DE602005007799D1 - HF Generator mit phasenkontrollierten MOSFETs - Google Patents
HF Generator mit phasenkontrollierten MOSFETsInfo
- Publication number
- DE602005007799D1 DE602005007799D1 DE602005007799T DE602005007799T DE602005007799D1 DE 602005007799 D1 DE602005007799 D1 DE 602005007799D1 DE 602005007799 T DE602005007799 T DE 602005007799T DE 602005007799 T DE602005007799 T DE 602005007799T DE 602005007799 D1 DE602005007799 D1 DE 602005007799D1
- Authority
- DE
- Germany
- Prior art keywords
- load
- generator
- phase controlled
- power source
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20927—Liquid coolant without phase change
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Thermal Sciences (AREA)
- Rectifiers (AREA)
- Amplifiers (AREA)
- Inverter Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Control Of Eletrric Generators (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57543504P | 2004-05-28 | 2004-05-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005007799D1 true DE602005007799D1 (de) | 2008-08-14 |
Family
ID=34937055
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005003872T Active DE602005003872T2 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit Spannungsregulator |
DE602005015161T Active DE602005015161D1 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit Schaltspule |
DE602005023686T Active DE602005023686D1 (de) | 2004-05-28 | 2005-05-30 | Kühlkörper für Leistungskomponenten |
DE602005007799T Active DE602005007799D1 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit phasenkontrollierten MOSFETs |
DE602005003870T Active DE602005003870T2 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit reduzierter Grösse und Gewicht |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005003872T Active DE602005003872T2 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit Spannungsregulator |
DE602005015161T Active DE602005015161D1 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit Schaltspule |
DE602005023686T Active DE602005023686D1 (de) | 2004-05-28 | 2005-05-30 | Kühlkörper für Leistungskomponenten |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005003870T Active DE602005003870T2 (de) | 2004-05-28 | 2005-05-30 | HF Generator mit reduzierter Grösse und Gewicht |
Country Status (4)
Country | Link |
---|---|
US (5) | US7512422B2 (de) |
EP (5) | EP1601097B1 (de) |
AT (5) | ATE381809T1 (de) |
DE (5) | DE602005003872T2 (de) |
Families Citing this family (61)
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DK200301577A (da) * | 2003-10-27 | 2005-04-28 | Danfoss Silicon Power Gmbh | Flowfordelingsenhed og köleenhed |
US7279871B2 (en) * | 2004-01-12 | 2007-10-09 | Lionel Llc | Voltage regulator and method of regulating voltage |
US7512422B2 (en) * | 2004-05-28 | 2009-03-31 | Ixys Corporation | RF generator with commutation inductor |
EP1783904B1 (de) * | 2005-10-17 | 2008-04-16 | HÜTTINGER Elektronik GmbH + Co. KG | HF-Plasmaversorgungseinrichtung |
EP1968188B1 (de) * | 2007-03-09 | 2012-08-08 | HÜTTINGER Elektronik GmbH + Co. KG | Klasse-D Verstärkeranordnung |
EP2097920B1 (de) * | 2007-07-23 | 2017-08-09 | TRUMPF Hüttinger GmbH + Co. KG | Plasmaversorgungseinrichtung |
EP2023475B1 (de) * | 2007-08-04 | 2016-10-12 | SMA Solar Technology AG | Wechselrichter für eine geerdete Gleichspannungsquelle, insbesondere einen Photovoltaikgenerator |
US7872523B2 (en) * | 2008-07-01 | 2011-01-18 | Mks Instruments, Inc. | Radio frequency (RF) envelope pulsing using phase switching of switch-mode power amplifiers |
US8060040B2 (en) * | 2008-08-18 | 2011-11-15 | Telefonaktiebolaget Lm Ericsson (Publ) | True root-mean-square detection with a sub-threshold transistor bridge circuit |
US8432070B2 (en) * | 2008-08-25 | 2013-04-30 | Qualcomm Incorporated | Passive receivers for wireless power transmission |
US8947041B2 (en) | 2008-09-02 | 2015-02-03 | Qualcomm Incorporated | Bidirectional wireless power transmission |
US8532724B2 (en) | 2008-09-17 | 2013-09-10 | Qualcomm Incorporated | Transmitters for wireless power transmission |
DE102009054987A1 (de) | 2009-12-18 | 2011-06-22 | HÜTTINGER Elektronik GmbH + Co. KG, 79111 | Verfahren zur Erzeugung von Wechselstromleistung |
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FR2974962B1 (fr) * | 2011-05-02 | 2013-10-18 | Ask Sa | Procede et dispositif de modulation en amplitude d'un signal electromagnetique emis par un systeme d'emission/reception sans contact |
US9083291B2 (en) | 2011-08-12 | 2015-07-14 | Bae Systems Information And Electronic Systems Integration Inc. | Low voltage high efficiency gallium arsenide power amplifier |
TWI482244B (zh) * | 2012-11-19 | 2015-04-21 | Ind Tech Res Inst | 熱交換器以及半導體模組 |
US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
CN106105033B (zh) | 2013-11-14 | 2019-04-12 | 鹰港科技有限公司 | 高压纳秒脉冲发生器 |
US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
CN106664025B (zh) * | 2014-07-21 | 2019-04-05 | 华为技术有限公司 | 双向dc-dc转换器 |
US11017983B2 (en) | 2015-02-18 | 2021-05-25 | Reno Technologies, Inc. | RF power amplifier |
US9577516B1 (en) * | 2016-02-18 | 2017-02-21 | Advanced Energy Industries, Inc. | Apparatus for controlled overshoot in a RF generator |
US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
US9912296B1 (en) * | 2016-08-22 | 2018-03-06 | Qorvo Us, Inc. | High loop-gain pHEMT regulator for linear RF power amplifier |
US10027240B1 (en) * | 2017-01-06 | 2018-07-17 | General Electric Company | Ground fault isolation for power converters with silicon carbide MOSFETs |
WO2018148182A1 (en) | 2017-02-07 | 2018-08-16 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
EP3646463A1 (de) | 2017-06-30 | 2020-05-06 | Airity Technologies, Inc. | Resonanzverstärker mit hoher verstärkung für resistive ausgangsimpedanz |
EP3665775A4 (de) | 2017-08-25 | 2020-07-22 | Eagle Harbor Technologies, Inc. | Erzeugung einer beliebigen wellenform unter verwendung von nanosekundenimpulsen |
WO2020112108A1 (en) | 2017-11-29 | 2020-06-04 | COMET Technologies USA, Inc. | Retuning for impedance matching network control |
US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
US11222767B2 (en) | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
EP3605582A1 (de) | 2018-08-02 | 2020-02-05 | TRUMPF Huettinger Sp. Z o. o. | Stromrichter und stromversorgungssystem |
EP3605842A1 (de) | 2018-08-02 | 2020-02-05 | TRUMPF Huettinger Sp. Z o. o. | Balun und verstärker mit dem balun |
KR102499709B1 (ko) | 2018-08-10 | 2023-02-16 | 이글 하버 테크놀로지스, 인코포레이티드 | RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어 |
JP7320608B2 (ja) | 2019-01-08 | 2023-08-03 | イーグル ハーバー テクノロジーズ,インク. | ナノ秒パルサー回路での効率的なエネルギー回収 |
US11527385B2 (en) | 2021-04-29 | 2022-12-13 | COMET Technologies USA, Inc. | Systems and methods for calibrating capacitors of matching networks |
US11114279B2 (en) | 2019-06-28 | 2021-09-07 | COMET Technologies USA, Inc. | Arc suppression device for plasma processing equipment |
US11107661B2 (en) | 2019-07-09 | 2021-08-31 | COMET Technologies USA, Inc. | Hybrid matching network topology |
US11596309B2 (en) | 2019-07-09 | 2023-03-07 | COMET Technologies USA, Inc. | Hybrid matching network topology |
WO2021041984A1 (en) | 2019-08-28 | 2021-03-04 | COMET Technologies USA, Inc. | High power low frequency coils |
TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
KR20230150396A (ko) | 2019-12-24 | 2023-10-30 | 이글 하버 테크놀로지스, 인코포레이티드 | 플라즈마 시스템을 위한 나노초 펄서 rf 절연 |
US12027351B2 (en) | 2020-01-10 | 2024-07-02 | COMET Technologies USA, Inc. | Plasma non-uniformity detection |
US11521832B2 (en) | 2020-01-10 | 2022-12-06 | COMET Technologies USA, Inc. | Uniformity control for radio frequency plasma processing systems |
US11830708B2 (en) | 2020-01-10 | 2023-11-28 | COMET Technologies USA, Inc. | Inductive broad-band sensors for electromagnetic waves |
US11887820B2 (en) | 2020-01-10 | 2024-01-30 | COMET Technologies USA, Inc. | Sector shunts for plasma-based wafer processing systems |
US11670488B2 (en) | 2020-01-10 | 2023-06-06 | COMET Technologies USA, Inc. | Fast arc detecting match network |
US11961711B2 (en) | 2020-01-20 | 2024-04-16 | COMET Technologies USA, Inc. | Radio frequency match network and generator |
US11605527B2 (en) | 2020-01-20 | 2023-03-14 | COMET Technologies USA, Inc. | Pulsing control match network |
CN111900943B (zh) * | 2020-07-14 | 2023-05-05 | 电子科技大学 | 一种射频宽带高效率整流器 |
US11348761B2 (en) * | 2020-09-04 | 2022-05-31 | Tokyo Electron Limited | Impedance matching apparatus and control method |
US11373844B2 (en) | 2020-09-28 | 2022-06-28 | COMET Technologies USA, Inc. | Systems and methods for repetitive tuning of matching networks |
US11923175B2 (en) | 2021-07-28 | 2024-03-05 | COMET Technologies USA, Inc. | Systems and methods for variable gain tuning of matching networks |
US11657980B1 (en) | 2022-05-09 | 2023-05-23 | COMET Technologies USA, Inc. | Dielectric fluid variable capacitor |
US12020902B2 (en) | 2022-07-14 | 2024-06-25 | Tokyo Electron Limited | Plasma processing with broadband RF waveforms |
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-
2005
- 2005-05-26 US US11/140,609 patent/US7512422B2/en active Active
- 2005-05-26 US US11/140,585 patent/US7243706B2/en active Active
- 2005-05-26 US US11/140,493 patent/US7307475B2/en active Active
- 2005-05-27 US US11/140,404 patent/US7259623B2/en active Active
- 2005-05-27 US US11/139,273 patent/US7259622B2/en active Active
- 2005-05-30 AT AT05011631T patent/ATE381809T1/de not_active IP Right Cessation
- 2005-05-30 DE DE602005003872T patent/DE602005003872T2/de active Active
- 2005-05-30 DE DE602005015161T patent/DE602005015161D1/de active Active
- 2005-05-30 DE DE602005023686T patent/DE602005023686D1/de active Active
- 2005-05-30 AT AT05011633T patent/ATE482470T1/de not_active IP Right Cessation
- 2005-05-30 EP EP05011631A patent/EP1601097B1/de not_active Not-in-force
- 2005-05-30 EP EP05011633A patent/EP1601015B9/de not_active Not-in-force
- 2005-05-30 AT AT05011635T patent/ATE381810T1/de not_active IP Right Cessation
- 2005-05-30 AT AT05011634T patent/ATE400081T1/de not_active IP Right Cessation
- 2005-05-30 DE DE602005007799T patent/DE602005007799D1/de active Active
- 2005-05-30 DE DE602005003870T patent/DE602005003870T2/de active Active
- 2005-05-30 EP EP05011632A patent/EP1601098B1/de not_active Not-in-force
- 2005-05-30 EP EP05011634A patent/EP1601099B1/de not_active Not-in-force
- 2005-05-30 AT AT05011632T patent/ATE435520T1/de not_active IP Right Cessation
- 2005-05-30 EP EP05011635A patent/EP1603231B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
US7307475B2 (en) | 2007-12-11 |
DE602005023686D1 (de) | 2010-11-04 |
DE602005003872T2 (de) | 2008-12-11 |
DE602005003870T2 (de) | 2008-12-11 |
EP1601098A1 (de) | 2005-11-30 |
EP1603231B1 (de) | 2007-12-19 |
EP1601099B1 (de) | 2008-07-02 |
DE602005015161D1 (de) | 2009-08-13 |
EP1601015A1 (de) | 2005-11-30 |
US20050284609A1 (en) | 2005-12-29 |
EP1601098B1 (de) | 2009-07-01 |
US7259623B2 (en) | 2007-08-21 |
ATE381810T1 (de) | 2008-01-15 |
DE602005003870D1 (de) | 2008-01-31 |
ATE482470T1 (de) | 2010-10-15 |
ATE435520T1 (de) | 2009-07-15 |
EP1601099A1 (de) | 2005-11-30 |
US20050275456A1 (en) | 2005-12-15 |
ATE400081T1 (de) | 2008-07-15 |
ATE381809T1 (de) | 2008-01-15 |
EP1601097B1 (de) | 2007-12-19 |
US7243706B2 (en) | 2007-07-17 |
DE602005003872D1 (de) | 2008-01-31 |
EP1601015B9 (de) | 2011-01-19 |
US7512422B2 (en) | 2009-03-31 |
US20050270097A1 (en) | 2005-12-08 |
EP1601015B1 (de) | 2010-09-22 |
EP1601097A1 (de) | 2005-11-30 |
US20050275980A1 (en) | 2005-12-15 |
US7259622B2 (en) | 2007-08-21 |
US20050270096A1 (en) | 2005-12-08 |
EP1603231A1 (de) | 2005-12-07 |
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