DE60219842T2 - Vakuumpumpe mit Magnetlager - Google Patents
Vakuumpumpe mit Magnetlager Download PDFInfo
- Publication number
- DE60219842T2 DE60219842T2 DE60219842T DE60219842T DE60219842T2 DE 60219842 T2 DE60219842 T2 DE 60219842T2 DE 60219842 T DE60219842 T DE 60219842T DE 60219842 T DE60219842 T DE 60219842T DE 60219842 T2 DE60219842 T2 DE 60219842T2
- Authority
- DE
- Germany
- Prior art keywords
- shaft
- magnetic bearing
- target
- section
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 30
- 239000010959 steel Substances 0.000 claims description 30
- 229910000576 Laminated steel Inorganic materials 0.000 claims description 28
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 238000006073 displacement reaction Methods 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 9
- 238000000576 coating method Methods 0.000 description 8
- 238000001816 cooling Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001041076A JP2002242876A (ja) | 2001-02-19 | 2001-02-19 | 磁気軸受式ポンプ |
| JP2001041076 | 2001-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60219842D1 DE60219842D1 (de) | 2007-06-14 |
| DE60219842T2 true DE60219842T2 (de) | 2008-01-17 |
Family
ID=18903572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60219842T Expired - Lifetime DE60219842T2 (de) | 2001-02-19 | 2002-02-08 | Vakuumpumpe mit Magnetlager |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6559568B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP1233189B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2002242876A (cg-RX-API-DMAC7.html) |
| KR (1) | KR100707235B1 (cg-RX-API-DMAC7.html) |
| DE (1) | DE60219842T2 (cg-RX-API-DMAC7.html) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001023768A1 (en) * | 1999-09-30 | 2001-04-05 | Mitsubishi Denki Kabushiki Kaisha | Thrust magnetic bearing |
| JP4435613B2 (ja) * | 2003-10-14 | 2010-03-24 | ハイデルベルガー ドルツクマシーネン アクチエンゲゼルシヤフト | 版の画像付け装置 |
| JP2005273802A (ja) * | 2004-03-25 | 2005-10-06 | Boc Edwards Kk | 磁気軸受装置及び該磁気軸受装置を搭載したターボ分子ポンプ |
| KR100604894B1 (ko) * | 2004-08-21 | 2006-07-28 | 삼성전자주식회사 | 반도체 제조설비의 회전운동장치 |
| DE102006053041A1 (de) * | 2006-11-10 | 2008-05-15 | Schaeffler Kg | Lagerungsanordnung, insbesondere für eine Werkzeugmaschine |
| KR101489025B1 (ko) * | 2007-10-09 | 2015-02-04 | 쯔구미쯔 마쯔이 | 전자기 유도식 발열 장치ㆍ열풍 발생 장치 및 발전 장치 |
| EP2048390A3 (en) * | 2007-10-12 | 2009-08-05 | General Electric Company | Armature with coated sheets, magnetic bearing with an armature and method for assembling an armature |
| CL2009000917A1 (es) * | 2008-04-17 | 2010-07-02 | K Sortore Christopher | Una maquina que comprende un rotor con una pluralidad de imanes permanentes de tierras raras,retenidos en el rotor por medio de un casquillo cilindrico, el casquillo es retenido por medio de una banda que posee una pluralidad apilada de laminaciones de arandelas, estando cada laminacion aislada electricamente. |
| BRPI0907304A2 (pt) | 2008-04-18 | 2016-06-14 | Synchrony Inc | "máquina" |
| US9583991B2 (en) * | 2009-06-24 | 2017-02-28 | Synchrony, Inc. | Systems, devices, and/or methods for managing magnetic bearings |
| WO2011163456A1 (en) | 2010-06-23 | 2011-12-29 | Synchrony, Inc. | Split magnetic thrust bearing |
| KR101979043B1 (ko) * | 2011-10-31 | 2019-05-15 | 에드워즈 가부시키가이샤 | 고정 부재 및 진공 펌프 |
| CN105317839A (zh) * | 2015-12-14 | 2016-02-10 | 珠海格力节能环保制冷技术研究中心有限公司 | 磁悬浮轴承定子组件及制作方法 |
| JP6948147B2 (ja) * | 2017-04-18 | 2021-10-13 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト |
| JP6999485B2 (ja) * | 2018-04-20 | 2022-01-18 | エドワーズ株式会社 | 真空ポンプ、及び真空ポンプの制御装置 |
| JP7408274B2 (ja) * | 2018-06-01 | 2024-01-05 | エドワーズ株式会社 | 真空ポンプ及びセンサターゲット |
| US12117009B2 (en) * | 2019-04-25 | 2024-10-15 | Shimadzu Corporation | Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing |
| JP7454928B2 (ja) * | 2019-08-23 | 2024-03-25 | エドワーズ株式会社 | 真空ポンプ及び真空ポンプに用いられる電磁石ユニット |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841296A (ja) * | 1981-09-04 | 1983-03-10 | Seiko Instr & Electronics Ltd | 磁気軸受を応用した小型軸流分子ポンプ |
| CA1295723C (en) * | 1987-07-23 | 1992-02-11 | Robert A. Golobic | Gas bearings for gas lasers |
| JPS6441288A (en) * | 1987-08-07 | 1989-02-13 | Nec Corp | Laser diode driving device |
| DE4220015A1 (de) | 1992-06-19 | 1993-12-23 | Leybold Ag | Gasreibungsvakuumpumpe |
| JP2934594B2 (ja) * | 1995-09-08 | 1999-08-16 | 株式会社トヤマ | シンクロトロン放射光ビーム集光装置 |
| DE19548664A1 (de) | 1995-12-23 | 1997-06-26 | Csm Gmbh | Zentrifugenmagnetlagerung |
| JP3000356B1 (ja) | 1998-07-07 | 2000-01-17 | セイコー精機株式会社 | 真空ポンプ及び真空装置 |
| JP3010529B1 (ja) * | 1998-08-28 | 2000-02-21 | セイコー精機株式会社 | 真空ポンプ、及び真空装置 |
| US6166469A (en) * | 1998-10-21 | 2000-12-26 | General Electric Company | Method of fabricating a compact bearingless machine drive system |
| JP3349679B2 (ja) * | 1999-03-31 | 2002-11-25 | ビーオーシーエドワーズテクノロジーズ株式会社 | 磁気軸受装置及びこれを備えた真空ポンプ |
| JP4104098B2 (ja) | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | 真空ポンプ |
-
2001
- 2001-02-19 JP JP2001041076A patent/JP2002242876A/ja active Pending
-
2002
- 2002-02-06 US US10/068,833 patent/US6559568B2/en not_active Expired - Lifetime
- 2002-02-08 DE DE60219842T patent/DE60219842T2/de not_active Expired - Lifetime
- 2002-02-08 EP EP02250895A patent/EP1233189B1/en not_active Expired - Lifetime
- 2002-02-19 KR KR1020020008792A patent/KR100707235B1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE60219842D1 (de) | 2007-06-14 |
| US20020113509A1 (en) | 2002-08-22 |
| KR100707235B1 (ko) | 2007-04-13 |
| EP1233189A1 (en) | 2002-08-21 |
| KR20020067993A (ko) | 2002-08-24 |
| JP2002242876A (ja) | 2002-08-28 |
| EP1233189B1 (en) | 2007-05-02 |
| US6559568B2 (en) | 2003-05-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS JAPAN LTD., TOKIO, JP |
|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP |