NO991000D0 - Sensorelement - Google Patents

Sensorelement

Info

Publication number
NO991000D0
NO991000D0 NO991000A NO991000A NO991000D0 NO 991000 D0 NO991000 D0 NO 991000D0 NO 991000 A NO991000 A NO 991000A NO 991000 A NO991000 A NO 991000A NO 991000 D0 NO991000 D0 NO 991000D0
Authority
NO
Norway
Prior art keywords
sensor element
sensor
Prior art date
Application number
NO991000A
Other languages
English (en)
Other versions
NO313723B1 (no
NO991000L (no
Inventor
Henrik Ogne
Dag Torstein Ang
Original Assignee
Sintef
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintef filed Critical Sintef
Priority to NO19991000A priority Critical patent/NO313723B1/no
Publication of NO991000D0 publication Critical patent/NO991000D0/no
Priority to EP00906775A priority patent/EP1166071A1/en
Priority to AU28335/00A priority patent/AU2833500A/en
Priority to PCT/NO2000/000053 priority patent/WO2000055589A1/en
Priority to US09/913,605 priority patent/US6595063B1/en
Publication of NO991000L publication Critical patent/NO991000L/no
Priority to NO20014145A priority patent/NO20014145L/no
Publication of NO313723B1 publication Critical patent/NO313723B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Surgical Instruments (AREA)
NO19991000A 1999-03-01 1999-03-01 Sensorelement NO313723B1 (no)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NO19991000A NO313723B1 (no) 1999-03-01 1999-03-01 Sensorelement
EP00906775A EP1166071A1 (en) 1999-03-01 2000-02-11 Sensor element
AU28335/00A AU2833500A (en) 1999-03-01 2000-02-11 Sensor element
PCT/NO2000/000053 WO2000055589A1 (en) 1999-03-01 2000-02-11 Sensor element
US09/913,605 US6595063B1 (en) 1999-03-01 2000-02-11 Sensor element especially for pressure sensors
NO20014145A NO20014145L (no) 1999-03-01 2001-08-27 Sensorelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO19991000A NO313723B1 (no) 1999-03-01 1999-03-01 Sensorelement

Publications (3)

Publication Number Publication Date
NO991000D0 true NO991000D0 (no) 1999-03-01
NO991000L NO991000L (no) 2000-09-04
NO313723B1 NO313723B1 (no) 2002-11-18

Family

ID=19903032

Family Applications (1)

Application Number Title Priority Date Filing Date
NO19991000A NO313723B1 (no) 1999-03-01 1999-03-01 Sensorelement

Country Status (5)

Country Link
US (1) US6595063B1 (no)
EP (1) EP1166071A1 (no)
AU (1) AU2833500A (no)
NO (1) NO313723B1 (no)
WO (1) WO2000055589A1 (no)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI116097B (fi) * 2002-08-21 2005-09-15 Heikki Ruotoistenmaeki Voima- tai paineanturi ja menetelmä sen soveltamiseksi
JP4303091B2 (ja) * 2003-11-10 2009-07-29 ニッタ株式会社 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット
NO321281B1 (no) * 2004-09-15 2006-04-18 Sintef Infrarod kilde
DE102005009390B3 (de) * 2005-03-01 2006-10-26 Infineon Technologies Ag Kraftsensor, Verfahren zur Ermittlung einer auf einen Kraftsensor wirkenden Kraft mittels eines Mehrschichtsystems aus magnetischen Schichten
US8800390B2 (en) 2006-02-07 2014-08-12 Michelin Recherche Et Technique S.A. Contact detector with piezoelectric sensor
EP2005132B1 (en) * 2006-02-07 2013-05-29 Michelin Recherche et Technique S.A. Contact detector with piezoelectric sensor
US7878069B2 (en) 2009-05-04 2011-02-01 Kulite Semiconductor Products, Inc. Torque insensitive header assembly
US7661317B2 (en) * 2007-07-03 2010-02-16 Kulite Semiconductor Products,Inc. High pressure transducer having an H shaped cross-section
CN103921171B (zh) * 2014-04-17 2016-04-06 西安交通大学 一种大量程压阻式高频响固定式四分量铣削力传感器
CN106197776B (zh) 2015-05-27 2019-11-05 意法半导体股份有限公司 压力传感器、压力测量设备、制动系统和测量压力的方法
AT520304B1 (de) * 2018-03-21 2019-03-15 Piezocryst Advanced Sensorics Drucksensor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226806B (de) 1960-11-29 1966-10-13 Siemens Ag Kraftmessdose
US3325761A (en) * 1965-01-11 1967-06-13 Electro Optical Systems Inc Pressure transducer
US3341794A (en) * 1965-07-26 1967-09-12 Statham Instrument Inc Transducers with substantially linear response characteristics
US3661011A (en) * 1970-03-02 1972-05-09 Melabs Inc High-speed microvolume membrane osmometry
DD209705A1 (de) * 1982-08-16 1984-05-16 Roland Werthschuetzky Widerstandsstruktur auf einer siliziummembran fuer einen multisensor
US5048165A (en) * 1989-01-30 1991-09-17 Dresser Industries, Inc. Method for controlling the sensitivity and linearity of capacitive transducer systems
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
DD285831A5 (de) * 1989-07-11 1991-01-03 Veb Geraete- Und Regler-Werke Teltow,Betrieb Des Veb Kombinat,Dd Drucksensor fuer kleine druecke
EP0454901B1 (de) 1989-12-06 1994-06-22 Siemens-Albis Aktiengesellschaft Kraftwandler
DE4024780A1 (de) * 1990-08-04 1991-10-17 Bosch Gmbh Robert Keramikmembran-drucksensor
DE4125398C2 (de) * 1991-07-31 1995-03-09 Fraunhofer Ges Forschung Drucksensor und Kraftsensor
DE4215722C2 (de) * 1992-05-13 1997-02-13 Bosch Gmbh Robert Sensorsubstrat mit einer Membran und Verfahren zu deren Herstellung
US6050138A (en) * 1997-10-22 2000-04-18 Exponent, Inc. System and method for performing bulge testing of films, coatings and/or layers

Also Published As

Publication number Publication date
EP1166071A1 (en) 2002-01-02
NO313723B1 (no) 2002-11-18
NO991000L (no) 2000-09-04
US6595063B1 (en) 2003-07-22
AU2833500A (en) 2000-10-04
WO2000055589A1 (en) 2000-09-21

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Legal Events

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