DE602005005647D1 - Piezoelektrischer Resonator mit kleinen Abmessungen - Google Patents

Piezoelektrischer Resonator mit kleinen Abmessungen

Info

Publication number
DE602005005647D1
DE602005005647D1 DE602005005647T DE602005005647T DE602005005647D1 DE 602005005647 D1 DE602005005647 D1 DE 602005005647D1 DE 602005005647 T DE602005005647 T DE 602005005647T DE 602005005647 T DE602005005647 T DE 602005005647T DE 602005005647 D1 DE602005005647 D1 DE 602005005647D1
Authority
DE
Germany
Prior art keywords
piezoelectric resonator
electrodes
small dimensions
vibrating arms
central arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005005647T
Other languages
English (en)
Other versions
DE602005005647T2 (de
Inventor
Piazza Silvio Dalla
Bruno Studer
Thomas Luethi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Publication of DE602005005647D1 publication Critical patent/DE602005005647D1/de
Application granted granted Critical
Publication of DE602005005647T2 publication Critical patent/DE602005005647T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE602005005647T 2005-06-09 2005-06-09 Piezoelektrischer Resonator mit kleinen Abmessungen Active DE602005005647T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05105087A EP1732220B1 (de) 2005-06-09 2005-06-09 Piezoelektrischer Resonator mit kleinen Abmessungen

Publications (2)

Publication Number Publication Date
DE602005005647D1 true DE602005005647D1 (de) 2008-05-08
DE602005005647T2 DE602005005647T2 (de) 2009-04-16

Family

ID=35478229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005005647T Active DE602005005647T2 (de) 2005-06-09 2005-06-09 Piezoelektrischer Resonator mit kleinen Abmessungen

Country Status (7)

Country Link
EP (1) EP1732220B1 (de)
JP (1) JP4904091B2 (de)
CN (1) CN1881790B (de)
AT (1) ATE390759T1 (de)
DE (1) DE602005005647T2 (de)
HK (1) HK1098886A1 (de)
TW (1) TWI383585B (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE390758T1 (de) * 2005-06-09 2008-04-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator und anordnung mit dem in ein gehäuse eingeschlossenen resonator
EP1732217B1 (de) * 2005-06-09 2009-01-21 ETA SA Manufacture Horlogère Suisse Kompakter piezoelektrischer Resonator
JP4578499B2 (ja) * 2007-03-30 2010-11-10 京セラキンセキ株式会社 音叉型屈曲水晶振動素子、及びそれを搭載した水晶振動子並びに水晶発振器
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
JP2009206759A (ja) * 2008-02-27 2009-09-10 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP4885206B2 (ja) 2008-12-22 2012-02-29 日本電波工業株式会社 音叉型圧電振動片および圧電デバイス
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
CN102088276B (zh) * 2009-12-02 2014-01-22 威华微机电股份有限公司 音叉型石英晶体谐振器
JP5476964B2 (ja) * 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5520618B2 (ja) * 2010-01-21 2014-06-11 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動素子
FI124103B (fi) * 2010-02-22 2014-03-14 Murata Electronics Oy Parannettu mikromekaaninen resonaattori
US8692632B2 (en) * 2010-03-17 2014-04-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
CN102176665B (zh) * 2011-01-07 2015-03-18 瑞声声学科技(深圳)有限公司 压电振动器
EP2613440B1 (de) * 2012-01-09 2019-07-10 Micro Crystal AG Kleiner piezolektrischer Stimmgabelresonator
JP6119134B2 (ja) 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP2014057236A (ja) * 2012-09-13 2014-03-27 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP2014135654A (ja) 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6013228B2 (ja) 2013-02-25 2016-10-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器及び電波時計
JP6148881B2 (ja) 2013-03-11 2017-06-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6148502B2 (ja) 2013-03-11 2017-06-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP6168949B2 (ja) * 2013-09-25 2017-07-26 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片および圧電振動子
JP6216213B2 (ja) * 2013-10-29 2017-10-18 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
JP2015170965A (ja) 2014-03-06 2015-09-28 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6419491B2 (ja) * 2014-09-03 2018-11-07 京セラ株式会社 水晶振動素子
EP3468036A1 (de) * 2017-10-03 2019-04-10 Micro Crystal AG Piezoelektrischer resonator kleiner grösse
JP2019165348A (ja) * 2018-03-20 2019-09-26 日本電波工業株式会社 音叉型水晶振動子

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115388A (ja) * 1974-07-29 1976-02-06 Citizen Watch Co Ltd Suishoshindoshi
JPS58170110A (ja) * 1982-03-30 1983-10-06 Citizen Watch Co Ltd 水晶振動子
JPS6196812A (ja) * 1984-10-17 1986-05-15 Murata Mfg Co Ltd 電子部品
JPH02268220A (ja) * 1989-04-10 1990-11-01 Tokimec Inc ジャイロ装置
JPH03151707A (ja) * 1989-11-08 1991-06-27 Seiko Electronic Components Ltd 表面実装型水晶振動子
JP4050343B2 (ja) * 1996-04-02 2008-02-20 富士通株式会社 音叉型振動ジャイロ
JP2000049561A (ja) * 1998-07-24 2000-02-18 Toyo Commun Equip Co Ltd 圧電振動子の構造及びその製造方法
JP4852195B2 (ja) * 1999-01-20 2012-01-11 セイコーエプソン株式会社 音叉型水晶振動子
JP3858575B2 (ja) * 2000-09-01 2006-12-13 セイコーエプソン株式会社 振動片、振動子、発振器及び携帯電話装置
JP2002141770A (ja) * 2000-11-01 2002-05-17 Citizen Watch Co Ltd 小型振動子
US6628048B2 (en) * 2000-11-29 2003-09-30 Samsung Electro-Mechanics Co., Ltd. Crystal oscillator with improved shock resistance
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP2004289650A (ja) * 2003-03-24 2004-10-14 Seiko Epson Corp 圧電デバイスおよび圧電振動片の製造方法
JP4219737B2 (ja) * 2003-05-30 2009-02-04 リバーエレテック株式会社 圧電振動子
JP3951058B2 (ja) * 2003-08-19 2007-08-01 セイコーエプソン株式会社 音叉型圧電振動片
EP1732217B1 (de) * 2005-06-09 2009-01-21 ETA SA Manufacture Horlogère Suisse Kompakter piezoelektrischer Resonator
ATE390758T1 (de) * 2005-06-09 2008-04-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator und anordnung mit dem in ein gehäuse eingeschlossenen resonator

Also Published As

Publication number Publication date
TWI383585B (zh) 2013-01-21
HK1098886A1 (en) 2007-07-27
CN1881790A (zh) 2006-12-20
DE602005005647T2 (de) 2009-04-16
EP1732220A1 (de) 2006-12-13
CN1881790B (zh) 2010-06-09
ATE390759T1 (de) 2008-04-15
JP2006345517A (ja) 2006-12-21
EP1732220B1 (de) 2008-03-26
TW200711298A (en) 2007-03-16
JP4904091B2 (ja) 2012-03-28

Similar Documents

Publication Publication Date Title
ATE390759T1 (de) Piezoelektrischer resonator mit kleinen abmessungen
ATE421799T1 (de) Kompakter piezoelektrischer resonator
DE602007004102D1 (de) Piezoelektrischer Resonator mit optimierten Bewegungsfähigkeiten
TW200628835A (en) Micro oscillating element
TW200644049A (en) Film bulk acoustic resonator and filter circuit
FR2823032B1 (fr) Resonateur electromecanique a poutre vibrante
HK1100501A1 (en) Piezoelectric resonator and assembly comprising the same enclosed in a case
FR2876180B1 (fr) Resonateur a masses oscillantes.
WO2007046869A3 (en) In-plane mechanically coupled microelectromechanical tuning fork resonators
ATE513362T1 (de) Resonator
ATE347057T1 (de) Federelement
WO2007023409A3 (en) Acoustic light-emitting device
EP1832500A3 (de) Schwingungsdämpfer mit begrenzter freier Beweglichkeit
EA200702176A1 (ru) Кнопочный переключатель
ATE408079T1 (de) Kältegerät
HK1093097A1 (en) Angular speed measuring transducer
BRPI0507502A (pt) espelho bimorfo com duas camadas piezoelétricas separadas por um núcleo central de material semi-rìgido
ATE417405T1 (de) Piezoelektrischer resonator mit kleinen abmessungen
JP2012054946A5 (de)
DK2007302T3 (da) Fladeelektrode
FR2953012B1 (fr) Gyrometre a structure vibrante a au moins un diapason
DE602005010327D1 (de) Herstellprozess für den Spiroglykol 3,9-Bis(1,1-dimethyl-2-hydroxyethyl)-2,4,8,10-tetraoxaspiroÄ5.5Üundecan
JP2010193331A5 (de)
ATE442702T1 (de) Piezoelektrischer resonator mit kurzschlussverhinderungsmitteln
FR2921916B1 (fr) Composant electromecanique vibrant a l'echelle nanometrique ou micrometrique a niveau de detection augmente

Legal Events

Date Code Title Description
8364 No opposition during term of opposition