DE602004030398D1 - Flüssigkeitstrahlvorrichtung und Herstellungsverfahren dafür - Google Patents

Flüssigkeitstrahlvorrichtung und Herstellungsverfahren dafür

Info

Publication number
DE602004030398D1
DE602004030398D1 DE602004030398T DE602004030398T DE602004030398D1 DE 602004030398 D1 DE602004030398 D1 DE 602004030398D1 DE 602004030398 T DE602004030398 T DE 602004030398T DE 602004030398 T DE602004030398 T DE 602004030398T DE 602004030398 D1 DE602004030398 D1 DE 602004030398D1
Authority
DE
Germany
Prior art keywords
manufacturing
method therefor
fluid jet
jet device
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004030398T
Other languages
English (en)
Inventor
Hiroto Sugahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of DE602004030398D1 publication Critical patent/DE602004030398D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14266—Sheet-like thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/08—Embodiments of or processes related to ink-jet heads dealing with thermal variations, e.g. cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Reciprocating Pumps (AREA)
DE602004030398T 2003-09-29 2004-09-28 Flüssigkeitstrahlvorrichtung und Herstellungsverfahren dafür Active DE602004030398D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003338124 2003-09-29
JP2004222111A JP3952048B2 (ja) 2003-09-29 2004-07-29 液体移送装置及び液体移送装置の製造方法

Publications (1)

Publication Number Publication Date
DE602004030398D1 true DE602004030398D1 (de) 2011-01-20

Family

ID=34197274

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004030398T Active DE602004030398D1 (de) 2003-09-29 2004-09-28 Flüssigkeitstrahlvorrichtung und Herstellungsverfahren dafür

Country Status (5)

Country Link
US (2) US7461926B2 (de)
EP (1) EP1518685B1 (de)
JP (1) JP3952048B2 (de)
CN (1) CN1325261C (de)
DE (1) DE602004030398D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003311973A (ja) * 2002-04-19 2003-11-06 Sony Corp 液体吐出装置、プリンタ及び液体吐出装置の製造方法
US7479729B2 (en) 2004-05-19 2009-01-20 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, ink-jet head provided with the same, ink-jet printer, and method for manufacturing piezoelectric actuator
JP4661363B2 (ja) * 2005-05-26 2011-03-30 ブラザー工業株式会社 液滴噴射装置及び液体移送装置
JP4902971B2 (ja) * 2005-06-27 2012-03-21 富士フイルム株式会社 液体吐出ヘッド
US7703896B2 (en) * 2005-07-27 2010-04-27 Brother Kogyo Kabushiki Kaisha Liquid-droplet jetting apparatus and liquid transporting apparatus
JP5157185B2 (ja) 2007-02-07 2013-03-06 ブラザー工業株式会社 液体移送装置及び液滴噴射装置。
JP4924336B2 (ja) * 2007-09-28 2012-04-25 ブラザー工業株式会社 液体移送装置及び圧電アクチュエータ
JP5262806B2 (ja) * 2008-02-29 2013-08-14 ブラザー工業株式会社 液体移送装置及び液体移送装置の製造方法
US8360557B2 (en) * 2008-12-05 2013-01-29 Xerox Corporation Method for laser drilling fluid ports in multiple layers
JP5621447B2 (ja) * 2010-09-16 2014-11-12 ブラザー工業株式会社 アクチュエータの配線構造
JP6027427B2 (ja) * 2012-12-19 2016-11-16 理想科学工業株式会社 インクジェット記録装置
KR20150112029A (ko) * 2013-02-28 2015-10-06 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 성형된 프린트 바
US10029467B2 (en) 2013-02-28 2018-07-24 Hewlett-Packard Development Company, L.P. Molded printhead
SG11201506770XA (en) 2013-02-28 2015-09-29 Hewlett Packard Development Co Molding a fluid flow structure
US10821729B2 (en) 2013-02-28 2020-11-03 Hewlett-Packard Development Company, L.P. Transfer molded fluid flow structure
CN105189122B (zh) 2013-03-20 2017-05-10 惠普发展公司，有限责任合伙企业 具有暴露的前表面和后表面的模制芯片条
JP6492756B2 (ja) 2015-02-25 2019-04-03 ブラザー工業株式会社 液体吐出装置
US9662880B2 (en) * 2015-09-11 2017-05-30 Xerox Corporation Integrated thin film piezoelectric printhead
JP7057071B2 (ja) * 2017-06-29 2022-04-19 キヤノン株式会社 液体吐出モジュール
JP7409863B2 (ja) * 2019-12-19 2024-01-09 エスアイアイ・プリンテック株式会社 液体噴射ヘッドおよび液体噴射記録装置
JP2022023359A (ja) * 2020-07-27 2022-02-08 セイコーエプソン株式会社 液体吐出装置、及びヘッドユニット

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998120A (en) * 1988-04-06 1991-03-05 Seiko Epson Corporation Hot melt ink jet printing apparatus
JPH05169655A (ja) 1991-12-26 1993-07-09 Seiko Epson Corp インクジェット記録ヘッド及びその製造方法
JP3301485B2 (ja) 1992-03-18 2002-07-15 セイコーエプソン株式会社 インクジェット式印字ヘッド及びその製造方法
US6439702B1 (en) * 1993-08-25 2002-08-27 Aprion Digital Ltd. Inkjet print head
DE4443254C1 (de) * 1994-11-25 1995-12-21 Francotyp Postalia Gmbh Anordnung für einen Tintendruckkopf aus einzelnen Tintendruckmodulen
JP3176245B2 (ja) * 1995-03-23 2001-06-11 シャープ株式会社 インクジェットヘッド
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
EP0931650B1 (de) * 1997-06-17 2010-04-21 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JP3422364B2 (ja) 1998-08-21 2003-06-30 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
WO2001010646A1 (fr) 1999-08-04 2001-02-15 Seiko Epson Corporation Tete d'enregistrement a jet d'encre, procede de fabrication associe et enregistreur a jet d'encre
US6229704B1 (en) * 1999-10-19 2001-05-08 Dell Usa, L.P. Thermal connection system for modular computer system components
EP1101615B1 (de) * 1999-11-15 2003-09-10 Seiko Epson Corporation Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsvorrichtung
JP4288399B2 (ja) * 2000-03-31 2009-07-01 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
WO2001074591A1 (fr) * 2000-03-31 2001-10-11 Fujitsu Limited Tete a jet d'encre a buses multiples
JP3820922B2 (ja) * 2001-06-14 2006-09-13 ブラザー工業株式会社 圧電アクチュエータ及びそれを用いたインクジェットヘッド

Also Published As

Publication number Publication date
US7461926B2 (en) 2008-12-09
EP1518685A1 (de) 2005-03-30
CN1603112A (zh) 2005-04-06
EP1518685B1 (de) 2010-12-08
US20050068376A1 (en) 2005-03-31
JP3952048B2 (ja) 2007-08-01
JP2005125743A (ja) 2005-05-19
CN1325261C (zh) 2007-07-11
US7992971B2 (en) 2011-08-09
US20090051739A1 (en) 2009-02-26

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