ATE435520T1 - Hf generator mit schaltspule - Google Patents
Hf generator mit schaltspuleInfo
- Publication number
- ATE435520T1 ATE435520T1 AT05011632T AT05011632T ATE435520T1 AT E435520 T1 ATE435520 T1 AT E435520T1 AT 05011632 T AT05011632 T AT 05011632T AT 05011632 T AT05011632 T AT 05011632T AT E435520 T1 ATE435520 T1 AT E435520T1
- Authority
- AT
- Austria
- Prior art keywords
- load
- generator
- power source
- positive
- capacitor provided
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20927—Liquid coolant without phase change
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Rectifiers (AREA)
- Amplifiers (AREA)
- Inverter Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Control Of Eletrric Generators (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57543504P | 2004-05-28 | 2004-05-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE435520T1 true ATE435520T1 (de) | 2009-07-15 |
Family
ID=34937055
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05011634T ATE400081T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit phasenkontrollierten mosfets |
AT05011631T ATE381809T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit reduzierter grösse und gewicht |
AT05011633T ATE482470T1 (de) | 2004-05-28 | 2005-05-30 | Kühlkörper für leistungskomponenten |
AT05011632T ATE435520T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit schaltspule |
AT05011635T ATE381810T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit spannungsregulator |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05011634T ATE400081T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit phasenkontrollierten mosfets |
AT05011631T ATE381809T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit reduzierter grösse und gewicht |
AT05011633T ATE482470T1 (de) | 2004-05-28 | 2005-05-30 | Kühlkörper für leistungskomponenten |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05011635T ATE381810T1 (de) | 2004-05-28 | 2005-05-30 | Hf generator mit spannungsregulator |
Country Status (4)
Country | Link |
---|---|
US (5) | US7243706B2 (de) |
EP (5) | EP1601099B1 (de) |
AT (5) | ATE400081T1 (de) |
DE (5) | DE602005007799D1 (de) |
Families Citing this family (58)
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US7243706B2 (en) * | 2004-05-28 | 2007-07-17 | Ixys Corporation | Heatsink for power devices |
EP1783904B1 (de) * | 2005-10-17 | 2008-04-16 | HÜTTINGER Elektronik GmbH + Co. KG | HF-Plasmaversorgungseinrichtung |
EP1968188B1 (de) | 2007-03-09 | 2012-08-08 | HÜTTINGER Elektronik GmbH + Co. KG | Klasse-D Verstärkeranordnung |
DE112007003667A5 (de) | 2007-07-23 | 2010-07-01 | Hüttinger Elektronik GmbH & Co. KG | Plasmaversorgungseinrichtung |
EP2023475B1 (de) * | 2007-08-04 | 2016-10-12 | SMA Solar Technology AG | Wechselrichter für eine geerdete Gleichspannungsquelle, insbesondere einen Photovoltaikgenerator |
US7872523B2 (en) * | 2008-07-01 | 2011-01-18 | Mks Instruments, Inc. | Radio frequency (RF) envelope pulsing using phase switching of switch-mode power amplifiers |
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US8532724B2 (en) | 2008-09-17 | 2013-09-10 | Qualcomm Incorporated | Transmitters for wireless power transmission |
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FR2974962B1 (fr) * | 2011-05-02 | 2013-10-18 | Ask Sa | Procede et dispositif de modulation en amplitude d'un signal electromagnetique emis par un systeme d'emission/reception sans contact |
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US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
US9960763B2 (en) | 2013-11-14 | 2018-05-01 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser |
US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
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US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
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EP4266579A3 (de) | 2017-02-07 | 2023-12-27 | Eagle Harbor Technologies, Inc. | Transformator-resonanzwandler |
WO2019006428A1 (en) | 2017-06-30 | 2019-01-03 | Airity Technologies, Inc. | HIGH GAIN RESONANT AMPLIFIER PROVIDING RESISTIVE OUTPUT IMPEDANCE |
KR102208429B1 (ko) | 2017-08-25 | 2021-01-29 | 이글 하버 테크놀로지스, 인코포레이티드 | 나노초 펄스를 이용한 임의의 파형 발생 |
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US11222767B2 (en) | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
EP3605582A1 (de) | 2018-08-02 | 2020-02-05 | TRUMPF Huettinger Sp. Z o. o. | Stromrichter und stromversorgungssystem |
EP3605842A1 (de) | 2018-08-02 | 2020-02-05 | TRUMPF Huettinger Sp. Z o. o. | Balun und verstärker mit dem balun |
KR20230025034A (ko) | 2018-08-10 | 2023-02-21 | 이글 하버 테크놀로지스, 인코포레이티드 | RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어 |
JP7320608B2 (ja) | 2019-01-08 | 2023-08-03 | イーグル ハーバー テクノロジーズ,インク. | ナノ秒パルサー回路での効率的なエネルギー回収 |
US11527385B2 (en) | 2021-04-29 | 2022-12-13 | COMET Technologies USA, Inc. | Systems and methods for calibrating capacitors of matching networks |
US11114279B2 (en) | 2019-06-28 | 2021-09-07 | COMET Technologies USA, Inc. | Arc suppression device for plasma processing equipment |
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TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
JP7285377B2 (ja) | 2019-12-24 | 2023-06-01 | イーグル ハーバー テクノロジーズ,インク. | プラズマシステム用ナノ秒パルサrf絶縁 |
US11887820B2 (en) | 2020-01-10 | 2024-01-30 | COMET Technologies USA, Inc. | Sector shunts for plasma-based wafer processing systems |
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US11605527B2 (en) | 2020-01-20 | 2023-03-14 | COMET Technologies USA, Inc. | Pulsing control match network |
US11961711B2 (en) | 2020-01-20 | 2024-04-16 | COMET Technologies USA, Inc. | Radio frequency match network and generator |
CN111900943B (zh) * | 2020-07-14 | 2023-05-05 | 电子科技大学 | 一种射频宽带高效率整流器 |
US11348761B2 (en) * | 2020-09-04 | 2022-05-31 | Tokyo Electron Limited | Impedance matching apparatus and control method |
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-
2005
- 2005-05-26 US US11/140,585 patent/US7243706B2/en active Active
- 2005-05-26 US US11/140,493 patent/US7307475B2/en active Active
- 2005-05-26 US US11/140,609 patent/US7512422B2/en active Active
- 2005-05-27 US US11/140,404 patent/US7259623B2/en active Active
- 2005-05-27 US US11/139,273 patent/US7259622B2/en active Active
- 2005-05-30 AT AT05011634T patent/ATE400081T1/de not_active IP Right Cessation
- 2005-05-30 EP EP05011634A patent/EP1601099B1/de not_active Not-in-force
- 2005-05-30 EP EP05011631A patent/EP1601097B1/de not_active Not-in-force
- 2005-05-30 AT AT05011631T patent/ATE381809T1/de not_active IP Right Cessation
- 2005-05-30 AT AT05011633T patent/ATE482470T1/de not_active IP Right Cessation
- 2005-05-30 DE DE602005007799T patent/DE602005007799D1/de active Active
- 2005-05-30 DE DE602005015161T patent/DE602005015161D1/de active Active
- 2005-05-30 AT AT05011632T patent/ATE435520T1/de not_active IP Right Cessation
- 2005-05-30 EP EP05011632A patent/EP1601098B1/de not_active Not-in-force
- 2005-05-30 AT AT05011635T patent/ATE381810T1/de not_active IP Right Cessation
- 2005-05-30 DE DE602005003870T patent/DE602005003870T2/de active Active
- 2005-05-30 EP EP05011633A patent/EP1601015B9/de not_active Not-in-force
- 2005-05-30 DE DE602005003872T patent/DE602005003872T2/de active Active
- 2005-05-30 EP EP05011635A patent/EP1603231B1/de not_active Not-in-force
- 2005-05-30 DE DE602005023686T patent/DE602005023686D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1601098B1 (de) | 2009-07-01 |
DE602005023686D1 (de) | 2010-11-04 |
DE602005003872T2 (de) | 2008-12-11 |
EP1601015B1 (de) | 2010-09-22 |
EP1601099A1 (de) | 2005-11-30 |
DE602005003870D1 (de) | 2008-01-31 |
EP1603231A1 (de) | 2005-12-07 |
DE602005007799D1 (de) | 2008-08-14 |
US20050275980A1 (en) | 2005-12-15 |
US7259623B2 (en) | 2007-08-21 |
EP1601098A1 (de) | 2005-11-30 |
US7512422B2 (en) | 2009-03-31 |
DE602005003870T2 (de) | 2008-12-11 |
EP1601015B9 (de) | 2011-01-19 |
ATE381809T1 (de) | 2008-01-15 |
EP1601099B1 (de) | 2008-07-02 |
US7259622B2 (en) | 2007-08-21 |
EP1601097B1 (de) | 2007-12-19 |
EP1603231B1 (de) | 2007-12-19 |
US20050270096A1 (en) | 2005-12-08 |
US7243706B2 (en) | 2007-07-17 |
ATE400081T1 (de) | 2008-07-15 |
US20050284609A1 (en) | 2005-12-29 |
EP1601097A1 (de) | 2005-11-30 |
US20050275456A1 (en) | 2005-12-15 |
ATE381810T1 (de) | 2008-01-15 |
US20050270097A1 (en) | 2005-12-08 |
ATE482470T1 (de) | 2010-10-15 |
US7307475B2 (en) | 2007-12-11 |
DE602005003872D1 (de) | 2008-01-31 |
EP1601015A1 (de) | 2005-11-30 |
DE602005015161D1 (de) | 2009-08-13 |
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