
DE60306472D1 true DE60306472D1 (de) 2006-08-10
DE60306472T2 DE60306472T2 (de) 2007-02-08

Family

ID=36710002

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60306472T Expired - Lifetime DE60306472T2 (de) 2002-10-21 2003-10-16 Monolithischer Tintenstrahldruckkopf mit konischer Düse und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (2) US6886919B2 (de)
EP (1) EP1413438B1 (de)
JP (1) JP2004142456A (de)
KR (1) KR100493160B1 (de)
DE (1) DE60306472T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438842B1 (ko) * 2002-10-12 2004-07-05 삼성전자주식회사 금속 노즐 플레이트를 가진 일체형 잉크젯 프린트헤드 및그 제조방법
KR100499132B1 (ko) 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR100519759B1 (ko) * 2003-02-08 2005-10-07 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US7036913B2 (en) 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
KR100590527B1 (ko) * 2003-05-27 2006-06-15 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
KR20050000601A (ko) * 2003-06-24 2005-01-06 삼성전자주식회사 잉크젯 프린트헤드
KR100537510B1 (ko) * 2003-06-24 2005-12-19 삼성전자주식회사 히터의 캐비테이션 손상이 없는 열구동 방식의 잉크젯프린트헤드
KR100499148B1 (ko) * 2003-07-03 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드
KR100537522B1 (ko) 2004-02-27 2005-12-19 삼성전자주식회사 압전 방식의 잉크젯 프린트헤드와 그 노즐 플레이트의제조 방법
KR20070007384A (ko) 2004-05-03 2007-01-15 후지필름 디마틱스, 인크. 가요성 프린트헤드 회로
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
TWI272190B (en) * 2006-04-04 2007-02-01 Benq Corp Fluid injection apparatus and fabrication thereof
US20070263038A1 (en) * 2006-05-12 2007-11-15 Andreas Bibl Buried heater in printhead module
JP2008126504A (ja) * 2006-11-20 2008-06-05 Canon Inc インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
US8084361B2 (en) * 2007-05-30 2011-12-27 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor fabrication method suitable for MEMS
JP5038054B2 (ja) * 2007-08-08 2012-10-03 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US7881594B2 (en) * 2007-12-27 2011-02-01 Stmicroeletronics, Inc. Heating system and method for microfluidic and micromechanical applications
US20100053270A1 (en) * 2008-08-28 2010-03-04 Jinquan Xu Printhead having converging diverging nozzle shape
US8287104B2 (en) * 2009-11-19 2012-10-16 Hewlett-Packard Development Company, L.P. Inkjet printhead with graded die carrier
JP2015047713A (ja) * 2013-08-30 2015-03-16 キヤノン株式会社 吐出口部材の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
US4882595A (en) 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
AU657930B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
US6190492B1 (en) * 1995-10-06 2001-02-20 Lexmark International, Inc. Direct nozzle plate to chip attachment
US5855835A (en) * 1996-09-13 1999-01-05 Hewlett Packard Co Method and apparatus for laser ablating a nozzle member
US5859654A (en) * 1996-10-31 1999-01-12 Hewlett-Packard Company Print head for ink-jet printing a method for making print heads
US6505914B2 (en) * 1997-10-02 2003-01-14 Merckle Gmbh Microactuator based on diamond
KR100397604B1 (ko) * 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
KR100408268B1 (ko) * 2000-07-20 2003-12-01 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
KR20020025588A (ko) * 2000-09-29 2002-04-04 윤종용 잉크젯 프린터 헤드
KR100408271B1 (ko) * 2000-09-30 2003-12-01 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린팅 헤드
KR100406941B1 (ko) * 2000-09-30 2003-11-21 삼성전자주식회사 잉크젯 프린터 헤드
EP1215048B1 (de) * 2000-12-15 2007-06-06 Samsung Electronics Co. Ltd. Mit Bläschen angetriebener Tintenstrahldruckkopf und dazugehöriges Hertsellungsverfahren
KR100668294B1 (ko) * 2001-01-08 2007-01-12 삼성전자주식회사 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드 및 그제조방법
TW504462B (en) * 2001-03-08 2002-10-01 Ind Tech Res Inst Backside jetting ink-jet printer head
KR100552664B1 (ko) * 2002-10-12 2006-02-20 삼성전자주식회사 측벽에 의해 한정되는 잉크 챔버를 가진 일체형 잉크젯프린트헤드 및 그 제조방법
KR100438842B1 (ko) * 2002-10-12 2004-07-05 삼성전자주식회사 금속 노즐 플레이트를 가진 일체형 잉크젯 프린트헤드 및그 제조방법

Also Published As

Publication number Publication date
EP1413438B1 (de) 2006-06-28
JP2004142456A (ja) 2004-05-20
US20040080583A1 (en) 2004-04-29
US6886919B2 (en) 2005-05-03
KR100493160B1 (ko) 2005-06-02
US20050162482A1 (en) 2005-07-28
DE60306472T2 (de) 2007-02-08
US7169539B2 (en) 2007-01-30
KR20040034250A (ko) 2004-04-28
EP1413438A1 (de) 2004-04-28

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