ATE513362T1 - Resonator - Google Patents

Resonator

Info

Publication number
ATE513362T1
ATE513362T1 AT08852915T AT08852915T ATE513362T1 AT E513362 T1 ATE513362 T1 AT E513362T1 AT 08852915 T AT08852915 T AT 08852915T AT 08852915 T AT08852915 T AT 08852915T AT E513362 T1 ATE513362 T1 AT E513362T1
Authority
AT
Austria
Prior art keywords
mass
resonator
connectors
connector
fixed mounting
Prior art date
Application number
AT08852915T
Other languages
English (en)
Inventor
Le Kim Phan
Beek Jozef Van
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE513362T1 publication Critical patent/ATE513362T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
AT08852915T 2007-11-19 2008-11-12 Resonator ATE513362T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07121035 2007-11-19
PCT/IB2008/054733 WO2009066203A1 (en) 2007-11-19 2008-11-12 Resonator

Publications (1)

Publication Number Publication Date
ATE513362T1 true ATE513362T1 (de) 2011-07-15

Family

ID=40291208

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08852915T ATE513362T1 (de) 2007-11-19 2008-11-12 Resonator

Country Status (5)

Country Link
US (1) US8269578B2 (de)
EP (1) EP2212995B1 (de)
CN (1) CN101861700B (de)
AT (1) ATE513362T1 (de)
WO (1) WO2009066203A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009141750A1 (en) * 2008-05-19 2009-11-26 Nxp B.V. Improved mems resonator
US8624137B2 (en) * 2008-09-23 2014-01-07 Nxp, B.V. Device with a micro electromechanical structure
CN102177654B (zh) * 2008-10-08 2015-11-25 Nxp股份有限公司 振荡器器件
GB2466269A (en) * 2008-12-19 2010-06-23 Ge Infrastructure Sensing Inc System and method for remote reading of resonant sensors
EP2282404A1 (de) * 2009-08-03 2011-02-09 Nxp B.V. Frequenzauswahl- und Verstärkungsvorrichtung
EP2395660B1 (de) * 2010-06-10 2013-08-14 Nxp B.V. MEMS-Resonatoren
EP2416495B1 (de) * 2010-08-05 2014-05-07 Nxp B.V. MEMS-Oszillator
FR2964651B1 (fr) * 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif a poutre suspendue et moyens de detection piezoresistive du deplacement de celle-ci, et procede de fabrication du dispositif
FR2964652B1 (fr) 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif resonant, a detection piezoresistive et a resonateur relie de facon elastique au support du dispositif, et procede de fabrication de celui-ci
CN102122935B (zh) * 2011-03-11 2013-12-25 中国科学院上海微系统与信息技术研究所 一种具有亚微米间隙微机械谐振器及制作方法
EP2506430B1 (de) * 2011-03-28 2017-11-22 Nxp B.V. Resonator und Steuerungsverfahren dafür
EP2515436A1 (de) * 2011-04-18 2012-10-24 Nxp B.V. MEMS Resonator und Steuerungsverfahren dafür
TWI519066B (zh) * 2012-06-28 2016-01-21 清華大學 微機電共振器及其訊號處理方法以及製造方法
US9209778B2 (en) * 2013-03-15 2015-12-08 Infineon Technologies Dresden Gmbh Microelectromechanical resonators
CN104218916B (zh) * 2014-08-29 2017-05-31 电子科技大学 具有lc串联谐振电路的mems谐振器
CN104333344B (zh) * 2014-10-09 2018-07-27 深迪半导体(上海)有限公司 微机械谐振器的振动控制方法及微机械谐振器
US12009746B2 (en) 2019-06-13 2024-06-11 Massachusetts Institute Of Technology DC-DC converter based on piezoelectric resonator
KR102446105B1 (ko) * 2020-05-27 2022-09-23 한국교통대학교 산학협력단 양방향 정전기력을 이용한 액추에이터
WO2023059697A1 (en) * 2021-10-05 2023-04-13 Massachusetts Institute Of Technology Composite multi-material electromechanical energy storage component for power conversion
CN115603698B (zh) * 2022-11-28 2023-05-05 电子科技大学 一种基于弹性软化效应的可调谐薄膜体声波谐振器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US6940370B2 (en) * 2002-05-06 2005-09-06 The Regents Of The University Of California MEMS resonator and method of making same
US7005946B2 (en) 2002-08-06 2006-02-28 The Charles Stark Draper Laboratory, Inc. MEMS piezoelectric longitudinal mode resonator
US6930569B2 (en) * 2003-07-31 2005-08-16 Discera Micromechanical resonator having short support beams
US20050073078A1 (en) * 2003-10-03 2005-04-07 Markus Lutz Frequency compensated oscillator design for process tolerances
JP3797355B2 (ja) * 2003-10-22 2006-07-19 セイコーエプソン株式会社 圧電振動子の製造方法
KR100629488B1 (ko) * 2005-02-28 2006-09-28 삼성전자주식회사 공진기
US7436271B2 (en) * 2005-11-04 2008-10-14 Cornell Research Foundation, Inc. Dielectrically transduced single-ended to differential MEMS filter

Also Published As

Publication number Publication date
US8269578B2 (en) 2012-09-18
EP2212995A1 (de) 2010-08-04
WO2009066203A1 (en) 2009-05-28
CN101861700A (zh) 2010-10-13
US20100277262A1 (en) 2010-11-04
EP2212995B1 (de) 2011-06-15
CN101861700B (zh) 2013-01-02

Similar Documents

Publication Publication Date Title
ATE513362T1 (de) Resonator
EP1998444A3 (de) Volumenschallwellenvorrichtung mit gekoppelten Resonatoren
TW200644049A (en) Film bulk acoustic resonator and filter circuit
AU2003263841A8 (en) Piezo electric on seminconductor on- insulator resonator
GB2427014B (en) Haptic devices having multiple operational modes including at least one resonant mode
TW200605705A (en) Acoustic device & method of making acoustic device
ATE468258T1 (de) Kompressoranordnung
TW200626273A (en) Resonator, ultrasonic bonding head, and ultrasonic bonding apparatus
WO2007009135A3 (de) Antrieb für ein bewegbares möbelteil
EP1946413A4 (de) Endgepumpter hochleistungslaser mit niedriglast-pumpung
WO2006041516A3 (en) Cord management device
ATE295626T1 (de) Piezomotor mit führung
WO2006133111A3 (en) Reciprocating syringe assemblies
WO2006112971A3 (en) Mode-matching system for tunable external cavity laser
ATE389514T1 (de) Elektrohandwerkzeuggerät
BR0202830B1 (pt) arranjo ressonante para compressor linear.
EP1534955A4 (de) Piezo-elektrischer kompressor mit verdrängungsverstärker
TW200715021A (en) Device of protection cover of a camera
EP2144101A3 (de) Optisches Halbleiterbauelement und Herstellungsverfahren dafür
ATE346403T1 (de) Steckverbinder
DE60311540D1 (de) Breitbandige gekoppelte Hohlraumresonatorenanordnung mit invertierten Schlitzmoden
NO20052318D0 (no) Akselkoplingsenhet.
EP1748520A3 (de) Verbinder und tragbares Endgerät
TW200605701A (en) Loudspeaker
BR0300317B1 (pt) compressor alternativo.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties