DE112007002372A5 - Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle - Google Patents

Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle Download PDF

Info

Publication number
DE112007002372A5
DE112007002372A5 DE112007002372T DE112007002372T DE112007002372A5 DE 112007002372 A5 DE112007002372 A5 DE 112007002372A5 DE 112007002372 T DE112007002372 T DE 112007002372T DE 112007002372 T DE112007002372 T DE 112007002372T DE 112007002372 A5 DE112007002372 A5 DE 112007002372A5
Authority
DE
Germany
Prior art keywords
measuring cell
producing
vacuum membrane
vacuum
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112007002372T
Other languages
English (en)
Other versions
DE112007002372B4 (de
Inventor
Carsten Strietzel
Per BJÖRKMAN
Walter Berner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112007002372A5 publication Critical patent/DE112007002372A5/de
Application granted granted Critical
Publication of DE112007002372B4 publication Critical patent/DE112007002372B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
DE112007002372.4T 2006-11-13 2007-10-05 Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle Active DE112007002372B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH1817/06 2006-11-13
CH18172006 2006-11-13
PCT/CH2007/000493 WO2008058406A1 (de) 2006-11-13 2007-10-05 Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle

Publications (2)

Publication Number Publication Date
DE112007002372A5 true DE112007002372A5 (de) 2009-09-17
DE112007002372B4 DE112007002372B4 (de) 2017-04-06

Family

ID=37769363

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112007002372.4T Active DE112007002372B4 (de) 2006-11-13 2007-10-05 Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle

Country Status (4)

Country Link
US (1) US7536915B2 (de)
JP (1) JP5289321B2 (de)
DE (1) DE112007002372B4 (de)
WO (1) WO2008058406A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112262303A (zh) * 2018-06-14 2021-01-22 恩德莱斯和豪瑟尔欧洲两合公司 压力测量装置及其生产方法

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4989659B2 (ja) * 2006-01-18 2012-08-01 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング ダイヤフラムを備える真空測定セル
CA2679648C (en) 2007-04-07 2015-02-03 Inficon Gmbh Method for the production of a diaphragm vacuum measuring cell
US7946178B2 (en) * 2007-06-19 2011-05-24 Inficon Gmbh Vacuum measuring cell device having a heater
DE102008025945A1 (de) * 2008-05-30 2009-12-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines vakuumdichten Verbundes zwischen einer Glasscheibe und einem Metallrahmen sowie Glasscheibenverbund
US7707891B2 (en) * 2008-06-27 2010-05-04 Inficon Gmbh Optical interferometric pressure sensor
US20100233353A1 (en) * 2009-03-16 2010-09-16 Applied Materials, Inc. Evaporator, coating installation, and method for use thereof
US8206311B2 (en) * 2009-04-01 2012-06-26 Aerocrine Ab Analyzer for nitric oxide in exhaled breath with multiple-use sensor
DE102009027742A1 (de) * 2009-07-15 2011-01-27 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
CH701500A1 (de) * 2009-07-24 2011-01-31 Inficon Gmbh Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.
US8201456B2 (en) * 2009-11-02 2012-06-19 Vega Grieshaber Kg Measuring cell and a method of use therefor
US8490497B2 (en) * 2010-03-25 2013-07-23 University Of Southern California Microelectromechanical (MEMS) pressure transducer
DE102010043119A1 (de) * 2010-10-29 2012-05-03 Endress + Hauser Gmbh + Co. Kg Verfahren zum Herstellen einer Verbindung zwischen zwei Keramikteilen, insbesondere von Teilen eines Drucksensors, und ein keramisches Produkt, insbesondere einen keramischen Drucksensor
JP2013011556A (ja) * 2011-06-30 2013-01-17 Md Innovations Kk 隔膜気圧計
CA2866380C (en) * 2012-03-06 2017-01-17 Rosemount, Inc. Remote seal pressure measurement system for subsea use
CH707387B1 (de) * 2012-12-24 2017-01-13 Inficon Gmbh Messzellenanordnung und Verfahren zur Vakuumdruckmessung.
US9116057B2 (en) 2013-02-27 2015-08-25 Honeywell International Inc. Integrated reference vacuum pressure sensor with atomic layer deposition coated input port
US8701496B1 (en) * 2013-02-27 2014-04-22 Honeywell International Inc. Systems and methods for a pressure sensor having a two layer die structure
US10151647B2 (en) 2013-06-19 2018-12-11 Honeywell International Inc. Integrated SOI pressure sensor having silicon stress isolation member
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
US9459170B2 (en) 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
DE102013226775A1 (de) * 2013-12-19 2015-06-25 Vega Grieshaber Kg Messzelle
DE102014010241A1 (de) * 2014-05-30 2015-12-03 Schott Ag Körper, bevorzugt mit einer Oberfläche umfassend bevorzugt einen Glaskörper mit einer Glasoberfläche und Verfahren zur Herstellung desselben
EP3175208B1 (de) * 2014-08-01 2018-05-09 VEGA Grieshaber KG Druckmessanordnung und verfahren zur herstellung dieser druckmessanordnung
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
DE102015101323A1 (de) * 2015-01-29 2016-08-04 Endress + Hauser Gmbh + Co. Kg Drucksensor ohne Trennmembran
DE102015105057A1 (de) * 2015-04-01 2016-10-06 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
EP3367886B1 (de) * 2015-10-29 2021-05-19 Sintef TTO AS Sensoranordnung
KR20180116351A (ko) * 2016-02-25 2018-10-24 인피콘 아크티엔게젤샤프트 다중 전극을 구비한 용량식 진공 측정 셀
DE102016214883B4 (de) * 2016-08-10 2022-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ventil aus einem keramischen Werkstoff und ein Verfahren zu seiner Herstellung
JP6985071B2 (ja) * 2017-09-05 2021-12-22 アズビル株式会社 異常検知方法および異常検知装置
KR101923169B1 (ko) * 2017-10-20 2019-02-27 에프디씨 주식회사 파열디스크 어셈블리
JP7085898B2 (ja) * 2018-05-25 2022-06-17 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置
CN114001858B (zh) * 2020-07-28 2024-04-05 中微半导体设备(上海)股份有限公司 电容式薄膜真空计、等离子体反应装置和膜层制备方法
CN114571125B (zh) * 2022-05-07 2022-09-02 季华实验室 一种电容式薄膜真空计的薄膜焊接方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253280A (ja) * 1984-05-29 1985-12-13 Omron Tateisi Electronics Co 半導体圧力センサ
US5889211A (en) * 1995-04-03 1999-03-30 Motorola, Inc. Media compatible microsensor structure and methods of manufacturing and using the same
US5945605A (en) * 1997-11-19 1999-08-31 Sensym, Inc. Sensor assembly with sensor boss mounted on substrate
EP1070239B1 (de) * 1997-12-23 2002-04-24 Unaxis Balzers Aktiengesellschaft Kapazitive vakuummesszelle
DE59804701D1 (de) * 1997-12-23 2002-08-08 Unaxis Balzers Ag Membrane für eine kapazitive vakuummesszelle
US6619131B2 (en) * 1998-07-16 2003-09-16 Unaxis Balzers Ag Combination pressure sensor with capacitive and thermal elements
JP2002214059A (ja) * 2001-01-18 2002-07-31 Teijin Seiki Co Ltd シリコンダイアフラムを有する静電容量型真空計
DE10227479A1 (de) * 2002-06-19 2004-01-08 Endress + Hauser Gmbh + Co. Kg Druckmeßgerät
JP2005062031A (ja) * 2003-08-14 2005-03-10 Tem-Tech Kenkyusho:Kk 静電容量型のサファイヤダイヤフラム圧力センサおよびその製造方法
JP2006043813A (ja) * 2004-08-04 2006-02-16 Denso Corp 保護膜付きマイクロシステム構造体及びその製造方法
US20060107898A1 (en) * 2004-11-19 2006-05-25 Blomberg Tom E Method and apparatus for measuring consumption of reactants
JP4506478B2 (ja) * 2005-01-18 2010-07-21 株式会社デンソー 圧力センサ
US20060156980A1 (en) * 2005-01-19 2006-07-20 Samsung Electronics Co., Ltd. Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
JP5143736B2 (ja) * 2005-08-12 2013-02-13 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 測定セルおよびその製造方法
CH697766B1 (de) * 2005-11-25 2009-02-13 Inficon Gmbh Blendenanordnung für eine Vakuummesszelle.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112262303A (zh) * 2018-06-14 2021-01-22 恩德莱斯和豪瑟尔欧洲两合公司 压力测量装置及其生产方法
US11745288B2 (en) 2018-06-14 2023-09-05 Endress+Hauser SE+Co. KG Pressure measuring device having a membrane edge and mounting element connected by a diffusion weld

Also Published As

Publication number Publication date
US7536915B2 (en) 2009-05-26
WO2008058406A1 (de) 2008-05-22
JP5289321B2 (ja) 2013-09-11
DE112007002372B4 (de) 2017-04-06
US20080110269A1 (en) 2008-05-15
JP2010509573A (ja) 2010-03-25

Similar Documents

Publication Publication Date Title
DE112007002372A5 (de) Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle
DE112008000346A5 (de) Verfahren zur Herstellung einer Vakuummembranmesszelle
DE602007012785D1 (de) Verfahren zur Herstellung einer Photomaske
DE602005008766D1 (de) Solarzelle und verfahren zur herstellung einer solarzelle
DE602007010373D1 (de) Verfahren zur Herstellung einer Wabenstruktur
DE602005022299D1 (de) Verfahren zur herstellung einer solarzelle
DE602007011917D1 (de) Verfahren zur herstellung eines iii-n-volumenkristalls und eines freistehenden iii-n-substrats und iii-n-volumenkristall und freistehendes iii-n-substrat
ATE455105T1 (de) Verfahren zur herstellung von difluormethylpyrazolylcarboxylaten
DE602007000719D1 (de) Verfahren zur Herstellung eines wabenförmigen Körpers
ATE516362T1 (de) Verfahren zur herstellung von biodiesel
DE112007000599A5 (de) Verfahren zur Kalibrierung einer Gierratenmessung
DE502007001752D1 (de) Batteriesensoreinheit und verfahren zur herstellung der batteriesensoreinheit
ATE466124T1 (de) Verfahren und vorrichtung zur herstellung eines spinnvlieses
DE602007013189D1 (de) Verfahren zur herstellung eines luftreifens
DE602007009856D1 (de) Verteilerleitung und verfahren zur herstellung einer verteilerleitung
DE602007005355D1 (de) Brennstoffzellensystem und verfahren zur schätzung der ausgabeeigenschaften einer brennstoffzelle
ATE480531T1 (de) Verfahren zur herstellung von benzopyran-2- olderivaten
DE112008000046A5 (de) Verfahren zur Herstellung eines Kabelschuhs und Kabelschuh
DE502007000723D1 (de) Verbundstruktur und Verfahren zur Herstellung einer Verbundstruktur
ATE526429T1 (de) Verfahren zur herstellung einer beschichtung
DE112007001616A5 (de) Verbundsubstrat und Verfahren zur Herstellung eines Verbundsubstrats
DE502007005615D1 (de) Verfahren zur herstellung eines piezoaktors
AT503190A3 (de) Verfahren zur herstellung einer halbleitervorrichtung
DE112006002128B8 (de) Verfahren zur Herstellung einer röhrenförmigen Brennstoffzelle
DE502006001490D1 (de) Verfahren zur Herstellung einer Schlingeneinheit

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R081 Change of applicant/patentee

Owner name: INFICON HOLDING AG, CH

Free format text: FORMER OWNER: INFICON GMBH, BAD RAGAZ, CH

R082 Change of representative

Representative=s name: BOCKHORNI & BRUENTJEN PARTNERSCHAFT PATENTANWA, DE