DE60111716D1 - Cmos/mems integrierter Tintenstrahldruckkopf mit Querflussdüsenarchitektur auf Oxidbasis und Verfahren zu seiner Herstellung - Google Patents

Cmos/mems integrierter Tintenstrahldruckkopf mit Querflussdüsenarchitektur auf Oxidbasis und Verfahren zu seiner Herstellung

Info

Publication number
DE60111716D1
DE60111716D1 DE60111716T DE60111716T DE60111716D1 DE 60111716 D1 DE60111716 D1 DE 60111716D1 DE 60111716 T DE60111716 T DE 60111716T DE 60111716 T DE60111716 T DE 60111716T DE 60111716 D1 DE60111716 D1 DE 60111716D1
Authority
DE
Germany
Prior art keywords
cmos
oxide
making
same
inkjet printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60111716T
Other languages
English (en)
Other versions
DE60111716T2 (de
Inventor
Constantine N Anagnostopoulos
John A Lebens
Christopher N Delametter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE60111716D1 publication Critical patent/DE60111716D1/de
Publication of DE60111716T2 publication Critical patent/DE60111716T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B41J2/105—Ink jet characterised by jet control for binary-valued deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B41J2/075—Ink jet characterised by jet control for many-valued deflection
    • B41J2/08—Ink jet characterised by jet control for many-valued deflection charge-control type
    • B41J2/09—Deflection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • B41J2002/032—Deflection by heater around the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/16—Nozzle heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/22—Manufacturing print heads
DE60111716T 2000-12-29 2001-12-19 Integrierter cmos/mems-tintenstrahldruckkopf mit seitenstromdrüsen-architektur auf oxidbasis und verfahren zu dessen herstellung Expired - Lifetime DE60111716T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/751,593 US6382782B1 (en) 2000-12-29 2000-12-29 CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
US751593 2000-12-29

Publications (2)

Publication Number Publication Date
DE60111716D1 true DE60111716D1 (de) 2005-08-04
DE60111716T2 DE60111716T2 (de) 2006-05-11

Family

ID=25022698

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60111716T Expired - Lifetime DE60111716T2 (de) 2000-12-29 2001-12-19 Integrierter cmos/mems-tintenstrahldruckkopf mit seitenstromdrüsen-architektur auf oxidbasis und verfahren zu dessen herstellung

Country Status (4)

Country Link
US (2) US6382782B1 (de)
EP (1) EP1219425B1 (de)
JP (1) JP4142285B2 (de)
DE (1) DE60111716T2 (de)

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US6986566B2 (en) 1999-12-22 2006-01-17 Eastman Kodak Company Liquid emission device
US6497510B1 (en) 1999-12-22 2002-12-24 Eastman Kodak Company Deflection enhancement for continuous ink jet printers
US6820971B2 (en) * 2002-06-14 2004-11-23 Eastman Kodak Company Method of controlling heaters in a continuous ink jet print head having segmented heaters to prevent terminal ink drop misdirection
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
KR100499132B1 (ko) * 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US7845749B2 (en) * 2002-11-13 2010-12-07 Sony Corporation Liquid-ejecting method and liquid-ejecting apparatus
US7152958B2 (en) * 2002-11-23 2006-12-26 Silverbrook Research Pty Ltd Thermal ink jet with chemical vapor deposited nozzle plate
KR100590527B1 (ko) 2003-05-27 2006-06-15 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US7036913B2 (en) 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
KR100480791B1 (ko) 2003-06-05 2005-04-06 삼성전자주식회사 일체형 잉크젯 프린트헤드 및 그 제조방법
JP4251019B2 (ja) * 2003-06-13 2009-04-08 パナソニック株式会社 微小固形成分分離デバイスとその製造方法、およびこれを用いた微小固形成分の分離方法
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US7364277B2 (en) * 2004-04-14 2008-04-29 Eastman Kodak Company Apparatus and method of controlling droplet trajectory
US7549298B2 (en) * 2004-12-04 2009-06-23 Hewlett-Packard Development Company, L.P. Spray cooling with spray deflection
EP1836056B1 (de) 2004-12-30 2018-11-07 Fujifilm Dimatix, Inc. Tintenstrahldruck
KR100619077B1 (ko) * 2005-04-18 2006-08-31 삼성전자주식회사 ＴｉＮ０.３로 이루어진 열발생저항체를 구비하는잉크젯프린트헤드
US7437820B2 (en) * 2006-05-11 2008-10-21 Eastman Kodak Company Method of manufacturing a charge plate and orifice plate for continuous ink jet printers
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
KR100894373B1 (ko) 2007-03-22 2009-04-22 실버브룩 리서치 피티와이 리미티드 프린트헤드 모듈
US20080284835A1 (en) * 2007-05-15 2008-11-20 Panchawagh Hrishikesh V Integral, micromachined gutter for inkjet printhead
US7758155B2 (en) * 2007-05-15 2010-07-20 Eastman Kodak Company Monolithic printhead with multiple rows of inkjet orifices
US20090033727A1 (en) * 2007-07-31 2009-02-05 Anagnostopoulos Constantine N Lateral flow device printhead with internal gutter
US8585179B2 (en) * 2008-03-28 2013-11-19 Eastman Kodak Company Fluid flow in microfluidic devices
US8740323B2 (en) 2011-10-25 2014-06-03 Eastman Kodak Company Viscosity modulated dual feed continuous liquid ejector
US10035346B2 (en) * 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
JP6598658B2 (ja) * 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド
WO2019071240A1 (en) 2017-10-06 2019-04-11 The Research Foundation For The State University For The State Of New York AQUEOUS AND NONAQUEOUS SELECTIVE OPTICAL DETECTION OF FREE SULPHITES
CN114889327B (zh) * 2022-04-21 2023-05-12 杭州电子科技大学 一种静电式喷墨打印机喷头及其制备方法

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US1941001A (en) 1929-01-19 1933-12-26 Rca Corp Recorder
US3373437A (en) 1964-03-25 1968-03-12 Richard G. Sweet Fluid droplet recorder with a plurality of jets
GB1143079A (en) 1965-10-08 1969-02-19 Hertz Carl H Improvements in or relating to recording devices for converting electrical signals
US3946398A (en) 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
CA1158706A (en) 1979-12-07 1983-12-13 Carl H. Hertz Method and apparatus for controlling the electric charge on droplets and ink jet recorder incorporating the same
US4894664A (en) 1986-04-28 1990-01-16 Hewlett-Packard Company Monolithic thermal ink jet printhead with integral nozzle and ink feed
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
JP3114776B2 (ja) 1992-06-23 2000-12-04 セイコーエプソン株式会社 インクジェット式ライン記録ヘッドを用いたプリンタ
JP3222593B2 (ja) * 1992-12-28 2001-10-29 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録ヘッド用モノリシック集積回路
US5825385A (en) 1995-04-12 1998-10-20 Eastman Kodak Company Constructions and manufacturing processes for thermally activated print heads
US5880759A (en) 1995-04-12 1999-03-09 Eastman Kodak Company Liquid ink printing apparatus and system
DE69706751T2 (de) * 1996-04-30 2002-07-04 Scitex Digital Printing Inc Oberseitig gespeister Tröpfchengenerator
US5812159A (en) 1996-07-22 1998-09-22 Eastman Kodak Company Ink printing apparatus with improved heater
US6012805A (en) * 1997-10-17 2000-01-11 Eastman Kodak Company Continuous ink jet printer with variable contact drop deflection
US5963235A (en) * 1997-10-17 1999-10-05 Eastman Kodak Company Continuous ink jet printer with micromechanical actuator drop deflection
US6079821A (en) 1997-10-17 2000-06-27 Eastman Kodak Company Continuous ink jet printer with asymmetric heating drop deflection
US5966154A (en) * 1997-10-17 1999-10-12 Eastman Kodak Company Graphic arts printing plate production by a continuous jet drop printing with asymmetric heating drop deflection
US6217163B1 (en) 1998-12-28 2001-04-17 Eastman Kodak Company Continuous ink jet print head having multi-segment heaters
US6213595B1 (en) 1998-12-28 2001-04-10 Eastman Kodak Company Continuous ink jet print head having power-adjustable segmented heaters
US6158845A (en) * 1999-06-17 2000-12-12 Eastman Kodak Company Ink jet print head having heater upper surface coplanar with a surrounding surface of substrate
US6474795B1 (en) * 1999-12-21 2002-11-05 Eastman Kodak Company Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same
US6497510B1 (en) 1999-12-22 2002-12-24 Eastman Kodak Company Deflection enhancement for continuous ink jet printers

Also Published As

Publication number Publication date
US20020101486A1 (en) 2002-08-01
EP1219425A2 (de) 2002-07-03
US6780339B2 (en) 2004-08-24
JP2002210980A (ja) 2002-07-31
DE60111716T2 (de) 2006-05-11
EP1219425A3 (de) 2003-03-26
US6382782B1 (en) 2002-05-07
EP1219425B1 (de) 2005-06-29
JP4142285B2 (ja) 2008-09-03

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