DE60302756T2 - HF MEMS Schalter - Google Patents

HF MEMS Schalter Download PDF

Info

Publication number
DE60302756T2
DE60302756T2 DE60302756T DE60302756T DE60302756T2 DE 60302756 T2 DE60302756 T2 DE 60302756T2 DE 60302756 T DE60302756 T DE 60302756T DE 60302756 T DE60302756 T DE 60302756T DE 60302756 T2 DE60302756 T2 DE 60302756T2
Authority
DE
Germany
Prior art keywords
signal
conducting unit
movable electrodes
unit
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60302756T
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English (en)
Other versions
DE60302756D1 (de
Inventor
Hiroshi Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE60302756D1 publication Critical patent/DE60302756D1/de
Application granted granted Critical
Publication of DE60302756T2 publication Critical patent/DE60302756T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Electronic Switches (AREA)
DE60302756T 2002-12-12 2003-11-18 HF MEMS Schalter Expired - Lifetime DE60302756T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002361113 2002-12-12
JP2003347181A JP4066928B2 (ja) 2002-12-12 2003-10-06 Ｒｆｍｅｍｓスイッチ

Publications (2)

Publication Number Publication Date
DE60302756D1 DE60302756D1 (de) 2006-01-19
DE60302756T2 true DE60302756T2 (de) 2006-06-14

Family

ID=32328391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60302756T Expired - Lifetime DE60302756T2 (de) 2002-12-12 2003-11-18 HF MEMS Schalter

Country Status (7)

Country Link
US (1) US7126447B2 (de)
EP (1) EP1429413B1 (de)
JP (1) JP4066928B2 (de)
KR (1) KR100556562B1 (de)
CN (1) CN100472690C (de)
AT (1) ATE313155T1 (de)
DE (1) DE60302756T2 (de)

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DE60225484T2 (de) * 2002-08-26 2009-03-12 International Business Machines Corp. Membranakivierter mikroelektromechanischer schalter
AU2003279414A1 (en) * 2002-11-19 2004-06-15 Baolab Microsystems S.L. Miniature relay and corresponding uses thereof
JP4447940B2 (ja) * 2004-02-27 2010-04-07 富士通株式会社 マイクロスイッチング素子製造方法およびマイクロスイッチング素子
WO2005111759A2 (en) * 2004-05-19 2005-11-24 Baolab Microsystems S.L. Regulator circuit and corresponding uses
JP4494130B2 (ja) * 2004-08-26 2010-06-30 日本電信電話株式会社 静電駆動スイッチの製造方法
US7653371B2 (en) * 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7657242B2 (en) * 2004-09-27 2010-02-02 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
JP4506529B2 (ja) * 2005-03-18 2010-07-21 オムロン株式会社 静電マイクロスイッチおよびその製造方法、ならびに静電マイクロスイッチを備えた装置
DE602005003008T2 (de) * 2005-03-21 2008-08-14 Delfmems RF MEMS Schalter mit einer flexiblen und freien Schaltmembran
US9083392B2 (en) * 2005-05-17 2015-07-14 The Regents Of The University Of Michigan Wireless sensing and communication utilizing RF transmissions from microdischarges
KR100717844B1 (ko) * 2005-06-30 2007-05-14 한국전자통신연구원 코플라나 와이어-본드 상호연결을 이용하여 패키징한집적회로 스위치 캐리어 장치 및 그 방법
KR100726436B1 (ko) * 2005-07-27 2007-06-11 삼성전자주식회사 정전기력 및 압전력에 의해 구동되는 멤스 스위치
JP2007103312A (ja) 2005-10-07 2007-04-19 Fujitsu Media Device Kk スイッチ
KR20070053515A (ko) * 2005-11-21 2007-05-25 삼성전자주식회사 Ｒｆ 멤스 스위치 및 그 제조방법
CN100389474C (zh) * 2006-04-17 2008-05-21 东南大学 射频微电子机械双膜桥并联电容式开关及其制造方法
KR100707133B1 (ko) 2006-05-16 2007-04-13 삼성전자주식회사 미러구조 및 이를 포함하는 광스캐너
US7554421B2 (en) * 2006-05-16 2009-06-30 Intel Corporation Micro-electromechanical system (MEMS) trampoline switch/varactor
DE102007013102A1 (de) 2007-03-14 2008-09-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Schaltervorrichtung mit mechanischer Kraftverstärkung
GB0711382D0 (en) * 2007-06-13 2007-07-25 Univ Edinburgh Improvements in and relating to reconfigurable antenna and switching
US8384500B2 (en) * 2007-12-13 2013-02-26 Broadcom Corporation Method and system for MEMS switches fabricated in an integrated circuit package
JP5363005B2 (ja) * 2008-02-20 2013-12-11 富士通株式会社 可変容量素子、整合回路素子、および携帯端末装置
JP2009218507A (ja) * 2008-03-12 2009-09-24 Toshiba Corp 高周波電気素子
US8451077B2 (en) * 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
US20100001355A1 (en) * 2008-07-07 2010-01-07 Honeywell International Inc. RF MEMS Switch
US8363380B2 (en) 2009-05-28 2013-01-29 Qualcomm Incorporated MEMS varactors
US8362853B2 (en) 2009-06-19 2013-01-29 Qualcomm Incorporated Tunable MEMS resonators
US8218228B2 (en) 2009-12-18 2012-07-10 Qualcomm Mems Technologies, Inc. Two-terminal variable capacitance MEMS device
US8576029B2 (en) * 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
GB201012923D0 (en) 2010-07-30 2010-09-15 Sarantel Ltd An antenna
KR20130109166A (ko) * 2010-10-29 2013-10-07 더 리젠츠 오브 더 유니버시티 오브 캘리포니아 자기적으로 작동되는 라미네이트 내 마이크로 전자 기계 커패시터 스위치
CN102163516B (zh) * 2011-01-10 2013-04-03 东南大学 一种无电荷注入效应高可靠性电容式射频微机电系统开关
US9641174B2 (en) * 2011-04-11 2017-05-02 The Regents Of The University Of California Use of micro-structured plate for controlling capacitance of mechanical capacitor switches
KR102005808B1 (ko) * 2011-09-02 2019-07-31 카벤디시 키네틱스, 인크. Ｍｅｍｓ 장치용으로 병합된 레그 및 반가요성 고정장치
US9165723B2 (en) * 2012-08-23 2015-10-20 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053873B2 (en) 2012-09-20 2015-06-09 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
US9053874B2 (en) 2012-09-20 2015-06-09 Harris Corporation MEMS switches and other miniaturized devices having encapsulating enclosures, and processes for fabricating same
US9203133B2 (en) 2012-10-18 2015-12-01 Harris Corporation Directional couplers with variable frequency response
WO2014151624A1 (en) * 2013-03-14 2014-09-25 Soligie, Inc. Printed membrance switch activated with magnetic force and applications thereof
CN103943417A (zh) * 2014-04-09 2014-07-23 苏州锟恩电子科技有限公司 一种电容式rf mems开关
CN103943418A (zh) * 2014-04-14 2014-07-23 苏州锟恩电子科技有限公司 一种弹性微桥式rf mems开关
CN105957774B (zh) * 2016-05-03 2018-03-20 北京邮电大学 一种开关梁
CN106971915B (zh) * 2017-03-07 2019-08-09 上海交通大学 一种步进吸合静电锁定的微机械惯性开关
US20190066937A1 (en) * 2017-08-26 2019-02-28 Innovative Micro Technology Mems dual substrate switch with magnetic actuation
US10717641B2 (en) * 2017-08-30 2020-07-21 Invensense, Inc. Cover based adhesion force measurement system for microelectromechanical system (MEMS)
US11594389B2 (en) * 2018-08-17 2023-02-28 Innovative Micro Technology MEMS dual substrate switch with magnetic actuation
GB201815797D0 (en) * 2018-09-27 2018-11-14 Sofant Tech Ltd Mems devices and circuits including same
CN111261980B (zh) * 2018-11-30 2021-06-01 华为技术有限公司 开关组件和天线设备
WO2020239930A1 (de) * 2019-05-28 2020-12-03 B&R Industrial Automation GmbH Transporteinrichtung
US20220293382A1 (en) * 2021-03-12 2022-09-15 Qorvo Us, Inc. Mems switch with beam contact portion continuously extending between input and output terminal electrodes

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JPH10335901A (ja) 1997-06-04 1998-12-18 Nippon Telegr & Teleph Corp <Ntt> 半導体スイッチ
US6143997A (en) 1999-06-04 2000-11-07 The Board Of Trustees Of The University Of Illinois Low actuation voltage microelectromechanical device and method of manufacture
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch
JP3538109B2 (ja) 2000-03-16 2004-06-14 日本電気株式会社 マイクロマシンスイッチ
US6376787B1 (en) 2000-08-24 2002-04-23 Texas Instruments Incorporated Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
US6621387B1 (en) * 2001-02-23 2003-09-16 Analatom Incorporated Micro-electro-mechanical systems switch
US6506989B2 (en) 2001-03-20 2003-01-14 Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College Micro power switch
US6639488B2 (en) * 2001-09-07 2003-10-28 Ibm Corporation MEMS RF switch with low actuation voltage
JP3818176B2 (ja) 2002-03-06 2006-09-06 株式会社村田製作所 Ｒｆｍｅｍｓ素子
EP1343190A3 (de) * 2002-03-08 2005-04-20 Murata Manufacturing Co., Ltd. Element mit veränderlicher Kapazität
JP3783635B2 (ja) 2002-03-08 2006-06-07 株式会社村田製作所 シャントスイッチ素子
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus

Also Published As

Publication number Publication date
EP1429413B1 (de) 2005-12-14
DE60302756D1 (de) 2006-01-19
US20040113727A1 (en) 2004-06-17
CN1519875A (zh) 2004-08-11
CN100472690C (zh) 2009-03-25
JP2004208275A (ja) 2004-07-22
KR20040051512A (ko) 2004-06-18
US7126447B2 (en) 2006-10-24
KR100556562B1 (ko) 2006-03-06
ATE313155T1 (de) 2005-12-15
JP4066928B2 (ja) 2008-03-26
EP1429413A1 (de) 2004-06-16

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