DE602004022893D1 - Verfahren zur Herstellung eines optischen Informationsaufzeichnungsmediums - Google Patents

Verfahren zur Herstellung eines optischen Informationsaufzeichnungsmediums

Info

Publication number
DE602004022893D1
DE602004022893D1 DE602004022893T DE602004022893T DE602004022893D1 DE 602004022893 D1 DE602004022893 D1 DE 602004022893D1 DE 602004022893 T DE602004022893 T DE 602004022893T DE 602004022893 T DE602004022893 T DE 602004022893T DE 602004022893 D1 DE602004022893 D1 DE 602004022893D1
Authority
DE
Germany
Prior art keywords
producing
recording medium
information recording
optical information
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004022893T
Other languages
English (en)
Inventor
Eiji Kariyada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of DE602004022893D1 publication Critical patent/DE602004022893D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266Sputtering or spin-coating layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403Layers; Shape, structure or physical properties thereof
    • G11B7/24067Combinations of two or more layers with specific interrelation
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
DE602004022893T 2003-06-13 2004-06-14 Verfahren zur Herstellung eines optischen Informationsaufzeichnungsmediums Expired - Lifetime DE602004022893D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003169019 2003-06-13
JP2003318104A JP2005025910A (ja) 2003-06-13 2003-09-10 光学的情報記録媒体及びその製造方法

Publications (1)

Publication Number Publication Date
DE602004022893D1 true DE602004022893D1 (de) 2009-10-15

Family

ID=33302296

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004022893T Expired - Lifetime DE602004022893D1 (de) 2003-06-13 2004-06-14 Verfahren zur Herstellung eines optischen Informationsaufzeichnungsmediums

Country Status (6)

Country Link
US (1) US20040252622A1 (de)
EP (1) EP1486964B1 (de)
JP (1) JP2005025910A (de)
CN (1) CN100365720C (de)
DE (1) DE602004022893D1 (de)
TW (1) TWI277085B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251279A (ja) * 2004-03-03 2005-09-15 Nec Corp 光学的情報記録媒体及びその製造方法
JP2006099905A (ja) * 2004-09-30 2006-04-13 Toshiba Corp 光記録媒体
US20070030569A1 (en) * 2005-08-04 2007-02-08 Guardian Industries Corp. Broad band antireflection coating and method of making same
JP4415271B2 (ja) * 2005-08-30 2010-02-17 日本電気株式会社 光記録媒体
JP4193147B2 (ja) * 2005-09-29 2008-12-10 日本電気株式会社 光学的情報記録媒体及びその製造方法
JP5191650B2 (ja) * 2005-12-16 2013-05-08 シャープ株式会社 窒化物半導体発光素子および窒化物半導体発光素子の製造方法
US20070154674A1 (en) * 2005-12-29 2007-07-05 Imation Corp. Recordable optical media with thermal buffer layer
EP2110694B1 (de) * 2008-04-18 2013-08-14 Sony DADC Austria AG Verfahren zur Herstellung eines optischen Wellenleiters, optischer Wellenleiter und Sensoranordnung
JP5441902B2 (ja) * 2008-06-13 2014-03-12 パナソニック株式会社 情報記録媒体とそれを用いた記録再生方法
JP4661953B2 (ja) * 2008-12-04 2011-03-30 ソニー株式会社 光記録媒体およびその製造方法
JP5710591B2 (ja) * 2009-04-20 2015-04-30 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated プロセスチャンバ壁上にシリコンコーティングを使用した残留フッ素ラジカルの除去の促進
JP5807219B2 (ja) * 2011-08-26 2015-11-10 パナソニックIpマネジメント株式会社 光学材料及びこれを含む光学素子
WO2013054823A1 (en) * 2011-10-14 2013-04-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR102264555B1 (ko) * 2013-12-23 2021-06-11 옥스포드 유니버시티 이노베이션 리미티드 광학 소자

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US3642548A (en) * 1969-08-20 1972-02-15 Siemens Ag Method of producing integrated circuits
JP2523180B2 (ja) * 1989-06-01 1996-08-07 帝人株式会社 光記録媒体及びその製造方法
US5227211A (en) * 1989-04-21 1993-07-13 Hmt Technology Corporation Magnetic recording disk medium comprising a magnetic thin film and a carbon overcoat having surface nitrogen atoms, a specified carbon structure, and oxygen atoms
JPH05342631A (ja) * 1992-06-15 1993-12-24 Matsushita Electric Ind Co Ltd 光学式情報記録媒体とその製造方法
JP2857002B2 (ja) * 1993-01-07 1999-02-10 シャープ株式会社 光磁気記憶装置
CA2127059A1 (en) * 1993-07-02 1995-01-03 Masahiko Sekiya Magneto-optical recording medium
US5952128A (en) * 1995-08-15 1999-09-14 Ulvac Coating Corporation Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask
WO1997034298A1 (en) * 1996-03-11 1997-09-18 Matsushita Electric Industrial Co., Ltd. Optical data recording medium, method of producing the same and method of reproducing/erasing record
TW414892B (en) * 1996-05-28 2000-12-11 Ibm Optical data storage system with multiple rewriteable phase-change recording layers
US5974025A (en) * 1997-08-15 1999-10-26 Ricoh Company, Ltd. Optical recording medium and recording and reproducing method using the same
US5985104A (en) * 1997-10-09 1999-11-16 International Business Machines Corporation Sputtered mask defined with highly selective side wall chemical etching
JPH11203725A (ja) * 1998-01-16 1999-07-30 Nec Corp 相変化光ディスク
SG92631A1 (en) * 1998-03-20 2002-11-19 Sony Corp Optical recording medium, and method of manufacturing same
US6477135B1 (en) * 1998-03-26 2002-11-05 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and method for recording and reproduction information thereon
JP2000026139A (ja) * 1998-07-06 2000-01-25 Nippon Sheet Glass Co Ltd 絶縁膜の被覆方法およびそれを用いた画像表示用ガラス基板
JP2000090491A (ja) * 1998-09-14 2000-03-31 Toshiba Corp 相変化光記録媒体
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Also Published As

Publication number Publication date
EP1486964A2 (de) 2004-12-15
US20040252622A1 (en) 2004-12-16
CN1573992A (zh) 2005-02-02
EP1486964B1 (de) 2009-09-02
TW200501152A (en) 2005-01-01
TWI277085B (en) 2007-03-21
EP1486964A3 (de) 2007-08-22
CN100365720C (zh) 2008-01-30
JP2005025910A (ja) 2005-01-27

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