ATE416311T1 - Pumpvorrichtung mit mikropumpen, die einen thermischen transpirationseffekt nutzen - Google Patents

Pumpvorrichtung mit mikropumpen, die einen thermischen transpirationseffekt nutzen

Info

Publication number
ATE416311T1
ATE416311T1 AT04292591T AT04292591T ATE416311T1 AT E416311 T1 ATE416311 T1 AT E416311T1 AT 04292591 T AT04292591 T AT 04292591T AT 04292591 T AT04292591 T AT 04292591T AT E416311 T1 ATE416311 T1 AT E416311T1
Authority
AT
Austria
Prior art keywords
pumping device
micro pumps
thermal transpiration
transpiration effect
control conductor
Prior art date
Application number
AT04292591T
Other languages
English (en)
Inventor
Roland Bernard
Hisanori Kambara
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE416311T1 publication Critical patent/ATE416311T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
AT04292591T 2003-11-04 2004-11-02 Pumpvorrichtung mit mikropumpen, die einen thermischen transpirationseffekt nutzen ATE416311T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0312894A FR2861814B1 (fr) 2003-11-04 2003-11-04 Dispositif de pompage par micropompes a transpiration thermique

Publications (1)

Publication Number Publication Date
ATE416311T1 true ATE416311T1 (de) 2008-12-15

Family

ID=34429857

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04292591T ATE416311T1 (de) 2003-11-04 2004-11-02 Pumpvorrichtung mit mikropumpen, die einen thermischen transpirationseffekt nutzen

Country Status (6)

Country Link
US (1) US7572110B2 (de)
EP (1) EP1531267B1 (de)
JP (1) JP2005163784A (de)
AT (1) ATE416311T1 (de)
DE (1) DE602004018089D1 (de)
FR (1) FR2861814B1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI278426B (en) * 2004-12-30 2007-04-11 Prec Instr Dev Ct Nat Composite plate device for thermal transpiration micropump
WO2006121534A1 (en) * 2005-05-09 2006-11-16 University Of Oregon Thermally-powered nonmechanical fluid pumps using ratcheted channels
US7913928B2 (en) * 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
US20090095927A1 (en) * 2005-11-04 2009-04-16 Mccarthy Matthew Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same
WO2008038611A1 (fr) * 2006-09-28 2008-04-03 National Institute Of Advanced Industrial Science And Technology Pompe d'acheminement de gaz, procédé de formation d'un dispositif de chauffage et capteur
US7980828B1 (en) 2007-04-25 2011-07-19 Sandia Corporation Microelectromechanical pump utilizing porous silicon
US9728699B2 (en) * 2009-09-03 2017-08-08 Game Changers, Llc Thermal transpiration device and method of making same
WO2011050285A1 (en) 2009-10-23 2011-04-28 University Of Louisville Research Foundation, Inc. Thermally driven knudsen pump
JP2013514836A (ja) * 2009-12-18 2013-05-02 ケーアンドワイ コーポレイション 注入ポンプ
RU2462615C1 (ru) * 2011-04-19 2012-09-27 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Московский Физико-Технический Институт (Государственный Университет)" Газовый микронасос
JP4934750B1 (ja) * 2011-05-31 2012-05-16 株式会社メトラン ポンプユニット、呼吸補助装置
JP5211336B2 (ja) * 2012-02-16 2013-06-12 株式会社メトラン ポンプユニット、呼吸補助装置
US9702351B2 (en) * 2014-11-12 2017-07-11 Leif Alexi Steinhour Convection pump and method of operation
US10208739B2 (en) * 2016-01-05 2019-02-19 Funai Electric Co., Ltd. Microfluidic pump with thermal control
JP7310911B2 (ja) 2019-10-21 2023-07-19 株式会社村田製作所 流体制御装置
CA3231106A1 (en) * 2021-09-09 2023-03-16 Torramics Inc. Apparatus and method of operating a gas pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130519A (ja) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima 多孔性物質を用いた気体の輸送圧縮装置
US5041800A (en) * 1989-05-19 1991-08-20 Ppa Industries, Inc. Lower power oscillator with heated resonator (S), with dual mode or other temperature sensing, possibly with an insulative support structure disposed between the resonator (S) and a resonator enclosure
JP3005972B2 (ja) * 1992-05-19 2000-02-07 株式会社 セル・コーポレーション 閾動作式半導体型静電力装置
SG47435A1 (en) * 1992-10-08 1998-04-17 Hewlett Packard Co Printhead with reduced interconnections to a printer
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
JP2001505640A (ja) * 1996-12-11 2001-04-24 ゲーシム・ゲゼルシャフト・フューア・ズィリーツィウム−ミクロズュステーメ・ミト・ベシュレンクテル・ハフツング マイクロポンプ
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6533554B1 (en) * 1999-11-01 2003-03-18 University Of Southern California Thermal transpiration pump
FR2802335B1 (fr) * 1999-12-09 2002-04-05 Cit Alcatel Systeme et procede de controle de minienvironnement
US20020076140A1 (en) * 2000-12-14 2002-06-20 Onix Microsystems, Inc. MEMS optical switch with pneumatic actuation
JP2007521453A (ja) * 2003-10-21 2007-08-02 ヴェイポア インコーポレイテッド 液体気化用キャピラリポンプ

Also Published As

Publication number Publication date
US7572110B2 (en) 2009-08-11
EP1531267B1 (de) 2008-12-03
FR2861814B1 (fr) 2006-02-03
FR2861814A1 (fr) 2005-05-06
EP1531267A3 (de) 2006-05-17
EP1531267A2 (de) 2005-05-18
DE602004018089D1 (de) 2009-01-15
JP2005163784A (ja) 2005-06-23
US20050095143A1 (en) 2005-05-05

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