DE602005009965D1 - Brennstoffzelle flächig integriert auf einem monokristallinen Silikonschaltkreis und Verfahren zur Herstellung - Google Patents

Brennstoffzelle flächig integriert auf einem monokristallinen Silikonschaltkreis und Verfahren zur Herstellung

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Publication number
DE602005009965D1
DE602005009965D1 DE602005009965T DE602005009965T DE602005009965D1 DE 602005009965 D1 DE602005009965 D1 DE 602005009965D1 DE 602005009965 T DE602005009965 T DE 602005009965T DE 602005009965 T DE602005009965 T DE 602005009965T DE 602005009965 D1 DE602005009965 D1 DE 602005009965D1
Authority
DE
Germany
Prior art keywords
manufacture
fuel cell
monocrystalline silicon
integrally integrated
silicon circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005009965T
Other languages
English (en)
Inventor
Simone Angelo Siciliano
Magna Luigi La
Salvatore Leonardi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Publication of DE602005009965D1 publication Critical patent/DE602005009965D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1097—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0271—Sealing or supporting means around electrodes, matrices or membranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
    • H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
    • H01M8/2425—High-temperature cells with solid electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M2008/1095—Fuel cells with polymeric electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04089—Arrangements for control of reactant parameters, e.g. pressure or concentration of gaseous reactants
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Fuel Cell (AREA)
  • Inert Electrodes (AREA)
DE602005009965T 2005-12-16 2005-12-16 Brennstoffzelle flächig integriert auf einem monokristallinen Silikonschaltkreis und Verfahren zur Herstellung Active DE602005009965D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05425892A EP1798799B1 (de) 2005-12-16 2005-12-16 Brennstoffzelle flächig integriert auf einem monokristallinen Silikonschaltkreis und Verfahren zur Herstellung

Publications (1)

Publication Number Publication Date
DE602005009965D1 true DE602005009965D1 (de) 2008-11-06

Family

ID=36087627

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005009965T Active DE602005009965D1 (de) 2005-12-16 2005-12-16 Brennstoffzelle flächig integriert auf einem monokristallinen Silikonschaltkreis und Verfahren zur Herstellung

Country Status (3)

Country Link
US (1) US7892693B2 (de)
EP (1) EP1798799B1 (de)
DE (1) DE602005009965D1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080061027A1 (en) * 2006-09-12 2008-03-13 Mangat Pawitter S Method for forming a micro fuel cell
US20100126849A1 (en) * 2008-11-24 2010-05-27 Applied Materials, Inc. Apparatus and method for forming 3d nanostructure electrode for electrochemical battery and capacitor
US8753492B2 (en) 2010-06-17 2014-06-17 Massachusetts Institute Of Technology Method for enhancing current throughput in an electrochemical system
JP5815034B2 (ja) 2010-09-22 2015-11-17 インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ 電気化学的に電力供給される集積回路パッケージ
FR2969392B1 (fr) * 2010-12-16 2013-02-08 St Microelectronics Sa Boitier, en particulier pour biopile
DE102013209226B4 (de) 2013-03-04 2020-01-02 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Einzelelektrodenplatte zur Verwendung in einer Brennstoffzelle
US9588558B2 (en) 2013-06-13 2017-03-07 Microsoft Technology Licensing, Llc On-chip integrated processing and power generation
CN113023666B (zh) * 2021-02-23 2023-12-12 太原理工大学 一种用于硅基平板微热管的灌封方法
CN114604818A (zh) * 2022-05-11 2022-06-10 山东大学 一种基于多孔硅的mems红外光源及其制备方法

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US5192627A (en) * 1990-11-13 1993-03-09 Energy Partners, Inc. Closed loop reactant/product management system for electrochemical galvanic energy device
JPH07201348A (ja) 1993-12-28 1995-08-04 Nri & Ncc Co Ltd 超小型燃料電池システム
US20030135971A1 (en) * 1997-11-12 2003-07-24 Michael Liberman Bundle draw based processing of nanofibers and method of making
DE19757320C2 (de) 1997-12-23 2001-08-02 Forschungszentrum Juelich Gmbh Elektrode mit guter Kohlenmonoxidverträglichkeit für Brennstoffzellen
DE19820756C1 (de) * 1998-05-08 1999-11-11 Siemens Ag Perforiertes Werkstück und Verfahren zu dessen Herstellung
US6638654B2 (en) 1999-02-01 2003-10-28 The Regents Of The University Of California MEMS-based thin-film fuel cells
DE19913977C2 (de) * 1999-03-18 2001-11-22 Mannesmann Ag Kraftstoffbehälter
DE19914681C2 (de) * 1999-03-31 2002-07-18 Joerg Mueller Polymer-Elektrolyt-Membran Brennstoffzellensystem in Mikrosystemtechnik
JP2002544649A (ja) * 1999-05-06 2002-12-24 サンディア コーポレーション 燃料電池及び膜
JP3668069B2 (ja) * 1999-09-21 2005-07-06 株式会社東芝 燃料電池用液体燃料収容容器および燃料電池
AU3263001A (en) * 1999-11-17 2001-05-30 Neah Power Systems, Inc. Fuel cells having silicon substrates and/or sol-gel derived support structures
US20020041991A1 (en) * 1999-11-17 2002-04-11 Chan Chung M. Sol-gel derived fuel cell electrode structures and fuel cell electrode stack assemblies
JP3582060B2 (ja) * 1999-11-18 2004-10-27 本田技研工業株式会社 燃料電池システム
US6312846B1 (en) * 1999-11-24 2001-11-06 Integrated Fuel Cell Technologies, Inc. Fuel cell and power chip technology
US7427526B2 (en) * 1999-12-20 2008-09-23 The Penn State Research Foundation Deposited thin films and their use in separation and sacrificial layer applications
US6589682B1 (en) * 2000-01-27 2003-07-08 Karen Fleckner Fuel cells incorporating nanotubes in fuel feed
US6541149B1 (en) * 2000-02-29 2003-04-01 Lucent Technologies Inc. Article comprising micro fuel cell
US20030096146A1 (en) * 2001-03-30 2003-05-22 Foster Ronald B. Planar substrate-based fuel cell Membrane Electrode Assembly and integrated circuitry
US6811916B2 (en) * 2001-05-15 2004-11-02 Neah Power Systems, Inc. Fuel cell electrode pair assemblies and related methods
EP1258937A1 (de) * 2001-05-17 2002-11-20 STMicroelectronics S.r.l. Mikro-Silizium-Brennstoffzelle, Verfahren zur Herstellung und autonome Halbleitervorrichtung mit Mikro-Brennstoffzelle
WO2003002247A1 (en) * 2001-06-29 2003-01-09 The Penn State Research Foundation Sacrificial layers in the manufacturing and application of_chemical reactors
US6828055B2 (en) * 2001-07-27 2004-12-07 Hewlett-Packard Development Company, L.P. Bipolar plates and end plates for fuel cells and methods for making the same
US6740444B2 (en) * 2001-10-29 2004-05-25 Hewlett-Packard Development Company, L.P. PEM fuel cell with alternating ribbed anodes and cathodes
US20030134172A1 (en) * 2002-01-11 2003-07-17 Grande Wendy C. Integrated fuel cell and electrochemical power system employing the same
WO2003093169A2 (en) * 2002-04-29 2003-11-13 The Trustees Of Boston College Density controlled carbon nanotube array electrodes
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EP2432058B8 (de) * 2004-12-09 2013-09-11 Nanosys, Inc. Auf nanodrähten basierende membranelektrodenbaugruppen für brennstoffzellen
US20070048589A1 (en) * 2005-08-30 2007-03-01 Koripella Chowdary R Integrated micro fuel cell apparatus

Also Published As

Publication number Publication date
US7892693B2 (en) 2011-02-22
EP1798799A1 (de) 2007-06-20
EP1798799B1 (de) 2008-09-24
US20070148527A1 (en) 2007-06-28

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