DE60228245D1 - Hochempfindlicher drucksensor mit langzeitstabilität - Google Patents

Hochempfindlicher drucksensor mit langzeitstabilität

Info

Publication number
DE60228245D1
DE60228245D1 DE60228245T DE60228245T DE60228245D1 DE 60228245 D1 DE60228245 D1 DE 60228245D1 DE 60228245 T DE60228245 T DE 60228245T DE 60228245 T DE60228245 T DE 60228245T DE 60228245 D1 DE60228245 D1 DE 60228245D1
Authority
DE
Germany
Prior art keywords
long
pressure sensor
highly sensitive
term stability
sensitive pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60228245T
Other languages
English (en)
Inventor
Yuzef Gokhfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panametrics LLC
Original Assignee
GE Infrastructure Sensing LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GE Infrastructure Sensing LLC filed Critical GE Infrastructure Sensing LLC
Application granted granted Critical
Publication of DE60228245D1 publication Critical patent/DE60228245D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE60228245T 2001-05-25 2002-05-24 Hochempfindlicher drucksensor mit langzeitstabilität Expired - Fee Related DE60228245D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29358101P 2001-05-25 2001-05-25
PCT/US2002/016608 WO2002097387A1 (en) 2001-05-25 2002-05-24 High sensitivity pressure sensor with long term stability

Publications (1)

Publication Number Publication Date
DE60228245D1 true DE60228245D1 (de) 2008-09-25

Family

ID=23129651

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60228245T Expired - Fee Related DE60228245D1 (de) 2001-05-25 2002-05-24 Hochempfindlicher drucksensor mit langzeitstabilität

Country Status (7)

Country Link
US (1) US6813954B2 (de)
EP (1) EP1395802B1 (de)
JP (1) JP2004528576A (de)
KR (1) KR20040004650A (de)
CN (1) CN1250951C (de)
DE (1) DE60228245D1 (de)
WO (1) WO2002097387A1 (de)

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JP4082901B2 (ja) * 2001-12-28 2008-04-30 忠弘 大見 圧力センサ、圧力制御装置及び圧力式流量制御装置の温度ドリフト補正装置
DE50313527D1 (de) * 2003-07-03 2011-04-21 Grundfos As Differenzdrucksensor
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US20080164598A1 (en) * 2007-01-08 2008-07-10 Horst Theuss Semiconductor module
US7860668B2 (en) 2008-06-18 2010-12-28 Qualcomm Mems Technologies, Inc. Pressure measurement using a MEMS device
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
US8132464B2 (en) * 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US8402835B2 (en) * 2011-02-16 2013-03-26 Silicon Microstructures, Inc. Compensation of stress effects on pressure sensor components
CN102252788B (zh) * 2011-04-06 2013-04-17 沈怡茹 一种压力传感器的补偿电路
EP2520917A1 (de) 2011-05-04 2012-11-07 Nxp B.V. Kapazitativer MEMS-Drucksensor, Betriebsverfahren und Herstellungsverfahren
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
DE102014119400A1 (de) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Druckwandler und Verfahren zum Betreiben eines solchen
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
JP7143056B2 (ja) * 2016-12-08 2022-09-28 Ｍｍｉセミコンダクター株式会社 静電容量型トランスデューサシステム、静電容量型トランスデューサ及び、音響センサ
CN108072477B (zh) * 2017-12-05 2020-09-18 北京遥测技术研究所 一种mems气压传感器以及提高其长期稳定性的方法
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
DE102018133056A1 (de) * 2018-12-20 2020-06-25 Endress+Hauser SE+Co. KG Druckmessaufnehmer
CN115077779B (zh) * 2022-06-13 2024-04-12 广东瑞莱斯精密电测技术有限公司 一种用于多通道压力传感器的运行测试模块
CN116448290B (zh) * 2023-06-13 2023-09-01 无锡芯感智半导体有限公司 一种高频动态mems压阻式压力传感器及其制备方法

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DE956173C (de) * 1952-11-04 1957-01-17 Atlas Werke Ag Vorrichtung zum Messen von Druckdifferenzen
US3557621A (en) * 1969-07-07 1971-01-26 C G S Scient Corp Inc Variable capacitance detecting devices
US4289035A (en) 1978-02-15 1981-09-15 The Bendix Corporation Compensated capacitive transducer demodulator circuit
DE3128032A1 (de) 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart Anordnung zur erfassung eines druckes
US4465075A (en) * 1982-03-29 1984-08-14 Motorola, Inc. On-chip pressure transducer and temperature compensation circuit therefor
US4459856A (en) 1982-11-10 1984-07-17 Case Western Reserve University CMOS Bridge for capacitive pressure transducers
JPS59195115A (ja) * 1983-04-20 1984-11-06 Sanyo Electric Co Ltd 半導体圧力センサの出力補償回路
JPS61251714A (ja) * 1985-04-30 1986-11-08 Yokogawa Electric Corp 容量式変位変換器
US4977480A (en) * 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US5237285A (en) 1991-10-18 1993-08-17 Rosemount Inc. Method and apparatus for capacitance temperature compensation and manufacturability in a dual plate capacitive pressure transmitter
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
DE19527919C2 (de) * 1995-07-29 2000-01-13 Beck Gmbh Druckmeselemente Druck-Meßeinrichtung
US5992240A (en) * 1995-11-21 1999-11-30 Fuji Electric Co., Ltd. Pressure detecting apparatus for measuring pressure based on detected capacitance
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6205861B1 (en) * 1999-01-22 2001-03-27 Setra Systems, Inc. Transducer having temperature compensation
US6295875B1 (en) * 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation

Also Published As

Publication number Publication date
KR20040004650A (ko) 2004-01-13
JP2004528576A (ja) 2004-09-16
EP1395802B1 (de) 2008-08-13
US6813954B2 (en) 2004-11-09
EP1395802A1 (de) 2004-03-10
WO2002097387A1 (en) 2002-12-05
EP1395802A4 (de) 2005-10-26
US20020174706A1 (en) 2002-11-28
CN1250951C (zh) 2006-04-12
CN1511252A (zh) 2004-07-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee