DE602004018089D1 - Pumpvorrichtung mit Mikropumpen, die einen thermischen Transpirationseffekt nutzen - Google Patents

Pumpvorrichtung mit Mikropumpen, die einen thermischen Transpirationseffekt nutzen

Info

Publication number
DE602004018089D1
DE602004018089D1 DE602004018089T DE602004018089T DE602004018089D1 DE 602004018089 D1 DE602004018089 D1 DE 602004018089D1 DE 602004018089 T DE602004018089 T DE 602004018089T DE 602004018089 T DE602004018089 T DE 602004018089T DE 602004018089 D1 DE602004018089 D1 DE 602004018089D1
Authority
DE
Germany
Prior art keywords
micropumps
utilizing
pumping device
thermal transpiration
transpiration effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004018089T
Other languages
English (en)
Inventor
Roland Bernard
Hisanori Kambara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of DE602004018089D1 publication Critical patent/DE602004018089D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
DE602004018089T 2003-11-04 2004-11-02 Pumpvorrichtung mit Mikropumpen, die einen thermischen Transpirationseffekt nutzen Active DE602004018089D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0312894A FR2861814B1 (fr) 2003-11-04 2003-11-04 Dispositif de pompage par micropompes a transpiration thermique

Publications (1)

Publication Number Publication Date
DE602004018089D1 true DE602004018089D1 (de) 2009-01-15

Family

ID=34429857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004018089T Active DE602004018089D1 (de) 2003-11-04 2004-11-02 Pumpvorrichtung mit Mikropumpen, die einen thermischen Transpirationseffekt nutzen

Country Status (6)

Country Link
US (1) US7572110B2 (de)
EP (1) EP1531267B1 (de)
JP (1) JP2005163784A (de)
AT (1) ATE416311T1 (de)
DE (1) DE602004018089D1 (de)
FR (1) FR2861814B1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI278426B (en) * 2004-12-30 2007-04-11 Prec Instr Dev Ct Nat Composite plate device for thermal transpiration micropump
WO2006121534A1 (en) * 2005-05-09 2006-11-16 University Of Oregon Thermally-powered nonmechanical fluid pumps using ratcheted channels
US20090095927A1 (en) * 2005-11-04 2009-04-16 Mccarthy Matthew Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
WO2008038611A1 (fr) * 2006-09-28 2008-04-03 National Institute Of Advanced Industrial Science And Technology Pompe d'acheminement de gaz, procédé de formation d'un dispositif de chauffage et capteur
US7980828B1 (en) 2007-04-25 2011-07-19 Sandia Corporation Microelectromechanical pump utilizing porous silicon
WO2012118995A1 (en) * 2011-03-02 2012-09-07 Game Changers, Llc Thermal transpiration device and method of making same
WO2011050285A1 (en) 2009-10-23 2011-04-28 University Of Louisville Research Foundation, Inc. Thermally driven knudsen pump
EP2513480A1 (de) * 2009-12-18 2012-10-24 K&Y Corporation Infusionspumpe
RU2462615C1 (ru) 2011-04-19 2012-09-27 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Московский Физико-Технический Институт (Государственный Университет)" Газовый микронасос
JP4934750B1 (ja) * 2011-05-31 2012-05-16 株式会社メトラン ポンプユニット、呼吸補助装置
JP5211336B2 (ja) * 2012-02-16 2013-06-12 株式会社メトラン ポンプユニット、呼吸補助装置
US9702351B2 (en) * 2014-11-12 2017-07-11 Leif Alexi Steinhour Convection pump and method of operation
US10208739B2 (en) * 2016-01-05 2019-02-19 Funai Electric Co., Ltd. Microfluidic pump with thermal control
JP7310911B2 (ja) 2019-10-21 2023-07-19 株式会社村田製作所 流体制御装置
WO2023039173A1 (en) * 2021-09-09 2023-03-16 Torramics, Inc. Apparatus and method of operating a gas pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130519A (ja) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima 多孔性物質を用いた気体の輸送圧縮装置
US5041800A (en) * 1989-05-19 1991-08-20 Ppa Industries, Inc. Lower power oscillator with heated resonator (S), with dual mode or other temperature sensing, possibly with an insulative support structure disposed between the resonator (S) and a resonator enclosure
JP3005972B2 (ja) * 1992-05-19 2000-02-07 株式会社 セル・コーポレーション 閾動作式半導体型静電力装置
DE69333758T2 (de) * 1992-10-08 2006-04-13 Hewlett-Packard Development Co., L.P., Houston Druckkopf mit verminderten Verbindungen zu einem Drucker
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
ATE218194T1 (de) * 1996-12-11 2002-06-15 Gesim Ges Fuer Silizium Mikros Mikroejektionspumpe
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6533554B1 (en) * 1999-11-01 2003-03-18 University Of Southern California Thermal transpiration pump
FR2802335B1 (fr) * 1999-12-09 2002-04-05 Cit Alcatel Systeme et procede de controle de minienvironnement
US20020076140A1 (en) * 2000-12-14 2002-06-20 Onix Microsystems, Inc. MEMS optical switch with pneumatic actuation
US7431570B2 (en) * 2002-02-19 2008-10-07 Vapore, Inc. Capillary pumps for vaporization of liquids

Also Published As

Publication number Publication date
ATE416311T1 (de) 2008-12-15
EP1531267A3 (de) 2006-05-17
US20050095143A1 (en) 2005-05-05
FR2861814A1 (fr) 2005-05-06
US7572110B2 (en) 2009-08-11
EP1531267A2 (de) 2005-05-18
EP1531267B1 (de) 2008-12-03
FR2861814B1 (fr) 2006-02-03
JP2005163784A (ja) 2005-06-23

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