DE602004024217D1 - Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion - Google Patents

Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion

Info

Publication number
DE602004024217D1
DE602004024217D1 DE602004024217T DE602004024217T DE602004024217D1 DE 602004024217 D1 DE602004024217 D1 DE 602004024217D1 DE 602004024217 T DE602004024217 T DE 602004024217T DE 602004024217 T DE602004024217 T DE 602004024217T DE 602004024217 D1 DE602004024217 D1 DE 602004024217D1
Authority
DE
Germany
Prior art keywords
construction
rotor
turbomole
pump
rotor shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004024217T
Other languages
German (de)
English (en)
Inventor
Yasushi Maejima
Yutaka Inayoshi
Shinji Kawanishi
Kou Sakurai
Hiroyuki Suda
Takeshi Akimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34372710&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE602004024217(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of DE602004024217D1 publication Critical patent/DE602004024217D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE602004024217T 2003-09-16 2004-08-27 Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion Active DE602004024217D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003323378A JP2006194083A (ja) 2003-09-16 2003-09-16 ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
PCT/JP2004/012409 WO2005028874A1 (ja) 2003-09-16 2004-08-27 ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ

Publications (1)

Publication Number Publication Date
DE602004024217D1 true DE602004024217D1 (de) 2009-12-31

Family

ID=34372710

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004024217T Active DE602004024217D1 (de) 2003-09-16 2004-08-27 Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion

Country Status (6)

Country Link
US (1) US7390164B2 (ja)
EP (1) EP1666730B1 (ja)
JP (1) JP2006194083A (ja)
KR (1) KR101128174B1 (ja)
DE (1) DE602004024217D1 (ja)
WO (1) WO2005028874A1 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US7485997B1 (en) * 2005-08-16 2009-02-03 Avtron Industrial Automation, Inc. System and method for securing a rotor to a motor drive shaft using cam fasteners
JP5255752B2 (ja) * 2006-03-03 2013-08-07 エドワーズ株式会社 ターボ分子ポンプ
JP5764283B2 (ja) * 2007-12-27 2015-08-19 エドワーズ株式会社 真空ポンプ
WO2010095218A1 (ja) * 2009-02-18 2010-08-26 株式会社 島津製作所 ターボ分子ポンプ
US10001126B2 (en) * 2009-08-21 2018-06-19 Edwards Japan Limited Vacuum pump
KR101848528B1 (ko) * 2010-10-19 2018-04-12 에드워즈 가부시키가이샤 진공 펌프
DE102012108394A1 (de) * 2012-09-10 2014-03-13 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3034880B1 (de) * 2014-12-15 2019-10-16 Pfeiffer Vacuum Gmbh Rotoranordnung für eine vakuumpumpe und verfahren zur herstellung derselben
KR102499085B1 (ko) * 2016-05-04 2023-02-10 삼성전자주식회사 진공 펌프
JP6834845B2 (ja) 2017-08-15 2021-02-24 株式会社島津製作所 ターボ分子ポンプ
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7306878B2 (ja) * 2019-05-31 2023-07-11 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
GB2601320B (en) * 2020-11-25 2023-04-26 Edwards S R O Rotor assembly for a turbomolecular pump
JP2022110190A (ja) * 2021-01-18 2022-07-29 エドワーズ株式会社 真空ポンプとその回転体
JP2022127116A (ja) * 2021-02-19 2022-08-31 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ用回転体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2202383A1 (de) * 1972-01-19 1973-07-26 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
JPS6121029A (ja) 1984-07-10 1986-01-29 井関農機株式会社 脱穀装置
JPH0759954B2 (ja) * 1985-03-14 1995-06-28 株式会社島津製作所 タ−ボ分子ポンプの磁気軸受装置
JP2545070B2 (ja) 1986-09-12 1996-10-16 本田技研工業株式会社 自動二輪車の後輪緩衝装置
JPS6371492U (ja) * 1986-10-28 1988-05-13
US5221179A (en) * 1988-07-13 1993-06-22 Osaka Vacuum, Ltd. Vacuum pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ

Also Published As

Publication number Publication date
US20070031270A1 (en) 2007-02-08
JP2006194083A (ja) 2006-07-27
EP1666730A4 (en) 2007-10-31
EP1666730B1 (en) 2009-11-18
US7390164B2 (en) 2008-06-24
KR20060096993A (ko) 2006-09-13
KR101128174B1 (ko) 2012-03-23
WO2005028874A1 (ja) 2005-03-31
EP1666730A1 (en) 2006-06-07

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Legal Events

Date Code Title Description
8363 Opposition against the patent