DE602005027353D1 - Thermischer sensor sowie diesen verwendende messvorrichtung - Google Patents

Thermischer sensor sowie diesen verwendende messvorrichtung

Info

Publication number
DE602005027353D1
DE602005027353D1 DE602005027353T DE602005027353T DE602005027353D1 DE 602005027353 D1 DE602005027353 D1 DE 602005027353D1 DE 602005027353 T DE602005027353 T DE 602005027353T DE 602005027353 T DE602005027353 T DE 602005027353T DE 602005027353 D1 DE602005027353 D1 DE 602005027353D1
Authority
DE
Germany
Prior art keywords
thermal sensor
resin mold
sensing element
surface section
exposed surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005027353T
Other languages
German (de)
English (en)
Inventor
Akiko Kubota
Kenji Tomonari
T Kawanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Kinzoku Co Ltd
Original Assignee
Mitsui Mining and Smelting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining and Smelting Co Ltd filed Critical Mitsui Mining and Smelting Co Ltd
Publication of DE602005027353D1 publication Critical patent/DE602005027353D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/54—Nitrogen compounds
    • B01D53/56—Nitrogen oxides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/20—Reductants
    • B01D2251/206—Ammonium compounds
    • B01D2251/2067—Urea
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/404—Nitrogen oxides other than dinitrogen oxide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N2610/00—Adding substances to exhaust gases
    • F01N2610/02—Adding substances to exhaust gases the substance being ammonia or urea

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measuring Volume Flow (AREA)
DE602005027353T 2004-07-15 2005-06-28 Thermischer sensor sowie diesen verwendende messvorrichtung Expired - Lifetime DE602005027353D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004208666A JP4188287B2 (ja) 2004-07-15 2004-07-15 熱式センサ及びそれを用いた測定装置
PCT/JP2005/011791 WO2006008920A1 (ja) 2004-07-15 2005-06-28 熱式センサ及びそれを用いた測定装置

Publications (1)

Publication Number Publication Date
DE602005027353D1 true DE602005027353D1 (de) 2011-05-19

Family

ID=35785043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005027353T Expired - Lifetime DE602005027353D1 (de) 2004-07-15 2005-06-28 Thermischer sensor sowie diesen verwendende messvorrichtung

Country Status (6)

Country Link
US (1) US7934868B2 (https=)
EP (1) EP1770389B1 (https=)
JP (1) JP4188287B2 (https=)
AT (1) ATE504828T1 (https=)
DE (1) DE602005027353D1 (https=)
WO (1) WO2006008920A1 (https=)

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US20100212400A1 (en) * 2007-05-14 2010-08-26 Toshimi Nakamura Detection unit mold package and fluid discrimination sensor module using the mold package
WO2009035113A1 (ja) 2007-09-13 2009-03-19 Mitsui Mining & Smelting Co., Ltd. リードフレームおよびリードフレームの製造方法
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US8304785B2 (en) * 2008-07-29 2012-11-06 Industrial Technology Research Institute LED structure, manufacturing method thereof and LED module
US8833680B2 (en) * 2011-01-05 2014-09-16 Cnh Industrial America Llc Method and apparatus for detecting a plugged nozzle of a sprayer
US9134186B2 (en) * 2011-02-03 2015-09-15 Kla-Tencor Corporation Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
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IL213767A (en) * 2011-06-23 2017-05-29 Adler Michael A method and device for measuring fluid flow rate
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Also Published As

Publication number Publication date
US20070237206A1 (en) 2007-10-11
WO2006008920A1 (ja) 2006-01-26
EP1770389A4 (en) 2007-11-14
JP4188287B2 (ja) 2008-11-26
ATE504828T1 (de) 2011-04-15
JP2006029956A (ja) 2006-02-02
EP1770389A1 (en) 2007-04-04
EP1770389B1 (en) 2011-04-06
US7934868B2 (en) 2011-05-03

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