DE602004003091D1 - Polierzusammensetzung - Google Patents
PolierzusammensetzungInfo
- Publication number
- DE602004003091D1 DE602004003091D1 DE602004003091T DE602004003091T DE602004003091D1 DE 602004003091 D1 DE602004003091 D1 DE 602004003091D1 DE 602004003091 T DE602004003091 T DE 602004003091T DE 602004003091 T DE602004003091 T DE 602004003091T DE 602004003091 D1 DE602004003091 D1 DE 602004003091D1
- Authority
- DE
- Germany
- Prior art keywords
- polishing composition
- polishing
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005498 polishing Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
- C09G1/14—Other polishing compositions based on non-waxy substances
- C09G1/16—Other polishing compositions based on non-waxy substances on natural or synthetic resins
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003097247 | 2003-03-31 | ||
JP2003097247A JP4219722B2 (ja) | 2003-03-31 | 2003-03-31 | 研磨用組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004003091D1 true DE602004003091D1 (de) | 2006-12-21 |
DE602004003091T2 DE602004003091T2 (de) | 2007-05-03 |
Family
ID=32959554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004003091T Expired - Fee Related DE602004003091T2 (de) | 2003-03-31 | 2004-03-31 | Polierzusammensetzung |
Country Status (5)
Country | Link |
---|---|
US (1) | US7211121B2 (de) |
EP (1) | EP1471124B1 (de) |
JP (1) | JP4219722B2 (de) |
DE (1) | DE602004003091T2 (de) |
DK (1) | DK1471124T3 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7241324B2 (en) * | 2004-04-13 | 2007-07-10 | Universal Photonics Llc | Method of producing abrasive tools |
JP4667025B2 (ja) * | 2004-12-03 | 2011-04-06 | 日本ミクロコーティング株式会社 | 研磨スラリー及び方法 |
KR101267971B1 (ko) * | 2005-08-31 | 2013-05-27 | 가부시키가이샤 후지미인코퍼레이티드 | 연마용 조성물 및 연마 방법 |
JP2007063440A (ja) * | 2005-08-31 | 2007-03-15 | Fujimi Inc | 研磨用組成物及び研磨方法 |
DE102006061891A1 (de) * | 2006-12-28 | 2008-07-03 | Basf Se | Zusammensetzung zum Polieren von Oberflächen aus Siliziumdioxid |
JP5570685B2 (ja) * | 2007-03-16 | 2014-08-13 | 花王株式会社 | ハードディスク基板用研磨液組成物 |
JP2009155469A (ja) * | 2007-12-26 | 2009-07-16 | Kao Corp | 研磨液組成物 |
WO2012102144A1 (ja) * | 2011-01-26 | 2012-08-02 | 株式会社 フジミインコーポレーテッド | 研磨用組成物、それを用いた研磨方法及び基板の製造方法 |
CN102585706B (zh) * | 2012-01-09 | 2013-11-20 | 清华大学 | 酸性化学机械抛光组合物 |
US9388330B2 (en) * | 2012-12-17 | 2016-07-12 | Fuji Engineering Co., Ltd. | Bag containing blasting material |
CN105102188B (zh) * | 2013-03-12 | 2021-06-01 | 国立大学法人九州大学 | 研磨垫及研磨方法 |
JP6148932B2 (ja) * | 2013-08-20 | 2017-06-14 | 花王株式会社 | 磁気ディスク基板用研磨液組成物 |
KR102289629B1 (ko) | 2013-09-25 | 2021-08-17 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 세라믹 연마 복합재 폴리싱 용액 |
CN109054747A (zh) * | 2018-09-13 | 2018-12-21 | 深圳市佳欣纳米科技有限公司 | 一种含有氧化硅和金刚石的不锈钢研磨液及其制备方法 |
US11198797B2 (en) * | 2019-01-24 | 2021-12-14 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing compositions having stabilized abrasive particles for polishing dielectric substrates |
CN115353808B (zh) * | 2022-07-13 | 2024-01-23 | 锦矽半导体(上海)有限公司 | 一种镍镀层用抛光液 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5489389A (en) | 1977-12-27 | 1979-07-16 | Fujimi Kenmazai Kougiyou Kk | Composition for polishing of moldings in synthetic resin |
US4956015A (en) | 1988-01-19 | 1990-09-11 | Mitsubishi Kasei Corporation | Polishing composition |
JPH0214280A (ja) | 1988-07-01 | 1990-01-18 | Showa Denko Kk | プラスチック研磨用組成物 |
JP3582017B2 (ja) | 1993-06-25 | 2004-10-27 | 株式会社フジミインコーポレーテッド | 研磨用組成物およびプラスチック研磨用組成物 |
SG83711A1 (en) * | 1998-04-23 | 2001-10-16 | Tokyo Magnetic Printing | Free abrasive slurry compositions |
JP2000183002A (ja) * | 1998-12-10 | 2000-06-30 | Okamoto Machine Tool Works Ltd | ウエハの研磨終点検出方法および研磨終点検出装置 |
US6332831B1 (en) * | 2000-04-06 | 2001-12-25 | Fujimi America Inc. | Polishing composition and method for producing a memory hard disk |
US6569215B2 (en) * | 2000-04-17 | 2003-05-27 | Showa Denko Kabushiki Kaisha | Composition for polishing magnetic disk substrate |
JP4009986B2 (ja) | 2000-11-29 | 2007-11-21 | 株式会社フジミインコーポレーテッド | 研磨用組成物、およびそれを用いてメモリーハードディスクを研磨する研磨方法 |
-
2003
- 2003-03-31 JP JP2003097247A patent/JP4219722B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-30 US US10/813,219 patent/US7211121B2/en not_active Expired - Fee Related
- 2004-03-31 EP EP04007862A patent/EP1471124B1/de not_active Expired - Fee Related
- 2004-03-31 DE DE602004003091T patent/DE602004003091T2/de not_active Expired - Fee Related
- 2004-03-31 DK DK04007862T patent/DK1471124T3/da active
Also Published As
Publication number | Publication date |
---|---|
DE602004003091T2 (de) | 2007-05-03 |
EP1471124B1 (de) | 2006-11-08 |
EP1471124A1 (de) | 2004-10-27 |
US20040187393A1 (en) | 2004-09-30 |
JP2004300347A (ja) | 2004-10-28 |
JP4219722B2 (ja) | 2009-02-04 |
DK1471124T3 (da) | 2007-03-19 |
US7211121B2 (en) | 2007-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |