DE60115592D1 - Cmos/mems-integrierter Tintenstrahldruckkopf mit während eines Cmos Herstellungsverfahrens geformten Heizelementen und Verfahren zu seiner Herstellung - Google Patents

Cmos/mems-integrierter Tintenstrahldruckkopf mit während eines Cmos Herstellungsverfahrens geformten Heizelementen und Verfahren zu seiner Herstellung

Info

Publication number
DE60115592D1
DE60115592D1 DE60115592T DE60115592T DE60115592D1 DE 60115592 D1 DE60115592 D1 DE 60115592D1 DE 60115592 T DE60115592 T DE 60115592T DE 60115592 T DE60115592 T DE 60115592T DE 60115592 D1 DE60115592 D1 DE 60115592D1
Authority
DE
Germany
Prior art keywords
cmos
making
manufacturing process
heating elements
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60115592T
Other languages
English (en)
Other versions
DE60115592T2 (de
Inventor
Constantine N Anagnostopoulos
John A Lebens
Gilbert A Hawkins
David P Trauernicht
James M Chwalek
Christopher N Delametter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE60115592D1 publication Critical patent/DE60115592D1/de
Publication of DE60115592T2 publication Critical patent/DE60115592T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
    • B41J2002/032—Deflection by heater around the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/16—Nozzle heaters
DE60115592T 2001-02-22 2001-12-19 Integrierter CMOS/MEMS Tintenstrahldruckkopf mit während der CMOS-Bearbeitung ausgebildeten Heizelementen und Verfahren zum Ausbilden derselben Expired - Lifetime DE60115592T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US792188 2001-02-22
US09/792,188 US6450619B1 (en) 2001-02-22 2001-02-22 CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same

Publications (2)

Publication Number Publication Date
DE60115592D1 true DE60115592D1 (de) 2006-01-12
DE60115592T2 DE60115592T2 (de) 2006-08-10

Family

ID=25156068

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60115592T Expired - Lifetime DE60115592T2 (de) 2001-02-22 2001-12-19 Integrierter CMOS/MEMS Tintenstrahldruckkopf mit während der CMOS-Bearbeitung ausgebildeten Heizelementen und Verfahren zum Ausbilden derselben

Country Status (4)

Country Link
US (2) US6450619B1 (de)
EP (1) EP1234669B1 (de)
JP (1) JP4243057B2 (de)
DE (1) DE60115592T2 (de)

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US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US7469989B2 (en) 2004-01-21 2008-12-30 Silverbrook Research Pty Ltd Printhead chip having longitudinal ink supply channels interrupted by transverse bridges
US7524016B2 (en) * 2004-01-21 2009-04-28 Silverbrook Research Pty Ltd Cartridge unit having negatively pressurized ink storage
US7441865B2 (en) 2004-01-21 2008-10-28 Silverbrook Research Pty Ltd Printhead chip having longitudinal ink supply channels
US7367650B2 (en) 2004-01-21 2008-05-06 Silverbrook Research Pty Ltd Printhead chip having low aspect ratio ink supply channels
GB2410465A (en) * 2004-01-29 2005-08-03 Hewlett Packard Development Co Method of making an inkjet printhead
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
NL1027025C2 (nl) * 2004-09-13 2006-03-14 Univ Delft Tech Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan.
KR100668309B1 (ko) 2004-10-29 2007-01-12 삼성전자주식회사 노즐 플레이트의 제조 방법
US20060100308A1 (en) * 2004-11-09 2006-05-11 Eastman Kodak Company Overcoat composition for printed images
US7897655B2 (en) * 2004-11-09 2011-03-01 Eastman Kodak Company Ink jet ink composition
US7549298B2 (en) * 2004-12-04 2009-06-23 Hewlett-Packard Development Company, L.P. Spray cooling with spray deflection
US8708441B2 (en) 2004-12-30 2014-04-29 Fujifilm Dimatix, Inc. Ink jet printing
US7399068B2 (en) * 2005-03-04 2008-07-15 Eastman Kodak Company Continuous ink jet printing apparatus with integral deflector and gutter structure
US7249829B2 (en) 2005-05-17 2007-07-31 Eastman Kodak Company High speed, high quality liquid pattern deposition apparatus
US7731341B2 (en) * 2005-09-07 2010-06-08 Eastman Kodak Company Continuous fluid jet ejector with anisotropically etched fluid chambers
US7249830B2 (en) * 2005-09-16 2007-07-31 Eastman Kodak Company Ink jet break-off length controlled dynamically by individual jet stimulation
US7364276B2 (en) * 2005-09-16 2008-04-29 Eastman Kodak Company Continuous ink jet apparatus with integrated drop action devices and control circuitry
US7673976B2 (en) * 2005-09-16 2010-03-09 Eastman Kodak Company Continuous ink jet apparatus and method using a plurality of break-off times
US7434919B2 (en) * 2005-09-16 2008-10-14 Eastman Kodak Company Ink jet break-off length measurement apparatus and method
US20070182777A1 (en) * 2006-02-08 2007-08-09 Eastman Kodak Company Printhead and method of forming same
US7607227B2 (en) * 2006-02-08 2009-10-27 Eastman Kodak Company Method of forming a printhead
US7845773B2 (en) * 2006-08-16 2010-12-07 Eastman Kodak Company Continuous printing using temperature lowering pulses
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US7758155B2 (en) * 2007-05-15 2010-07-20 Eastman Kodak Company Monolithic printhead with multiple rows of inkjet orifices
US20080284835A1 (en) * 2007-05-15 2008-11-20 Panchawagh Hrishikesh V Integral, micromachined gutter for inkjet printhead
US20090033727A1 (en) * 2007-07-31 2009-02-05 Anagnostopoulos Constantine N Lateral flow device printhead with internal gutter
US7850289B2 (en) * 2007-08-17 2010-12-14 Eastman Kodak Company Steering fluid jets
US7922313B2 (en) * 2007-11-29 2011-04-12 Silverbrook Research Pty Ltd Printhead with pressure-dampening structures
US8011773B2 (en) * 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Printer with minimal distance between pressure-dampening structures and nozzles
US20090186190A1 (en) * 2008-01-17 2009-07-23 Shan Guan Silicon filter
US8585179B2 (en) * 2008-03-28 2013-11-19 Eastman Kodak Company Fluid flow in microfluidic devices
JP2010207297A (ja) * 2009-03-09 2010-09-24 Canon Inc 液体吐出装置及び液体吐出方法
US8697008B2 (en) * 2009-03-25 2014-04-15 Eastman Kodak Company Droplet generator
US8167406B2 (en) * 2009-07-29 2012-05-01 Eastman Kodak Company Printhead having reinforced nozzle membrane structure
US8182068B2 (en) * 2009-07-29 2012-05-22 Eastman Kodak Company Printhead including dual nozzle structure
WO2011035190A1 (en) * 2009-09-18 2011-03-24 Nano Terra Inc. Polyolefin fibers for use as battery separators and methods of making and using the same
US8465129B2 (en) 2011-05-25 2013-06-18 Eastman Kodak Company Liquid ejection using drop charge and mass
US8382259B2 (en) 2011-05-25 2013-02-26 Eastman Kodak Company Ejecting liquid using drop charge and mass
US8657419B2 (en) 2011-05-25 2014-02-25 Eastman Kodak Company Liquid ejection system including drop velocity modulation
US8469496B2 (en) 2011-05-25 2013-06-25 Eastman Kodak Company Liquid ejection method using drop velocity modulation
US8807715B2 (en) * 2012-01-26 2014-08-19 Eastman Kodak Company Printed drop density reconfiguration
US8454134B1 (en) * 2012-01-26 2013-06-04 Eastman Kodak Company Printed drop density reconfiguration
US8764168B2 (en) * 2012-01-26 2014-07-01 Eastman Kodak Company Printed drop density reconfiguration
US8632162B2 (en) 2012-04-24 2014-01-21 Eastman Kodak Company Nozzle plate including permanently bonded fluid channel
US8585189B1 (en) 2012-06-22 2013-11-19 Eastman Kodak Company Controlling drop charge using drop merging during printing
US8696094B2 (en) 2012-07-09 2014-04-15 Eastman Kodak Company Printing with merged drops using electrostatic deflection
US8888256B2 (en) 2012-07-09 2014-11-18 Eastman Kodak Company Electrode print speed synchronization in electrostatic printer
JP6383629B2 (ja) * 2014-10-15 2018-08-29 エスアイアイ・プリンテック株式会社 ノズルプレート、液体噴射ヘッドおよび液体噴射装置
CN110461612B (zh) * 2017-05-08 2021-06-08 惠普发展公司，有限责任合伙企业 流体喷射装置和操作流体喷射装置的方法
JP2018199235A (ja) * 2017-05-26 2018-12-20 キヤノン株式会社 液体吐出ヘッド

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US1941001A (en) 1929-01-19 1933-12-26 Rca Corp Recorder
US3373437A (en) 1964-03-25 1968-03-12 Richard G. Sweet Fluid droplet recorder with a plurality of jets
FR1495825A (fr) 1965-10-08 1967-09-22 Dispositif d'enregistrement de signaux électriques
US3946398A (en) 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
CA1158706A (en) 1979-12-07 1983-12-13 Carl H. Hertz Method and apparatus for controlling the electric charge on droplets and ink jet recorder incorporating the same
AU657930B2 (en) * 1991-01-30 1995-03-30 Canon Kabushiki Kaisha Nozzle structures for bubblejet print devices
US5880759A (en) 1995-04-12 1999-03-09 Eastman Kodak Company Liquid ink printing apparatus and system
EP0771656A3 (de) * 1995-10-30 1997-11-05 Eastman Kodak Company Streuung der Düsen zur Verminderung der elektrostatischen Wechselwirkung zwischen gleichzeitig ausgestossenen Tröpfchen
US5966154A (en) * 1997-10-17 1999-10-12 Eastman Kodak Company Graphic arts printing plate production by a continuous jet drop printing with asymmetric heating drop deflection
US5963235A (en) * 1997-10-17 1999-10-05 Eastman Kodak Company Continuous ink jet printer with micromechanical actuator drop deflection
US6509917B1 (en) * 1997-10-17 2003-01-21 Eastman Kodak Company Continuous ink jet printer with binary electrostatic deflection
US6079821A (en) 1997-10-17 2000-06-27 Eastman Kodak Company Continuous ink jet printer with asymmetric heating drop deflection
US6322201B1 (en) * 1997-10-22 2001-11-27 Hewlett-Packard Company Printhead with a fluid channel therethrough
US6132028A (en) * 1998-05-14 2000-10-17 Hewlett-Packard Company Contoured orifice plate of thermal ink jet print head
US6158845A (en) * 1999-06-17 2000-12-12 Eastman Kodak Company Ink jet print head having heater upper surface coplanar with a surrounding surface of substrate
US6130688A (en) * 1999-09-09 2000-10-10 Hewlett-Packard Company High efficiency orifice plate structure and printhead using the same
US6247801B1 (en) 1999-12-01 2001-06-19 Eastman Kodak Company Continuous ink jet printing process using asymmetric heating drop deflection
US6412928B1 (en) * 2000-12-29 2002-07-02 Eastman Kodak Company Incorporation of supplementary heaters in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same
US6474794B1 (en) * 2000-12-29 2002-11-05 Eastman Kodak Company Incorporation of silicon bridges in the ink channels of CMOS/MEMS integrated ink jet print head and method of forming same

Also Published As

Publication number Publication date
US20020149654A1 (en) 2002-10-17
EP1234669B1 (de) 2005-12-07
JP2002254653A (ja) 2002-09-11
DE60115592T2 (de) 2006-08-10
EP1234669A3 (de) 2003-04-02
EP1234669A2 (de) 2002-08-28
US6450619B1 (en) 2002-09-17
JP4243057B2 (ja) 2009-03-25

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8364 No opposition during term of opposition