DE69013480T2 - Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen. - Google Patents

Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen.

Info

Publication number
DE69013480T2
DE69013480T2 DE69013480T DE69013480T DE69013480T2 DE 69013480 T2 DE69013480 T2 DE 69013480T2 DE 69013480 T DE69013480 T DE 69013480T DE 69013480 T DE69013480 T DE 69013480T DE 69013480 T2 DE69013480 T2 DE 69013480T2
Authority
DE
Germany
Prior art keywords
print head
electrical circuits
jet print
color jet
passivation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69013480T
Other languages
English (en)
Other versions
DE69013480D1 (de
Inventor
William G Hawkins
Cathie J Burke
Daniel O Roll
Pamela J Hartman
Diane Atkinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69013480D1 publication Critical patent/DE69013480D1/de
Publication of DE69013480T2 publication Critical patent/DE69013480T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157—Partial encapsulation or coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69013480T 1989-12-26 1990-11-09 Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen. Expired - Fee Related DE69013480T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/456,431 US5010355A (en) 1989-12-26 1989-12-26 Ink jet printhead having ionic passivation of electrical circuitry

Publications (2)

Publication Number Publication Date
DE69013480D1 DE69013480D1 (de) 1994-11-24
DE69013480T2 true DE69013480T2 (de) 1995-02-23

Family

ID=23812741

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69013480T Expired - Fee Related DE69013480T2 (de) 1989-12-26 1990-11-09 Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen.

Country Status (4)

Country Link
US (1) US5010355A (de)
EP (1) EP0434946B1 (de)
JP (1) JPH0688414B2 (de)
DE (1) DE69013480T2 (de)

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US5187499A (en) * 1990-03-27 1993-02-16 Canon Kabushiki Kaisha Liquid jet recording head with protective layer having an ion exchanger
US5552814A (en) * 1992-09-01 1996-09-03 Brother Kogyo Kabushiki Kaisha Image recording apparatus wherein toner carrier member and particle-flow modulating electrode member are held in contact with each other
US5428498A (en) * 1992-09-28 1995-06-27 Xerox Corporation Office environment level electrostatic discharge protection
JPH06143574A (ja) * 1992-11-05 1994-05-24 Xerox Corp エンハンスされた相互コンダクタンスを持つパワーｍｏｓドライバデバイスを有するサーマルインクジェットプリントヘッド
US5515089A (en) * 1992-12-08 1996-05-07 Xerox Corporation Ink jet printhead with sealed manifold and printhead die
US5450108A (en) * 1993-09-27 1995-09-12 Xerox Corporation Ink jet printhead which avoids effects of unwanted formations developed during fabrication
JPH07186388A (ja) * 1993-11-22 1995-07-25 Xerox Corp 大規模配列インク・ジェット・プリントヘッドおよびその製造方法
US5410340A (en) * 1993-11-22 1995-04-25 Xerox Corporation Off center heaters for thermal ink jet printheads
US5635966A (en) * 1994-01-11 1997-06-03 Hewlett-Packard Company Edge feed ink delivery thermal inkjet printhead structure and method of fabrication
US5534901A (en) * 1994-06-06 1996-07-09 Xerox Corporation Ink jet printhead having a flat surface heater plate
DE19536429A1 (de) * 1995-09-29 1997-04-10 Siemens Ag Tintenstrahldruckkopf und Verfahren zum Herstellen eines solchen Tintenstrahldruckkopfes
US6758552B1 (en) * 1995-12-06 2004-07-06 Hewlett-Packard Development Company Integrated thin-film drive head for thermal ink-jet printer
US6239820B1 (en) 1995-12-06 2001-05-29 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5883650A (en) * 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5729261A (en) * 1996-03-28 1998-03-17 Xerox Corporation Thermal ink jet printhead with improved ink resistance
US5773553A (en) * 1996-06-13 1998-06-30 Xerox Corporation Polyimide curing process and improved thermal ink jet printhead prepared thereby
US5751316A (en) * 1996-07-01 1998-05-12 Xerox Corporation Thermal ink jet printhead with ink resistant heat sink coating
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JP3713921B2 (ja) * 1996-10-24 2005-11-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
US6106088A (en) * 1997-10-01 2000-08-22 Xerox Corporation Printhead assembly with integral lifetime monitoring system
US6102528A (en) 1997-10-17 2000-08-15 Xerox Corporation Drive transistor for an ink jet printhead
US6532027B2 (en) * 1997-12-18 2003-03-11 Canon Kabushiki Kaisha Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus
US6039436A (en) * 1998-03-12 2000-03-21 Xerox Corporation Thermal ink-jet printhead with lateral thermal insulation for the heating elements
US6449831B1 (en) * 1998-06-19 2002-09-17 Lexmark International, Inc Process for making a heater chip module
US6315384B1 (en) * 1999-03-08 2001-11-13 Hewlett-Packard Company Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein
DE19931110A1 (de) * 1999-07-06 2001-01-25 Ekra Eduard Kraft Gmbh Druckkopf zum Ausspritzen eines heißen flüssigen Mediums und Verfahren zur Herstellung einer metallisches Lot umfassenden Verbindungsstelle
US6547353B2 (en) 1999-07-27 2003-04-15 Stmicroelectronics, Inc. Thermal ink jet printhead system with multiple output driver circuit for powering heating element and associated method
US6132032A (en) * 1999-08-13 2000-10-17 Hewlett-Packard Company Thin-film print head for thermal ink-jet printers
US6312083B1 (en) 1999-12-20 2001-11-06 Xerox Corporation Printhead assembly with ink monitoring system
JP3503611B2 (ja) * 2001-04-13 2004-03-08 ソニー株式会社 プリンタヘッド、プリンタ及びプリンタヘッドの製造方法
JP3812485B2 (ja) * 2002-04-10 2006-08-23 ソニー株式会社 液体吐出装置及びプリンタ
CN1574214A (zh) * 2003-06-03 2005-02-02 国际商业机器公司 用于制造电子器件的基于熔化的图案化工艺
US7011395B2 (en) * 2003-06-27 2006-03-14 Lexmark International, Inc. Print head energy storage
US7278706B2 (en) * 2003-10-30 2007-10-09 Hewlett-Packard Development Company, L.P. Fluid ejection device
US7018012B2 (en) * 2003-11-14 2006-03-28 Lexmark International, Inc. Microfluid ejection device having efficient logic and driver circuitry
US7204574B2 (en) * 2004-06-30 2007-04-17 Lexmark International, Inc. Polyimide thickfilm flow feature photoresist and method of applying same
JP4771042B2 (ja) * 2004-07-23 2011-09-14 ゲットナー・ファンデーション・エルエルシー 圧電素子搭載装置、およびこれを用いた液滴吐出装置、画像出力装置
US20100159193A1 (en) * 2008-12-18 2010-06-24 Palo Alto Research Center Incorporated Combined electrical and fluidic interconnect via structure
US8079667B2 (en) * 2008-12-18 2011-12-20 Palo Alto Research Center Incorporated Drop generating apparatus
JP5350429B2 (ja) * 2011-02-10 2013-11-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US20130006894A1 (en) * 2011-05-02 2013-01-03 Jerry Richard Jones System for calculating the cost-per-unit of ink

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Publication number Priority date Publication date Assignee Title
JPS5845177B2 (ja) * 1979-03-09 1983-10-07 富士通株式会社 半導体表面絶縁膜の形成法
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
JPS59119733A (ja) * 1982-12-24 1984-07-11 Toshiba Corp 半導体装置
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
JPS60257582A (ja) * 1984-06-04 1985-12-19 Nippon Denso Co Ltd 磁気抵抗装置
US4686559A (en) * 1984-08-03 1987-08-11 Advanced Micro Devices, Inc. Topside sealing of integrated circuit device
JPS61117841A (ja) * 1984-11-14 1986-06-05 Hitachi Ltd シリコン窒化膜の形成方法
JPH0698772B2 (ja) * 1984-12-06 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
USRE32572E (en) * 1985-04-03 1988-01-05 Xerox Corporation Thermal ink jet printhead and process therefor
JPH0643133B2 (ja) * 1985-06-19 1994-06-08 株式会社リコー インクジエツトヘツドの帯電防止処理方法
US4638337A (en) * 1985-08-02 1987-01-20 Xerox Corporation Thermal ink jet printhead
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4774530A (en) * 1987-11-02 1988-09-27 Xerox Corporation Ink jet printhead

Also Published As

Publication number Publication date
EP0434946A2 (de) 1991-07-03
EP0434946A3 (en) 1992-01-08
EP0434946B1 (de) 1994-10-19
US5010355A (en) 1991-04-23
JPH0688414B2 (ja) 1994-11-09
JPH03199050A (ja) 1991-08-30
DE69013480D1 (de) 1994-11-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: HOEFER & PARTNER, 81545 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: SAMSUNG ELECTRONICS CO., LTD., SUWON, KYONGGI, KR

8339 Ceased/non-payment of the annual fee