DE602005025132D1 - Nanodatenschreib- und Lesevorrichtung mit Cantileverstruktur und Herstellungsverfahren dafür - Google Patents
Nanodatenschreib- und Lesevorrichtung mit Cantileverstruktur und Herstellungsverfahren dafürInfo
- Publication number
- DE602005025132D1 DE602005025132D1 DE602005025132T DE602005025132T DE602005025132D1 DE 602005025132 D1 DE602005025132 D1 DE 602005025132D1 DE 602005025132 T DE602005025132 T DE 602005025132T DE 602005025132 T DE602005025132 T DE 602005025132T DE 602005025132 D1 DE602005025132 D1 DE 602005025132D1
- Authority
- DE
- Germany
- Prior art keywords
- cantilever
- probe
- deposition material
- sacrificial substrate
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1409—Heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
- G11B11/007—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure with reproducing by means directly associated with the tip of a microscopic electrical probe as defined in G11B9/14
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05023509A EP1780174B1 (de) | 2005-10-27 | 2005-10-27 | Nanodatenschreib- und Lesevorrichtung mit Cantileverstruktur und Herstellungsverfahren dafür |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005025132D1 true DE602005025132D1 (de) | 2011-01-13 |
Family
ID=36051586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005025132T Active DE602005025132D1 (de) | 2005-10-27 | 2005-10-27 | Nanodatenschreib- und Lesevorrichtung mit Cantileverstruktur und Herstellungsverfahren dafür |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1780174B1 (de) |
AT (1) | ATE490215T1 (de) |
DE (1) | DE602005025132D1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009140441A2 (en) * | 2008-05-13 | 2009-11-19 | Nanoink, Inc. | Height sensing cantilever |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5475318A (en) * | 1993-10-29 | 1995-12-12 | Robert B. Marcus | Microprobe |
US5929438A (en) * | 1994-08-12 | 1999-07-27 | Nikon Corporation | Cantilever and measuring apparatus using it |
US5883387A (en) * | 1994-11-15 | 1999-03-16 | Olympus Optical Co., Ltd. | SPM cantilever and a method for manufacturing the same |
JPH09196933A (ja) * | 1996-01-19 | 1997-07-31 | Canon Inc | プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 |
US5907095A (en) * | 1996-06-17 | 1999-05-25 | Industrial Technology Research Institute | High-sensitivity strain probe |
JPH10293134A (ja) * | 1997-02-19 | 1998-11-04 | Canon Inc | 光検出または照射用のプローブ、及び該プローブを備えた近視野光学顕微鏡・記録再生装置・露光装置、並びに該プローブの製造方法 |
US6642129B2 (en) * | 2001-07-26 | 2003-11-04 | The Board Of Trustees Of The University Of Illinois | Parallel, individually addressable probes for nanolithography |
US6835589B2 (en) * | 2002-11-14 | 2004-12-28 | International Business Machines Corporation | Three-dimensional integrated CMOS-MEMS device and process for making the same |
KR100513662B1 (ko) * | 2003-09-08 | 2005-09-09 | 엘지전자 주식회사 | 캔틸레버의 제조방법 |
-
2005
- 2005-10-27 EP EP05023509A patent/EP1780174B1/de not_active Not-in-force
- 2005-10-27 AT AT05023509T patent/ATE490215T1/de not_active IP Right Cessation
- 2005-10-27 DE DE602005025132T patent/DE602005025132D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1780174A1 (de) | 2007-05-02 |
ATE490215T1 (de) | 2010-12-15 |
EP1780174B1 (de) | 2010-12-01 |
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