DE602009000885D1 - Herstellungsverfahren für ein Bauteil ausgehend von einem Substrat mit einer Opferschicht aus einkristallinem Silizium - Google Patents
Herstellungsverfahren für ein Bauteil ausgehend von einem Substrat mit einer Opferschicht aus einkristallinem SiliziumInfo
- Publication number
- DE602009000885D1 DE602009000885D1 DE602009000885T DE602009000885T DE602009000885D1 DE 602009000885 D1 DE602009000885 D1 DE 602009000885D1 DE 602009000885 T DE602009000885 T DE 602009000885T DE 602009000885 T DE602009000885 T DE 602009000885T DE 602009000885 D1 DE602009000885 D1 DE 602009000885D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- sacrificial layer
- monocrystalline
- monocrystalline silicon
- production method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 abstract 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 abstract 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 abstract 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052712 strontium Inorganic materials 0.000 abstract 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000000407 epitaxy Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
- B81C1/00595—Control etch selectivity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0135—Controlling etch progression
- B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Saccharide Compounds (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0803496A FR2932923B1 (fr) | 2008-06-23 | 2008-06-23 | Substrat heterogene comportant une couche sacrificielle et son procede de realisation. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE602009000885D1 true DE602009000885D1 (de) | 2011-04-28 |
Family
ID=40600222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE602009000885T Active DE602009000885D1 (de) | 2008-06-23 | 2009-06-22 | Herstellungsverfahren für ein Bauteil ausgehend von einem Substrat mit einer Opferschicht aus einkristallinem Silizium |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7993949B2 (de) |
| EP (1) | EP2138454B1 (de) |
| JP (1) | JP2010045333A (de) |
| AT (1) | ATE501976T1 (de) |
| DE (1) | DE602009000885D1 (de) |
| FR (1) | FR2932923B1 (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2932788A1 (fr) * | 2008-06-23 | 2009-12-25 | Commissariat Energie Atomique | Procede de fabrication d'un composant electromecanique mems / nems. |
| DE102008040597A1 (de) * | 2008-07-22 | 2010-01-28 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Rückvolumen |
| WO2010111601A2 (en) | 2009-03-26 | 2010-09-30 | Semprius, Inc. | Methods of forming printable integrated circuit devices and devices formed thereby |
| US8956903B2 (en) | 2010-06-25 | 2015-02-17 | International Business Machines Corporation | Planar cavity MEMS and related structures, methods of manufacture and design structures |
| FI123933B (fi) * | 2011-05-13 | 2013-12-31 | Teknologian Tutkimuskeskus Vtt | Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi |
| US8941182B2 (en) * | 2011-06-07 | 2015-01-27 | Globalfoundries Inc. | Buried sublevel metallizations for improved transistor density |
| FR2999335B1 (fr) * | 2012-12-06 | 2016-03-11 | Commissariat Energie Atomique | Procede ameliore de realisation d'un composant a structure suspendue et d'un transistor co-integres sur un meme substrat. |
| DE102013200354A1 (de) * | 2013-01-14 | 2014-07-17 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Herstellen eines Multilagenelektrodensystems |
| JP2014187259A (ja) * | 2013-03-25 | 2014-10-02 | Toshiba Corp | 半導体装置の製造方法 |
| US10703627B2 (en) * | 2013-06-27 | 2020-07-07 | Soitec | Methods of fabricating semiconductor structures including cavities filled with a sacrificial material |
| DE102013213065B4 (de) * | 2013-07-04 | 2016-06-02 | Robert Bosch Gmbh | Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil |
| FR3012255B1 (fr) * | 2013-10-17 | 2017-03-10 | Commissariat Energie Atomique | Procede de formation de rides par fusion d'une fondation sur laquelle repose une couche contrainte |
| CN105174203B (zh) * | 2014-05-28 | 2016-09-28 | 无锡华润上华半导体有限公司 | 基于mems的传感器的制作方法 |
| CN105451145B (zh) * | 2014-07-17 | 2018-11-16 | 中芯国际集成电路制造(上海)有限公司 | Mems麦克风及其形成方法 |
| DE102019206007A1 (de) * | 2019-04-26 | 2020-10-29 | Robert Bosch Gmbh | Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100343211B1 (ko) | 1999-11-04 | 2002-07-10 | 윤종용 | 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법 |
| FR2875947B1 (fr) | 2004-09-30 | 2007-09-07 | Tracit Technologies | Nouvelle structure pour microelectronique et microsysteme et procede de realisation |
| FR2876220B1 (fr) | 2004-10-06 | 2007-09-28 | Commissariat Energie Atomique | Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees. |
| FR2876219B1 (fr) | 2004-10-06 | 2006-11-24 | Commissariat Energie Atomique | Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees. |
| DE102005007540A1 (de) * | 2005-02-18 | 2006-08-31 | Robert Bosch Gmbh | Mikromechanischer Membransensor mit Doppelmembran |
| DE102006032195A1 (de) * | 2006-07-12 | 2008-01-24 | Robert Bosch Gmbh | Verfahren zur Herstellung von MEMS-Strukturen |
| FR2906238B1 (fr) * | 2006-09-27 | 2008-12-19 | Commissariat Energie Atomique | Procede de realisation d'un composant electromecanique sur un substrat plan |
| FR2932788A1 (fr) * | 2008-06-23 | 2009-12-25 | Commissariat Energie Atomique | Procede de fabrication d'un composant electromecanique mems / nems. |
-
2008
- 2008-06-23 FR FR0803496A patent/FR2932923B1/fr not_active Expired - Fee Related
-
2009
- 2009-06-22 EP EP09290474A patent/EP2138454B1/de active Active
- 2009-06-22 DE DE602009000885T patent/DE602009000885D1/de active Active
- 2009-06-22 JP JP2009147957A patent/JP2010045333A/ja active Pending
- 2009-06-22 AT AT09290474T patent/ATE501976T1/de not_active IP Right Cessation
- 2009-06-22 US US12/488,854 patent/US7993949B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US7993949B2 (en) | 2011-08-09 |
| EP2138454B1 (de) | 2011-03-16 |
| JP2010045333A (ja) | 2010-02-25 |
| FR2932923A1 (fr) | 2009-12-25 |
| FR2932923B1 (fr) | 2011-03-25 |
| US20090325335A1 (en) | 2009-12-31 |
| ATE501976T1 (de) | 2011-04-15 |
| EP2138454A1 (de) | 2009-12-30 |
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