DE60208617T2 - Druckkopf mit einer Dünnfilmmembran mit einem schwebenden Teil - Google Patents
Druckkopf mit einer Dünnfilmmembran mit einem schwebenden Teil Download PDFInfo
- Publication number
- DE60208617T2 DE60208617T2 DE60208617T DE60208617T DE60208617T2 DE 60208617 T2 DE60208617 T2 DE 60208617T2 DE 60208617 T DE60208617 T DE 60208617T DE 60208617 T DE60208617 T DE 60208617T DE 60208617 T2 DE60208617 T2 DE 60208617T2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- printhead
- thin film
- film membrane
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 74
- 239000012528 membrane Substances 0.000 title claims description 61
- 238000007667 floating Methods 0.000 title claims description 29
- 239000012530 fluid Substances 0.000 claims description 105
- 239000010410 layer Substances 0.000 claims description 84
- 239000000758 substrate Substances 0.000 claims description 51
- 238000005530 etching Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 229910016570 AlCu Inorganic materials 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 150000002118 epoxides Chemical class 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- RVSGESPTHDDNTH-UHFFFAOYSA-N alumane;tantalum Chemical compound [AlH3].[Ta] RVSGESPTHDDNTH-UHFFFAOYSA-N 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000834 fixative Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US120 | 2001-10-31 | ||
| US10/000,120 US6626523B2 (en) | 2001-10-31 | 2001-10-31 | Printhead having a thin film membrane with a floating section |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60208617D1 DE60208617D1 (de) | 2006-04-06 |
| DE60208617T2 true DE60208617T2 (de) | 2006-09-21 |
Family
ID=21690008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60208617T Expired - Lifetime DE60208617T2 (de) | 2001-10-31 | 2002-10-25 | Druckkopf mit einer Dünnfilmmembran mit einem schwebenden Teil |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6626523B2 (enExample) |
| EP (1) | EP1308283B1 (enExample) |
| JP (1) | JP4299526B2 (enExample) |
| DE (1) | DE60208617T2 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITTO20030841A1 (it) * | 2003-10-27 | 2005-04-28 | Olivetti I Jet Spa | Testina di stampa a getto d'inchiostro e suo processo di fabbricazione. |
| JP4522086B2 (ja) | 2003-12-15 | 2010-08-11 | キヤノン株式会社 | 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法 |
| CN100364770C (zh) * | 2004-06-07 | 2008-01-30 | 旺宏电子股份有限公司 | 用于使用微机电系统的喷墨头的流体排出装置及其制造方法与操作方法 |
| US20060081239A1 (en) * | 2004-10-15 | 2006-04-20 | Alley Rodney L | Thermally efficient drop generator |
| US7710371B2 (en) * | 2004-12-16 | 2010-05-04 | Xerox Corporation | Variable volume between flexible structure and support surface |
| JP5006663B2 (ja) * | 2006-03-08 | 2012-08-22 | キヤノン株式会社 | 液体吐出ヘッド |
| KR100723428B1 (ko) * | 2006-05-30 | 2007-05-30 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
| KR100818282B1 (ko) * | 2006-10-26 | 2008-04-01 | 삼성전자주식회사 | 잉크젯 프린트헤드 |
| US7600856B2 (en) * | 2006-12-12 | 2009-10-13 | Eastman Kodak Company | Liquid ejector having improved chamber walls |
| WO2010044775A1 (en) * | 2008-10-14 | 2010-04-22 | Hewlett-Packard Development Company, L.P. | Fluid ejector structure |
| CN102202896A (zh) * | 2008-10-30 | 2011-09-28 | 惠普开发有限公司 | 热喷墨打印头给送过渡腔和使用其进行冷却的方法 |
| EP2459384A4 (en) | 2009-07-31 | 2013-02-20 | Hewlett Packard Development Co | INK JET PRINT HEAD AND METHOD WITH CENTRAL INK FEED CHANNEL |
| US8425787B2 (en) * | 2009-08-26 | 2013-04-23 | Hewlett-Packard Development Company, L.P. | Inkjet printhead bridge beam fabrication method |
| WO2012161710A1 (en) * | 2011-05-25 | 2012-11-29 | Hewlett-Packard Development Company, L.P. | Fluidic membrane |
| US10449762B2 (en) | 2015-10-30 | 2019-10-22 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
| CN110177695B (zh) | 2017-03-15 | 2022-02-15 | 惠普发展公司，有限责任合伙企业 | 流体喷射管芯 |
| JP7146094B2 (ja) | 2019-02-06 | 2022-10-03 | ヒューレット－パッカード デベロップメント カンパニー エル．ピー． | プリントヘッド用のダイ |
| PT3710260T (pt) | 2019-02-06 | 2021-08-19 | Hewlett Packard Development Co | Matriz para uma cabeça de impressão |
| CN113543978B (zh) * | 2019-02-06 | 2023-06-30 | 惠普发展公司，有限责任合伙企业 | 打印头的管芯、打印头和形成打印头的管芯的方法 |
| CN113423578B (zh) | 2019-02-06 | 2022-12-06 | 惠普发展公司，有限责任合伙企业 | 用于打印头的管芯和用于形成用于打印头的管芯的方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4894664A (en) * | 1986-04-28 | 1990-01-16 | Hewlett-Packard Company | Monolithic thermal ink jet printhead with integral nozzle and ink feed |
| US6000787A (en) * | 1996-02-07 | 1999-12-14 | Hewlett-Packard Company | Solid state ink jet print head |
| US6305790B1 (en) * | 1996-02-07 | 2001-10-23 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle |
| US6003977A (en) * | 1996-02-07 | 1999-12-21 | Hewlett-Packard Company | Bubble valving for ink-jet printheads |
| US6543884B1 (en) * | 1996-02-07 | 2003-04-08 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having etched back PSG layer |
| US6554404B2 (en) * | 1996-02-07 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Conductor routing for a printhead |
| US6402301B1 (en) * | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
| US6419346B1 (en) * | 2001-01-25 | 2002-07-16 | Hewlett-Packard Company | Two-step trench etch for a fully integrated thermal inkjet printhead |
| US6627467B2 (en) * | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Fluid ejection device fabrication |
-
2001
- 2001-10-31 US US10/000,120 patent/US6626523B2/en not_active Expired - Lifetime
-
2002
- 2002-10-25 DE DE60208617T patent/DE60208617T2/de not_active Expired - Lifetime
- 2002-10-25 EP EP02023964A patent/EP1308283B1/en not_active Expired - Lifetime
- 2002-10-31 JP JP2002316959A patent/JP4299526B2/ja not_active Expired - Fee Related
-
2003
- 2003-05-06 US US10/430,645 patent/US6974548B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003165225A (ja) | 2003-06-10 |
| JP4299526B2 (ja) | 2009-07-22 |
| US6974548B2 (en) | 2005-12-13 |
| DE60208617D1 (de) | 2006-04-06 |
| US20030189622A1 (en) | 2003-10-09 |
| EP1308283A3 (en) | 2003-10-15 |
| US6626523B2 (en) | 2003-09-30 |
| US20030081074A1 (en) | 2003-05-01 |
| EP1308283B1 (en) | 2006-01-11 |
| EP1308283A2 (en) | 2003-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |
|
| 8328 | Change in the person/name/address of the agent |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER & ZINKLER, 82049 PU |
|
| 8364 | No opposition during term of opposition |