DE112008000346A5 - Verfahren zur Herstellung einer Vakuummembranmesszelle - Google Patents

Verfahren zur Herstellung einer Vakuummembranmesszelle Download PDF

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Publication number
DE112008000346A5
DE112008000346A5 DE112008000346T DE112008000346T DE112008000346A5 DE 112008000346 A5 DE112008000346 A5 DE 112008000346A5 DE 112008000346 T DE112008000346 T DE 112008000346T DE 112008000346 T DE112008000346 T DE 112008000346T DE 112008000346 A5 DE112008000346 A5 DE 112008000346A5
Authority
DE
Germany
Prior art keywords
producing
measuring cell
vacuum membrane
membrane measuring
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112008000346T
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English (en)
Other versions
DE112008000346B4 (de
Inventor
Dietmar Bertsch
Nico Onda
Klaus Dietrich
Martin Wüest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112008000346A5 publication Critical patent/DE112008000346A5/de
Application granted granted Critical
Publication of DE112008000346B4 publication Critical patent/DE112008000346B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C04B2235/402—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567—Treatment time
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/121—Metallic interlayers based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/72—Forming laminates or joined articles comprising at least two interlayers directly next to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE112008000346.7T 2007-04-07 2008-03-25 Verfahren zur Herstellung einer Vakuummembranmesszelle Active DE112008000346B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH5772007 2007-04-07
CH577/07 2007-04-07
PCT/CH2008/000132 WO2008122134A1 (de) 2007-04-07 2008-03-25 Verfahren zur herstellung einer vakuummembranmesszelle

Publications (2)

Publication Number Publication Date
DE112008000346A5 true DE112008000346A5 (de) 2010-05-12
DE112008000346B4 DE112008000346B4 (de) 2022-03-17

Family

ID=38426478

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112008000346.7T Active DE112008000346B4 (de) 2007-04-07 2008-03-25 Verfahren zur Herstellung einer Vakuummembranmesszelle

Country Status (5)

Country Link
US (1) US7845546B2 (de)
JP (1) JP5196681B2 (de)
CA (1) CA2679648C (de)
DE (1) DE112008000346B4 (de)
WO (1) WO2008122134A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4989659B2 (ja) * 2006-01-18 2012-08-01 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング ダイヤフラムを備える真空測定セル
DE112008001459A5 (de) * 2007-06-19 2010-05-12 Inficon Gmbh Vakuummesszellenanordnung mit Heizung
WO2009076411A2 (en) * 2007-12-10 2009-06-18 Davis, Joseph And Negley Methods for bond or seal glass pieces of photovoltaic cell modules
US20110132437A1 (en) * 2007-12-10 2011-06-09 Alan Kost Methods to bond or seal glass pieces of photovoltaic cell modules
JP5546460B2 (ja) 2007-12-20 2014-07-09 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 隔膜圧力測定セルの構造
US7673518B2 (en) * 2008-06-19 2010-03-09 Kulite Semiconductor Products, Inc. Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header
DE102009027742A1 (de) * 2009-07-15 2011-01-27 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
US8141429B2 (en) * 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same
DE102012106236A1 (de) * 2012-07-11 2014-01-16 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
DE102012110152A1 (de) * 2012-07-11 2014-05-15 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
CH707387B1 (de) * 2012-12-24 2017-01-13 Inficon Gmbh Messzellenanordnung und Verfahren zur Vakuumdruckmessung.
JP2015184100A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体
KR102087075B1 (ko) * 2016-05-10 2020-03-11 쌩-고벵 글래스 프랑스 납땜 인두용 납땜 선단부
CN115219103B (zh) * 2022-09-20 2022-11-18 季华实验室 一种电容薄膜真空计传感器及其制作方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE758884A (fr) * 1969-12-15 1971-04-16 Vaw Ver Aluminium Werke Ag Procede de brasage de l'aluminium et de ses alliages
US3736222A (en) * 1971-04-28 1973-05-29 Gen Electric Ceramic articles and method of sealing ceramics
SE393967B (sv) 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket
DE3639021A1 (de) * 1986-11-14 1988-05-26 Philips Patentverwaltung Verfahren zum verloeten von keramischen bauteilen
US5157972A (en) 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
JPH07112625B2 (ja) * 1991-04-04 1995-12-06 日本電装株式会社 アルミニウムの真空ろう付方法および真空ろう付炉と、真空ろう付用アルミニウムブレージングシート
DE4136987A1 (de) 1991-11-11 1993-05-13 Leybold Ag Verfahren zur oberflaechenpassivierung von sensoren
JP3230840B2 (ja) * 1992-06-10 2001-11-19 株式会社日立製作所 腐食環境センサー及び腐食環境制御装置
JPH0797256A (ja) * 1993-09-24 1995-04-11 Ngk Spark Plug Co Ltd 酸化アルミニウム基焼結体及びその製造方法
US5333776A (en) * 1993-09-30 1994-08-02 Air Products And Chemicals, Inc. Atmospheres for brazing aluminum and aluminum alloys
US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
EP0834487B1 (de) 1996-10-04 2001-09-19 Endress + Hauser GmbH + Co. Verfahren zum Verbinden von Aluminiumoxid-Keramik-Körpern
JP4334139B2 (ja) * 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
WO1999034184A1 (de) 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
US6306315B1 (en) * 1998-02-27 2001-10-23 Denso Corporation Thermistor device thermistor device manufacturing method and temperature sensor
US6306516B1 (en) * 1999-12-17 2001-10-23 Agere Systems Guardian Corp. Article comprising oxide-bondable solder
DE10031135A1 (de) * 2000-06-30 2002-01-17 Grieshaber Vega Kg Druckmeßvorrichtung
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
JP4091241B2 (ja) * 2000-09-29 2008-05-28 株式会社山武 圧力センサおよび圧力センサの製造方法
WO2002083596A1 (fr) * 2001-04-13 2002-10-24 Sumitomo Electric Industries, Ltd. Article ceramique assemble, structure de maintien de substrat et appareil permettant de traiter les substrats
EP1430988B1 (de) * 2001-09-28 2013-11-20 Furukawa-Sky Aluminum Corporation Verfahren zum hartlöten von aluminium oder einem aluminiumlegierungsmaterial und aluminiumlegierungshartlötfolie
JP4537019B2 (ja) * 2003-06-04 2010-09-01 古河スカイ株式会社 アルミニウム材のろう付け方法
JP2005156410A (ja) * 2003-11-27 2005-06-16 Kyocera Corp 圧力検出装置用パッケージ
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
WO2007019714A1 (de) 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
US8284538B2 (en) * 2006-08-10 2012-10-09 Tokyo Electron Limited Electrostatic chuck device
WO2008058406A1 (de) 2006-11-13 2008-05-22 Inficon Gmbh Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle

Also Published As

Publication number Publication date
CA2679648A1 (en) 2008-10-16
JP5196681B2 (ja) 2013-05-15
WO2008122134A1 (de) 2008-10-16
DE112008000346B4 (de) 2022-03-17
US20100146771A1 (en) 2010-06-17
CA2679648C (en) 2015-02-03
JP2010523946A (ja) 2010-07-15
US7845546B2 (en) 2010-12-07

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