DE60218606D1 - Photodetektor und sein Betriebsverfahren - Google Patents

Photodetektor und sein Betriebsverfahren

Info

Publication number
DE60218606D1
DE60218606D1 DE60218606T DE60218606T DE60218606D1 DE 60218606 D1 DE60218606 D1 DE 60218606D1 DE 60218606 T DE60218606 T DE 60218606T DE 60218606 T DE60218606 T DE 60218606T DE 60218606 D1 DE60218606 D1 DE 60218606D1
Authority
DE
Germany
Prior art keywords
photodetector
operating method
operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60218606T
Other languages
English (en)
Other versions
DE60218606T2 (de
Inventor
Y Yoneda
I Hanawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Device Innovations Inc
Original Assignee
Sumitomo Electric Device Innovations Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Device Innovations Inc filed Critical Sumitomo Electric Device Innovations Inc
Application granted granted Critical
Publication of DE60218606D1 publication Critical patent/DE60218606D1/de
Publication of DE60218606T2 publication Critical patent/DE60218606T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02002—Arrangements for conducting electric current to or from the device in operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
    • H01L31/1035—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type the devices comprising active layers formed only by AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)
  • Optical Communication System (AREA)
DE60218606T 2001-11-26 2002-11-13 Photodetektor und sein Betriebsverfahren Expired - Lifetime DE60218606T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001360040 2001-11-26
JP2001360040A JP4157698B2 (ja) 2001-11-26 2001-11-26 半導体受光素子およびその駆動方法

Publications (2)

Publication Number Publication Date
DE60218606D1 true DE60218606D1 (de) 2007-04-19
DE60218606T2 DE60218606T2 (de) 2007-08-30

Family

ID=19170933

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60218606T Expired - Lifetime DE60218606T2 (de) 2001-11-26 2002-11-13 Photodetektor und sein Betriebsverfahren

Country Status (5)

Country Link
US (1) US6831265B2 (de)
EP (1) EP1315217B1 (de)
JP (1) JP4157698B2 (de)
DE (1) DE60218606T2 (de)
TW (1) TW580774B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4058457B2 (ja) * 2000-12-19 2008-03-12 ユーディナデバイス株式会社 半導体受光装置
US20050161695A1 (en) * 2003-09-05 2005-07-28 Sae Magnetics (H.K.) Ltd. Systems and methods having a metal-semiconductor-metal (MSM) photodetector with buried oxide layer
KR100506741B1 (ko) * 2003-12-24 2005-08-08 삼성전기주식회사 플립칩용 질화물 반도체 발광소자 및 그 제조방법
US7683308B2 (en) * 2004-01-12 2010-03-23 Ecole Polytechnique Federale de Lausanne EFPL Controlling spectral response of photodetector for an image sensor
TWI237110B (en) * 2004-02-20 2005-08-01 Asia Optical Co Inc Optical power meter
US7259444B1 (en) * 2004-07-20 2007-08-21 Hrl Laboratories, Llc Optoelectronic device with patterned ion implant subcollector
JP4674894B2 (ja) * 2004-12-28 2011-04-20 パナソニック株式会社 固体撮像装置及びその製造方法
US7501628B2 (en) * 2005-02-14 2009-03-10 Ecole Polytechnique Federale De Lausanne Epfl Transducer for reading information stored on an optical record carrier, single photon detector based storage system and method for reading data from an optical record carrier
US7547872B2 (en) * 2005-02-14 2009-06-16 Ecole Polytechnique Federale De Lausanne Integrated circuit comprising an array of single photon avalanche diodes
US7233051B2 (en) * 2005-06-28 2007-06-19 Intel Corporation Germanium/silicon avalanche photodetector with separate absorption and multiplication regions
US20070012948A1 (en) * 2005-07-15 2007-01-18 Dries J C Combined APD / PIN InGaAs photodetector with microlens structure and method of manufacture
WO2007011558A2 (en) * 2005-07-15 2007-01-25 Xponent Photonics Inc Reflector for a double-pass photodetector
JP5015494B2 (ja) * 2006-05-22 2012-08-29 住友電工デバイス・イノベーション株式会社 半導体受光素子
US7741657B2 (en) 2006-07-17 2010-06-22 Intel Corporation Inverted planar avalanche photodiode
US7683397B2 (en) * 2006-07-20 2010-03-23 Intel Corporation Semi-planar avalanche photodiode
US7795064B2 (en) * 2007-11-14 2010-09-14 Jds Uniphase Corporation Front-illuminated avalanche photodiode
US8242432B2 (en) * 2009-10-23 2012-08-14 Kotura, Inc. System having light sensor with enhanced sensitivity including a multiplication layer for generating additional electrons
US8639065B2 (en) * 2010-06-18 2014-01-28 Kotura, Inc. System having avalanche effect light sensor with enhanced sensitivity
US8461624B2 (en) * 2010-11-22 2013-06-11 Intel Corporation Monolithic three terminal photodetector
JP2012248812A (ja) * 2011-05-31 2012-12-13 Sumitomo Electric Ind Ltd 半導体光集積素子の製造方法
JP6041120B2 (ja) 2012-03-22 2016-12-07 住友電工デバイス・イノベーション株式会社 半導体受光素子の製造方法
US9377581B2 (en) 2013-05-08 2016-06-28 Mellanox Technologies Silicon Photonics Inc. Enhancing the performance of light sensors that receive light signals from an integrated waveguide
JP2015153899A (ja) * 2014-02-14 2015-08-24 日本電信電話株式会社 受光素子の制御方法
CN104576806B (zh) * 2014-08-12 2016-01-06 深圳市芯思杰联邦国际科技发展有限公司 侧入光式pin光电探测器芯片及其制作方法
JP6362142B2 (ja) * 2015-09-15 2018-07-25 日本電信電話株式会社 ゲルマニウム受光器
EP3261134A1 (de) * 2016-06-20 2017-12-27 ams AG Direktionaler photodetektor und anordnung mit optischem sensor
JP6862941B2 (ja) * 2017-03-09 2021-04-21 三菱電機株式会社 裏面入射型受光素子およびその製造方法
JP6972067B2 (ja) * 2017-11-17 2021-11-24 株式会社東芝 半導体装置
CN111739952A (zh) * 2020-06-18 2020-10-02 武汉光迅科技股份有限公司 光探测器及制作方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4876209A (en) * 1988-01-06 1989-10-24 U.S.C. Method of making avalanche photodiode
US5179430A (en) * 1988-05-24 1993-01-12 Nec Corporation Planar type heterojunction avalanche photodiode
GB9009726D0 (en) * 1990-05-01 1990-06-20 British Telecomm Optoelectronic device
JP2639347B2 (ja) * 1994-06-23 1997-08-13 日本電気株式会社 半導体受光素子
JP3287458B2 (ja) * 1998-06-24 2002-06-04 日本電気株式会社 超高速・低電圧駆動アバランシェ増倍型半導体受光素子
JP3141847B2 (ja) * 1998-07-03 2001-03-07 日本電気株式会社 アバランシェフォトダイオード
JP3910817B2 (ja) * 2000-12-19 2007-04-25 ユーディナデバイス株式会社 半導体受光装置

Also Published As

Publication number Publication date
DE60218606T2 (de) 2007-08-30
JP2003163364A (ja) 2003-06-06
US6831265B2 (en) 2004-12-14
TW200300613A (en) 2003-06-01
US20030164444A1 (en) 2003-09-04
TW580774B (en) 2004-03-21
EP1315217B1 (de) 2007-03-07
JP4157698B2 (ja) 2008-10-01
EP1315217A3 (de) 2005-05-04
EP1315217A2 (de) 2003-05-28

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Legal Events

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: SEEGER SEEGER LINDNER PARTNERSCHAFT PATENTANWAELTE