DE60221942D1 - Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente - Google Patents

Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente

Info

Publication number
DE60221942D1
DE60221942D1 DE60221942T DE60221942T DE60221942D1 DE 60221942 D1 DE60221942 D1 DE 60221942D1 DE 60221942 T DE60221942 T DE 60221942T DE 60221942 T DE60221942 T DE 60221942T DE 60221942 D1 DE60221942 D1 DE 60221942D1
Authority
DE
Germany
Prior art keywords
producing light
field elements
generating near
generating
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60221942T
Other languages
English (en)
Other versions
DE60221942T2 (de
Inventor
Nobuyuki Kasama
Manabu Oumi
Yasuyuki Mitsuoka
Kenji Kato
Hidetaka Maeda
Takashi Niwa
Yoko Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE60221942D1 publication Critical patent/DE60221942D1/de
Publication of DE60221942T2 publication Critical patent/DE60221942T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optics & Photonics (AREA)
  • Optical Head (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
DE60221942T 2001-07-16 2002-07-16 Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente Expired - Lifetime DE60221942T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001214732A JP4681162B2 (ja) 2001-07-16 2001-07-16 近視野光発生素子の作製方法
JP2001214732 2001-07-16

Publications (2)

Publication Number Publication Date
DE60221942D1 true DE60221942D1 (de) 2007-10-04
DE60221942T2 DE60221942T2 (de) 2008-05-15

Family

ID=19049497

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60221942T Expired - Lifetime DE60221942T2 (de) 2001-07-16 2002-07-16 Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente

Country Status (4)

Country Link
US (1) US6689545B2 (de)
EP (1) EP1278205B1 (de)
JP (1) JP4681162B2 (de)
DE (1) DE60221942T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6771867B2 (en) * 2002-02-05 2004-08-03 Mitsubishi Chemical Corporation Optical memory device and method for fabricating optical memory device, and method and apparatus for lamination with filmy member
WO2005098966A1 (ja) * 2004-04-05 2005-10-20 Nec Corporation フォトダイオードとその製造方法
US8143601B2 (en) * 2007-08-14 2012-03-27 Massachusetts Institute Of Technology Nanoscale imaging via absorption modulation
US8036069B1 (en) 2010-05-28 2011-10-11 Headway Technologies, Inc. Plasmon shield to shape and reduce optical spot
US8031433B2 (en) 2008-09-05 2011-10-04 Headway Technologies, Inc. Method to make an integrated side shield PMR head with non conformal side gap
US8264788B2 (en) * 2009-02-23 2012-09-11 Seagate Technology Llc Discrete track media (DTM) design and fabrication for heat assisted magnetic recording (HAMR)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3574521B2 (ja) * 1995-11-02 2004-10-06 株式会社リコー 光情報記録媒体再生装置及び再生方法
JP3117667B2 (ja) * 1997-09-26 2000-12-18 財団法人神奈川科学技術アカデミー 光ファイバプローブ及びその製造方法
JPH11204405A (ja) * 1998-01-14 1999-07-30 Nikon Corp 露光体およびこの露光体を用いた露光装置
JP4020225B2 (ja) * 1998-10-27 2007-12-12 セイコーインスツル株式会社 近視野光プローブ
JP3513448B2 (ja) * 1999-11-11 2004-03-31 キヤノン株式会社 光プローブ
US6614742B2 (en) * 1999-12-14 2003-09-02 Fuji Xerox, Ltd. Optical head, magneto-optical head, disk apparatus and manufacturing method of optical head
JP4421768B2 (ja) * 2000-12-07 2010-02-24 セイコーインスツル株式会社 近視野光素子の作製方法
JP4032689B2 (ja) * 2001-10-04 2008-01-16 株式会社日立製作所 近接場光を用いた測定装置／記録再生装置

Also Published As

Publication number Publication date
EP1278205B1 (de) 2007-08-22
JP4681162B2 (ja) 2011-05-11
EP1278205A2 (de) 2003-01-22
DE60221942T2 (de) 2008-05-15
US20030011722A1 (en) 2003-01-16
EP1278205A3 (de) 2004-09-08
JP2003028775A (ja) 2003-01-29
US6689545B2 (en) 2004-02-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition