DE602005011552D1 - Bolometrischer Detektor mit thermischer Isolierung durch Verengung - Google Patents

Bolometrischer Detektor mit thermischer Isolierung durch Verengung

Info

Publication number
DE602005011552D1
DE602005011552D1 DE602005011552T DE602005011552T DE602005011552D1 DE 602005011552 D1 DE602005011552 D1 DE 602005011552D1 DE 602005011552 T DE602005011552 T DE 602005011552T DE 602005011552 T DE602005011552 T DE 602005011552T DE 602005011552 D1 DE602005011552 D1 DE 602005011552D1
Authority
DE
Germany
Prior art keywords
membrane
frame
bolometric
constriction
thermal insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005011552T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Sylvette Bisotto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602005011552D1 publication Critical patent/DE602005011552D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
DE602005011552T 2004-10-28 2005-10-05 Bolometrischer Detektor mit thermischer Isolierung durch Verengung Active DE602005011552D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0411475A FR2877492B1 (fr) 2004-10-28 2004-10-28 Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique

Publications (1)

Publication Number Publication Date
DE602005011552D1 true DE602005011552D1 (de) 2009-01-22

Family

ID=34952507

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005011552T Active DE602005011552D1 (de) 2004-10-28 2005-10-05 Bolometrischer Detektor mit thermischer Isolierung durch Verengung

Country Status (6)

Country Link
US (1) US7268350B1 (de)
EP (1) EP1653205B1 (de)
JP (1) JP4897269B2 (de)
AT (1) ATE417252T1 (de)
DE (1) DE602005011552D1 (de)
FR (1) FR2877492B1 (de)

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CN101432547B (zh) 2006-04-28 2012-02-22 纳博特斯克株式会社 减速装置及其制造方法
CN101460816B (zh) * 2006-05-25 2011-07-13 松下电工株式会社 红外传感器
US7718965B1 (en) * 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
FI20065776A0 (sv) * 2006-12-05 2006-12-05 Pekka Neittaanmaeki Förfarande för kontroll av värmekonduktivitet hos dielektriska nanofibrer och motsvarande anordning
JP5016398B2 (ja) * 2007-06-08 2012-09-05 パナソニック株式会社 赤外線センサ
JP5016397B2 (ja) * 2007-06-08 2012-09-05 パナソニック株式会社 赤外線センサ
FR2923601B1 (fr) * 2007-11-12 2010-01-01 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique a connexion par nanofil et procede de realisation
FR2923602B1 (fr) * 2007-11-12 2009-11-20 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique a thermometre a nanofil et procede de realisation
JP2009250818A (ja) * 2008-04-08 2009-10-29 Mitsubishi Electric Corp 赤外線検出素子及び赤外線検出装置
FR2941297B1 (fr) * 2009-01-19 2011-02-11 Commissariat Energie Atomique Procede de fabrication d'un detecteur bolometrique
US7915585B2 (en) * 2009-03-31 2011-03-29 Bae Systems Information And Electronic Systems Integration Inc. Microbolometer pixel and fabrication method utilizing ion implantation
US8465201B2 (en) * 2009-10-30 2013-06-18 Raytheon Company Electro-magnetic radiation detector
JP5644121B2 (ja) * 2010-01-26 2014-12-24 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
WO2012051202A1 (en) 2010-10-11 2012-04-19 The University Of Kansas Multi wall carbon nanotube opto-electronic devices
JP2013217786A (ja) * 2012-04-10 2013-10-24 Seiko Epson Corp 熱型電磁波検出素子、熱型電磁波検出素子の製造方法、熱型電磁波検出装置および電子機器
US10067006B2 (en) 2014-06-19 2018-09-04 Elwha Llc Nanostructure sensors and sensing systems
DE102014213369B4 (de) * 2014-07-09 2018-11-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsdetektor und verfahren zur herstellung eines strahlungsdetektors und array von solchen strahlungsdetektoren
US10285220B2 (en) 2014-10-24 2019-05-07 Elwha Llc Nanostructure heaters and heating systems and methods of fabricating the same
US10785832B2 (en) 2014-10-31 2020-09-22 Elwha Llc Systems and methods for selective sensing and selective thermal heating using nanostructures
DE102016212423B4 (de) * 2016-07-07 2019-03-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsdetektor und Herstellung
US10989450B1 (en) * 2016-07-13 2021-04-27 Triad National Security, Llc Solid-state optical refrigerator for cryogenic cooling of payloads
US10908025B2 (en) 2016-12-07 2021-02-02 Carbon Solutions, Inc. Patterned focal plane arrays of carbon nanotube thin film bolometers with high temperature coefficient of resistance and improved detectivity for infrared imaging
FR3061549B1 (fr) * 2016-12-30 2020-10-02 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique et notamment de rayonnement infrarouge et procede pour sa realisation
CN111777030B (zh) * 2020-07-14 2022-10-21 北京理工大学 用于无人驾驶决策模拟训练的光学下转换芯片及制备方法

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US2393196A (en) * 1941-07-02 1946-01-15 Schwarz Ernst Thermoelectric device
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
GB8827661D0 (en) * 1988-11-26 1989-05-17 Emi Plc Thorn Thermal imaging devices
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5627082A (en) * 1995-03-29 1997-05-06 Texas Instruments Incorporated High thermal resistance backfill material for hybrid UFPA's
US5688699A (en) * 1996-01-16 1997-11-18 Raytheon Company Microbolometer
JPH10185681A (ja) * 1996-11-08 1998-07-14 Mitsuteru Kimura 熱型赤外線センサとその製造方法およびこれを用いた赤外線イメージセンサ
US5949071A (en) * 1997-08-14 1999-09-07 Sandia Corporation Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
JPH11337403A (ja) * 1998-05-22 1999-12-10 Nissan Motor Co Ltd 赤外線検出素子およびその製造方法
US6201243B1 (en) * 1998-07-20 2001-03-13 Institut National D'optique Microbridge structure and method for forming the microbridge structure
US6144285A (en) * 1999-09-13 2000-11-07 Honeywell International Inc. Thermal sensor and method of making same
JP3644411B2 (ja) * 2001-06-08 2005-04-27 日本電気株式会社 熱型赤外線検出器
JP2003106896A (ja) * 2001-10-01 2003-04-09 Mitsubishi Electric Corp 赤外線センサ及びその製造方法
FR2844635B1 (fr) * 2002-09-16 2005-08-19 Commissariat Energie Atomique Dispositif detecteur de rayonnement electromagnetique avec boitier integre comportant deux detecteurs superposes

Also Published As

Publication number Publication date
EP1653205A1 (de) 2006-05-03
US20070205364A1 (en) 2007-09-06
FR2877492B1 (fr) 2006-12-08
US7268350B1 (en) 2007-09-11
ATE417252T1 (de) 2008-12-15
EP1653205B1 (de) 2008-12-10
JP4897269B2 (ja) 2012-03-14
JP2006126203A (ja) 2006-05-18
FR2877492A1 (fr) 2006-05-05

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