DE602005006688D1 - Artikel-Lager und zugehöriges System - Google Patents

Artikel-Lager und zugehöriges System

Info

Publication number
DE602005006688D1
DE602005006688D1 DE602005006688T DE602005006688T DE602005006688D1 DE 602005006688 D1 DE602005006688 D1 DE 602005006688D1 DE 602005006688 T DE602005006688 T DE 602005006688T DE 602005006688 T DE602005006688 T DE 602005006688T DE 602005006688 D1 DE602005006688 D1 DE 602005006688D1
Authority
DE
Germany
Prior art keywords
associated system
article warehouse
warehouse
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005006688T
Other languages
English (en)
Inventor
Yasuhisa Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of DE602005006688D1 publication Critical patent/DE602005006688D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/045Storage devices mechanical in a circular arrangement, e.g. towers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/14Wafer cassette transporting
DE602005006688T 2004-09-28 2005-09-22 Artikel-Lager und zugehöriges System Active DE602005006688D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004280920A JP2006096427A (ja) 2004-09-28 2004-09-28 物品保管設備

Publications (1)

Publication Number Publication Date
DE602005006688D1 true DE602005006688D1 (de) 2008-06-26

Family

ID=35521010

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005006688T Active DE602005006688D1 (de) 2004-09-28 2005-09-22 Artikel-Lager und zugehöriges System

Country Status (5)

Country Link
US (1) US7413396B2 (de)
EP (1) EP1640293B1 (de)
JP (1) JP2006096427A (de)
DE (1) DE602005006688D1 (de)
TW (1) TW200615216A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
US20070128010A1 (en) * 2005-12-06 2007-06-07 International Business Machines Corporation An apparatus for pod transportation within a semiconductor fabrication facility
US20070160448A1 (en) * 2006-01-06 2007-07-12 International Business Machines Corporation Receipt and delivery control system for front opening unified and reticle storage pods
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
KR20140069354A (ko) 2006-08-18 2014-06-09 브룩스 오토메이션 인코퍼레이티드 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
JP4193186B2 (ja) * 2006-11-02 2008-12-10 村田機械株式会社 天井走行車
US8337133B2 (en) 2007-06-25 2012-12-25 International Business Machines Corporation Segregating wafer carrier types in semiconductor storage devices
DE102007035839B4 (de) * 2007-07-31 2017-06-22 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen
JP4796024B2 (ja) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 容器交換システム及び容器交換方法
US7992734B2 (en) * 2008-01-11 2011-08-09 International Business Machines Corporation Semiconductor automation buffer storage identification system and method
DE102008059711A1 (de) * 2008-11-29 2010-06-10 Eisenmann Anlagenbau Gmbh & Co. Kg Vorrichtung zum Umsetzen von Gegenständen sowie Förderanlagen mit einer solchen Vorrichtung
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5445015B2 (ja) * 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5429570B2 (ja) * 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5229363B2 (ja) * 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
KR101533366B1 (ko) 2010-11-04 2015-07-02 무라다기카이가부시끼가이샤 반송 시스템 및 반송 방법
KR101661633B1 (ko) * 2012-04-05 2016-09-30 무라다기카이가부시끼가이샤 반송 시스템
CN104803142B (zh) * 2015-03-05 2017-04-26 北京融安特智能科技有限公司 一种可移动的档案智能管理平台

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Publication number Priority date Publication date Assignee Title
US3986612A (en) * 1974-11-07 1976-10-19 Cutler-Hammer, Inc. Random access card storage and retrieval system
JPS57156906A (en) 1981-03-20 1982-09-28 Nec Corp Automated warehouse
JPH06104554B2 (ja) 1986-06-13 1994-12-21 村田機械株式会社 天井自走車
US4812985A (en) * 1986-09-15 1989-03-14 Ja-Pac, Inc Article storage and retrieval system
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
JPH03177206A (ja) 1989-12-02 1991-08-01 Sumitomo Rubber Ind Ltd 物品の取り出し・格納方法と装置
DE4028059A1 (de) 1990-09-05 1992-03-12 Grau Gmbh & Co Holdingges Automatische speicheranlage
US5607275A (en) * 1993-08-26 1997-03-04 Exabyte Corporation Cartridge library and method of operation
JP3050079B2 (ja) 1995-03-08 2000-06-05 株式会社ダイフク 棚設備
JPH09215729A (ja) * 1996-02-07 1997-08-19 Yuyama Seisakusho:Kk アンプル補給方法
JP3436334B2 (ja) 1996-08-06 2003-08-11 株式会社ダイフク 物品搬送設備
TW348162B (en) * 1996-09-30 1998-12-21 Murada Kikai Kk Work carrying system
DE19900804C2 (de) * 1999-01-12 2000-10-19 Siemens Ag Fördersystem
US6450318B1 (en) * 2000-06-16 2002-09-17 Tec Engineering Corporation Overhead monorail system
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
JP2004250148A (ja) 2003-02-19 2004-09-09 Okamura Corp 棚に載置した荷の検出装置
KR100541183B1 (ko) * 2003-03-04 2006-01-11 삼성전자주식회사 스토커 및 이를 포함하는 반송 시스템

Also Published As

Publication number Publication date
TW200615216A (en) 2006-05-16
US20060067809A1 (en) 2006-03-30
EP1640293A1 (de) 2006-03-29
TWI333927B (de) 2010-12-01
US7413396B2 (en) 2008-08-19
EP1640293B1 (de) 2008-05-14
JP2006096427A (ja) 2006-04-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition