DE602005006688D1 - Artikel-Lager und zugehöriges System - Google Patents
Artikel-Lager und zugehöriges SystemInfo
- Publication number
- DE602005006688D1 DE602005006688D1 DE602005006688T DE602005006688T DE602005006688D1 DE 602005006688 D1 DE602005006688 D1 DE 602005006688D1 DE 602005006688 T DE602005006688 T DE 602005006688T DE 602005006688 T DE602005006688 T DE 602005006688T DE 602005006688 D1 DE602005006688 D1 DE 602005006688D1
- Authority
- DE
- Germany
- Prior art keywords
- associated system
- article warehouse
- warehouse
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/045—Storage devices mechanical in a circular arrangement, e.g. towers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004280920A JP2006096427A (ja) | 2004-09-28 | 2004-09-28 | 物品保管設備 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005006688D1 true DE602005006688D1 (de) | 2008-06-26 |
Family
ID=35521010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005006688T Active DE602005006688D1 (de) | 2004-09-28 | 2005-09-22 | Artikel-Lager und zugehöriges System |
Country Status (5)
Country | Link |
---|---|
US (1) | US7413396B2 (de) |
EP (1) | EP1640293B1 (de) |
JP (1) | JP2006096427A (de) |
DE (1) | DE602005006688D1 (de) |
TW (1) | TW200615216A (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007056443A2 (en) * | 2005-11-07 | 2007-05-18 | Brooks Automation, Inc. | Reduced capacity carrier, transport, load port, buffer system |
US20070128010A1 (en) * | 2005-12-06 | 2007-06-07 | International Business Machines Corporation | An apparatus for pod transportation within a semiconductor fabrication facility |
US20070160448A1 (en) * | 2006-01-06 | 2007-07-12 | International Business Machines Corporation | Receipt and delivery control system for front opening unified and reticle storage pods |
US20070289843A1 (en) * | 2006-04-18 | 2007-12-20 | Barry Kitazumi | Conveyor System Including Offset Section |
KR20140069354A (ko) | 2006-08-18 | 2014-06-09 | 브룩스 오토메이션 인코퍼레이티드 | 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템 |
US20080050208A1 (en) * | 2006-08-25 | 2008-02-28 | Barry Kitazumi | High speed transporter including horizontal belt |
JP4193186B2 (ja) * | 2006-11-02 | 2008-12-10 | 村田機械株式会社 | 天井走行車 |
US8337133B2 (en) | 2007-06-25 | 2012-12-25 | International Business Machines Corporation | Segregating wafer carrier types in semiconductor storage devices |
DE102007035839B4 (de) * | 2007-07-31 | 2017-06-22 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen |
JP4796024B2 (ja) * | 2007-08-30 | 2011-10-19 | 東京エレクトロン株式会社 | 容器交換システム及び容器交換方法 |
US7992734B2 (en) * | 2008-01-11 | 2011-08-09 | International Business Machines Corporation | Semiconductor automation buffer storage identification system and method |
DE102008059711A1 (de) * | 2008-11-29 | 2010-06-10 | Eisenmann Anlagenbau Gmbh & Co. Kg | Vorrichtung zum Umsetzen von Gegenständen sowie Förderanlagen mit einer solchen Vorrichtung |
JP4807424B2 (ja) * | 2009-03-17 | 2011-11-02 | 村田機械株式会社 | 天井搬送システムと物品の移載方法 |
JP5445015B2 (ja) * | 2009-10-14 | 2014-03-19 | シンフォニアテクノロジー株式会社 | キャリア移載促進装置 |
JP5429570B2 (ja) * | 2010-03-08 | 2014-02-26 | 株式会社ダイフク | 物品搬送設備 |
JP5229363B2 (ja) * | 2010-11-04 | 2013-07-03 | 村田機械株式会社 | 搬送システム及び搬送方法 |
KR101533366B1 (ko) | 2010-11-04 | 2015-07-02 | 무라다기카이가부시끼가이샤 | 반송 시스템 및 반송 방법 |
KR101661633B1 (ko) * | 2012-04-05 | 2016-09-30 | 무라다기카이가부시끼가이샤 | 반송 시스템 |
CN104803142B (zh) * | 2015-03-05 | 2017-04-26 | 北京融安特智能科技有限公司 | 一种可移动的档案智能管理平台 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3986612A (en) * | 1974-11-07 | 1976-10-19 | Cutler-Hammer, Inc. | Random access card storage and retrieval system |
JPS57156906A (en) | 1981-03-20 | 1982-09-28 | Nec Corp | Automated warehouse |
JPH06104554B2 (ja) | 1986-06-13 | 1994-12-21 | 村田機械株式会社 | 天井自走車 |
US4812985A (en) * | 1986-09-15 | 1989-03-14 | Ja-Pac, Inc | Article storage and retrieval system |
US4867629A (en) * | 1986-11-20 | 1989-09-19 | Shimizu Construction Co., Ltd. | Dusttight storage cabinet apparatus for use in clean rooms |
JPH03177206A (ja) | 1989-12-02 | 1991-08-01 | Sumitomo Rubber Ind Ltd | 物品の取り出し・格納方法と装置 |
DE4028059A1 (de) | 1990-09-05 | 1992-03-12 | Grau Gmbh & Co Holdingges | Automatische speicheranlage |
US5607275A (en) * | 1993-08-26 | 1997-03-04 | Exabyte Corporation | Cartridge library and method of operation |
JP3050079B2 (ja) | 1995-03-08 | 2000-06-05 | 株式会社ダイフク | 棚設備 |
JPH09215729A (ja) * | 1996-02-07 | 1997-08-19 | Yuyama Seisakusho:Kk | アンプル補給方法 |
JP3436334B2 (ja) | 1996-08-06 | 2003-08-11 | 株式会社ダイフク | 物品搬送設備 |
TW348162B (en) * | 1996-09-30 | 1998-12-21 | Murada Kikai Kk | Work carrying system |
DE19900804C2 (de) * | 1999-01-12 | 2000-10-19 | Siemens Ag | Fördersystem |
US6450318B1 (en) * | 2000-06-16 | 2002-09-17 | Tec Engineering Corporation | Overhead monorail system |
JP3991852B2 (ja) * | 2002-12-09 | 2007-10-17 | 村田機械株式会社 | 天井搬送車システム |
JP2004250148A (ja) | 2003-02-19 | 2004-09-09 | Okamura Corp | 棚に載置した荷の検出装置 |
KR100541183B1 (ko) * | 2003-03-04 | 2006-01-11 | 삼성전자주식회사 | 스토커 및 이를 포함하는 반송 시스템 |
-
2004
- 2004-09-28 JP JP2004280920A patent/JP2006096427A/ja active Pending
-
2005
- 2005-08-04 TW TW094126590A patent/TW200615216A/zh not_active IP Right Cessation
- 2005-09-22 EP EP05020690A patent/EP1640293B1/de not_active Expired - Fee Related
- 2005-09-22 DE DE602005006688T patent/DE602005006688D1/de active Active
- 2005-09-22 US US11/231,765 patent/US7413396B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW200615216A (en) | 2006-05-16 |
US20060067809A1 (en) | 2006-03-30 |
EP1640293A1 (de) | 2006-03-29 |
TWI333927B (de) | 2010-12-01 |
US7413396B2 (en) | 2008-08-19 |
EP1640293B1 (de) | 2008-05-14 |
JP2006096427A (ja) | 2006-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |