JP2010193331A5 - - Google Patents

Download PDF

Info

Publication number
JP2010193331A5
JP2010193331A5 JP2009037387A JP2009037387A JP2010193331A5 JP 2010193331 A5 JP2010193331 A5 JP 2010193331A5 JP 2009037387 A JP2009037387 A JP 2009037387A JP 2009037387 A JP2009037387 A JP 2009037387A JP 2010193331 A5 JP2010193331 A5 JP 2010193331A5
Authority
JP
Japan
Prior art keywords
vibrating
vibrating arms
resonator element
arms
connecting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009037387A
Other languages
English (en)
Japanese (ja)
Other versions
JP5381149B2 (ja
JP2010193331A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009037387A priority Critical patent/JP5381149B2/ja
Priority claimed from JP2009037387A external-priority patent/JP5381149B2/ja
Publication of JP2010193331A publication Critical patent/JP2010193331A/ja
Publication of JP2010193331A5 publication Critical patent/JP2010193331A5/ja
Application granted granted Critical
Publication of JP5381149B2 publication Critical patent/JP5381149B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009037387A 2009-02-20 2009-02-20 振動片および振動子 Expired - Fee Related JP5381149B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009037387A JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009037387A JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

Publications (3)

Publication Number Publication Date
JP2010193331A JP2010193331A (ja) 2010-09-02
JP2010193331A5 true JP2010193331A5 (de) 2012-03-15
JP5381149B2 JP5381149B2 (ja) 2014-01-08

Family

ID=42818863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009037387A Expired - Fee Related JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

Country Status (1)

Country Link
JP (1) JP5381149B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5685962B2 (ja) * 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
CN102629861A (zh) 2011-02-02 2012-08-08 精工爱普生株式会社 振动片、振子、振荡器以及电子设备
JP2014165573A (ja) 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123788A (de) * 1973-03-30 1974-11-27
JPS5472695A (en) * 1977-11-21 1979-06-11 Citizen Watch Co Ltd Thin plate piezoelectric oscillator
JPS5853215A (ja) * 1981-09-25 1983-03-29 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JP2001196891A (ja) * 2000-01-07 2001-07-19 Citizen Watch Co Ltd 振動子
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP5059387B2 (ja) * 2006-11-29 2012-10-24 日本電波工業株式会社 音叉型圧電振動片、圧電デバイスおよび音叉型圧電振動片の製造方法
JP2008224627A (ja) * 2007-03-15 2008-09-25 Sony Corp 角速度センサ、角速度センサの製造方法及び電子機器
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器

Similar Documents

Publication Publication Date Title
KR101685962B1 (ko) 진동 발생장치
JP2011160250A5 (de)
TW200711298A (en) Small-sized piezoelectric resonator
JP2010187197A5 (de)
JP2011091719A (ja) 撓み振動型アクチュエータ
CN103828395B (zh) 超声波传感器
JP2010171965A5 (ja) 振動片、振動子、センサー及び電子部品
EP1950529A8 (de) Winkelgeschwindigkeitsmesser
JP2010028536A5 (de)
JP2010193331A5 (de)
JP2011129971A (ja) 撓み振動型アクチュエータ
JP6247556B2 (ja) 圧電振動ユニットおよび圧電スピーカ
JP2011199661A5 (de)
JP2006246449A5 (de)
JP2011191091A5 (ja) 振動片、振動子およびセンサー装置
JP2015087263A5 (de)
JP2015128269A5 (de)
JP7003997B2 (ja) 振動装置
JP2013017207A5 (de)
JP2010103805A5 (de)
JP5953304B2 (ja) 圧電型振動素子
JP2012160996A5 (de)
JP2014165573A5 (de)
JP2010193331A (ja) 振動片および振動子
JP2015139034A5 (de)