DE602004024217D1 - Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion - Google Patents
Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktionInfo
- Publication number
- DE602004024217D1 DE602004024217D1 DE602004024217T DE602004024217T DE602004024217D1 DE 602004024217 D1 DE602004024217 D1 DE 602004024217D1 DE 602004024217 T DE602004024217 T DE 602004024217T DE 602004024217 T DE602004024217 T DE 602004024217T DE 602004024217 D1 DE602004024217 D1 DE 602004024217D1
- Authority
- DE
- Germany
- Prior art keywords
- construction
- rotor
- turbomole
- pump
- rotor shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/662—Balancing of rotors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003323378A JP2006194083A (ja) | 2003-09-16 | 2003-09-16 | ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ |
PCT/JP2004/012409 WO2005028874A1 (ja) | 2003-09-16 | 2004-08-27 | ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004024217D1 true DE602004024217D1 (de) | 2009-12-31 |
Family
ID=34372710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004024217T Active DE602004024217D1 (de) | 2003-09-16 | 2004-08-27 | Konstruktion eines rotors und einer rotorwelle und turbomolekularpumpe mit diesem konstruktion |
Country Status (6)
Country | Link |
---|---|
US (1) | US7390164B2 (de) |
EP (1) | EP1666730B1 (de) |
JP (1) | JP2006194083A (de) |
KR (1) | KR101128174B1 (de) |
DE (1) | DE602004024217D1 (de) |
WO (1) | WO2005028874A1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100610012B1 (ko) * | 2004-08-16 | 2006-08-09 | 삼성전자주식회사 | 터보 펌프 |
US7485997B1 (en) | 2005-08-16 | 2009-02-03 | Avtron Industrial Automation, Inc. | System and method for securing a rotor to a motor drive shaft using cam fasteners |
JP5255752B2 (ja) * | 2006-03-03 | 2013-08-07 | エドワーズ株式会社 | ターボ分子ポンプ |
JP5764283B2 (ja) * | 2007-12-27 | 2015-08-19 | エドワーズ株式会社 | 真空ポンプ |
WO2010095218A1 (ja) * | 2009-02-18 | 2010-08-26 | 株式会社 島津製作所 | ターボ分子ポンプ |
US10001126B2 (en) * | 2009-08-21 | 2018-06-19 | Edwards Japan Limited | Vacuum pump |
JP5778166B2 (ja) * | 2010-10-19 | 2015-09-16 | エドワーズ株式会社 | 真空ポンプ |
DE102012108394A1 (de) | 2012-09-10 | 2014-03-13 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3034880B1 (de) * | 2014-12-15 | 2019-10-16 | Pfeiffer Vacuum Gmbh | Rotoranordnung für eine vakuumpumpe und verfahren zur herstellung derselben |
KR102499085B1 (ko) * | 2016-05-04 | 2023-02-10 | 삼성전자주식회사 | 진공 펌프 |
JP6834845B2 (ja) * | 2017-08-15 | 2021-02-24 | 株式会社島津製作所 | ターボ分子ポンプ |
US10557471B2 (en) * | 2017-11-16 | 2020-02-11 | L Dean Stansbury | Turbomolecular vacuum pump for ionized matter and plasma fields |
JP6973348B2 (ja) * | 2018-10-15 | 2021-11-24 | 株式会社島津製作所 | 真空ポンプ |
JP7306878B2 (ja) | 2019-05-31 | 2023-07-11 | エドワーズ株式会社 | 真空ポンプ、及び、真空ポンプ構成部品 |
GB2601320B (en) * | 2020-11-25 | 2023-04-26 | Edwards S R O | Rotor assembly for a turbomolecular pump |
GB202018692D0 (en) * | 2020-11-27 | 2021-01-13 | Lm Wp Patent Holding As | A mechanism for restraining movement of a locking pin |
JP2022110190A (ja) * | 2021-01-18 | 2022-07-29 | エドワーズ株式会社 | 真空ポンプとその回転体 |
JP2022127116A (ja) * | 2021-02-19 | 2022-08-31 | エドワーズ株式会社 | 真空ポンプ、及び、真空ポンプ用回転体 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2202383A1 (de) | 1972-01-19 | 1973-07-26 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe |
JPH0646036B2 (ja) * | 1982-11-19 | 1994-06-15 | セイコー電子工業株式会社 | 軸流分子ポンプ |
JPS6121029A (ja) | 1984-07-10 | 1986-01-29 | 井関農機株式会社 | 脱穀装置 |
JPH0759954B2 (ja) | 1985-03-14 | 1995-06-28 | 株式会社島津製作所 | タ−ボ分子ポンプの磁気軸受装置 |
JP2545070B2 (ja) | 1986-09-12 | 1996-10-16 | 本田技研工業株式会社 | 自動二輪車の後輪緩衝装置 |
JPS6371492U (de) * | 1986-10-28 | 1988-05-13 | ||
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
DE19915307A1 (de) | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
JP2003172291A (ja) | 2001-12-04 | 2003-06-20 | Boc Edwards Technologies Ltd | 真空ポンプ |
-
2003
- 2003-09-16 JP JP2003323378A patent/JP2006194083A/ja active Pending
-
2004
- 2004-08-27 KR KR1020067004758A patent/KR101128174B1/ko active IP Right Grant
- 2004-08-27 WO PCT/JP2004/012409 patent/WO2005028874A1/ja active Application Filing
- 2004-08-27 DE DE602004024217T patent/DE602004024217D1/de active Active
- 2004-08-27 EP EP04772365A patent/EP1666730B1/de active Active
- 2004-08-27 US US10/571,642 patent/US7390164B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP1666730B1 (de) | 2009-11-18 |
EP1666730A4 (de) | 2007-10-31 |
KR101128174B1 (ko) | 2012-03-23 |
JP2006194083A (ja) | 2006-07-27 |
EP1666730A1 (de) | 2006-06-07 |
KR20060096993A (ko) | 2006-09-13 |
WO2005028874A1 (ja) | 2005-03-31 |
US20070031270A1 (en) | 2007-02-08 |
US7390164B2 (en) | 2008-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent |