DE60138161D1 - Eingekapseltes mikroelektromechanisches Bandpassfilter für integrierte Schaltungen und Verfahren zur Herstellung desselben - Google Patents

Eingekapseltes mikroelektromechanisches Bandpassfilter für integrierte Schaltungen und Verfahren zur Herstellung desselben

Info

Publication number
DE60138161D1
DE60138161D1 DE60138161T DE60138161T DE60138161D1 DE 60138161 D1 DE60138161 D1 DE 60138161D1 DE 60138161 T DE60138161 T DE 60138161T DE 60138161 T DE60138161 T DE 60138161T DE 60138161 D1 DE60138161 D1 DE 60138161D1
Authority
DE
Germany
Prior art keywords
making
same
integrated circuits
bandpass filter
encapsulated microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138161T
Other languages
English (en)
Inventor
Kevin K Chan
Leathen Shi
James F Ziegler
Christopher Jhanes
James L Speidel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE60138161D1 publication Critical patent/DE60138161D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Superheterodyne Receivers (AREA)
DE60138161T 2000-06-19 2001-02-15 Eingekapseltes mikroelektromechanisches Bandpassfilter für integrierte Schaltungen und Verfahren zur Herstellung desselben Expired - Lifetime DE60138161D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/596,725 US6262464B1 (en) 2000-06-19 2000-06-19 Encapsulated MEMS brand-pass filter for integrated circuits

Publications (1)

Publication Number Publication Date
DE60138161D1 true DE60138161D1 (de) 2009-05-14

Family

ID=24388434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138161T Expired - Lifetime DE60138161D1 (de) 2000-06-19 2001-02-15 Eingekapseltes mikroelektromechanisches Bandpassfilter für integrierte Schaltungen und Verfahren zur Herstellung desselben

Country Status (14)

Country Link
US (2) US6262464B1 (de)
EP (1) EP1168609B1 (de)
JP (1) JP3823032B2 (de)
KR (1) KR100477392B1 (de)
CN (2) CN1206156C (de)
BR (1) BR0101001B1 (de)
CA (1) CA2344737C (de)
DE (1) DE60138161D1 (de)
HK (1) HK1041678B (de)
IL (1) IL143008A0 (de)
MX (1) MXPA01006272A (de)
MY (1) MY127203A (de)
SG (1) SG91929A1 (de)
TW (1) TW497130B (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6677225B1 (en) * 2000-07-14 2004-01-13 Zyvex Corporation System and method for constraining totally released microcomponents
CN1262883C (zh) 2000-07-17 2006-07-05 得克萨斯州大学系统董事会 影印用于平版印刷工艺中的自动化液体分配的方法和系统
AU2001297642A1 (en) * 2000-10-12 2002-09-04 Board Of Regents, The University Of Texas System Template for room temperature, low pressure micro- and nano-imprint lithography
US6803840B2 (en) * 2001-03-30 2004-10-12 California Institute Of Technology Pattern-aligned carbon nanotube growth and tunable resonator apparatus
EP1384322A1 (de) * 2001-03-30 2004-01-28 California Institute Of Technology Kohlenstoff-nanoröhrenarray-hf-filter
US6610605B2 (en) 2001-06-28 2003-08-26 Intel Corporation Method and apparatus for fabricating encapsulated micro-channels in a substrate
US20050064344A1 (en) * 2003-09-18 2005-03-24 University Of Texas System Board Of Regents Imprint lithography templates having alignment marks
DE60126291T2 (de) * 2001-11-16 2007-10-18 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Versiegelung von Mikrostrukturen enthaltenden Bauelementen
US7115305B2 (en) * 2002-02-01 2006-10-03 California Institute Of Technology Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials
US6621134B1 (en) 2002-02-07 2003-09-16 Shayne Zurn Vacuum sealed RF/microwave microresonator
US6605849B1 (en) 2002-02-14 2003-08-12 Symmetricom, Inc. MEMS analog frequency divider
KR100868386B1 (ko) * 2002-04-15 2008-11-12 쇼오트 아게 기판의 패턴화 코팅 방법 및 상기 방법에 의해 생성된 코팅 기판
DE10222609B4 (de) * 2002-04-15 2008-07-10 Schott Ag Verfahren zur Herstellung strukturierter Schichten auf Substraten und verfahrensgemäß beschichtetes Substrat
FI115222B (fi) * 2002-04-19 2005-03-31 Outokumpu Oy Menetelmä kuparikloridiliuoksen puhdistamiseksi
CA2484794A1 (en) 2002-05-23 2003-12-04 Schott Ag Glass material for use at high frequencies
CN1656612A (zh) 2002-05-23 2005-08-17 肖特股份公司 用于高频的玻璃材料
US6762116B1 (en) * 2002-06-12 2004-07-13 Zyvex Corporation System and method for fabricating microcomponent parts on a substrate having pre-fabricated electronic circuitry thereon
US20080160129A1 (en) 2006-05-11 2008-07-03 Molecular Imprints, Inc. Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
US7179079B2 (en) * 2002-07-08 2007-02-20 Molecular Imprints, Inc. Conforming template for patterning liquids disposed on substrates
EP1626926A2 (de) * 2002-10-25 2006-02-22 Microbridge Technologies Inc. Verfahren zur herstellung einer verpackten integrierten schaltung
JP4123044B2 (ja) * 2003-05-13 2008-07-23 ソニー株式会社 マイクロマシンおよびその製造方法
JP4114552B2 (ja) * 2003-06-10 2008-07-09 ソニー株式会社 マイクロマシンの製造方法
US20060108710A1 (en) * 2004-11-24 2006-05-25 Molecular Imprints, Inc. Method to reduce adhesion between a conformable region and a mold
US20050084804A1 (en) * 2003-10-16 2005-04-21 Molecular Imprints, Inc. Low surface energy templates
US7140861B2 (en) * 2004-04-27 2006-11-28 Molecular Imprints, Inc. Compliant hard template for UV imprinting
WO2006041535A2 (en) * 2004-05-05 2006-04-20 California Institute Of Technology Capillary lithography of nanofiber arrays
US7785526B2 (en) * 2004-07-20 2010-08-31 Molecular Imprints, Inc. Imprint alignment method, system, and template
US7939131B2 (en) * 2004-08-16 2011-05-10 Molecular Imprints, Inc. Method to provide a layer with uniform etch characteristics
US20060062922A1 (en) * 2004-09-23 2006-03-23 Molecular Imprints, Inc. Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
US8021967B2 (en) * 2004-11-01 2011-09-20 California Institute Of Technology Nanoscale wicking methods and devices
KR20070087213A (ko) * 2004-12-22 2007-08-27 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 공진기, 이것을 포함하는 집적 회로 및 공진기의 작동 방법
US7348870B2 (en) * 2005-01-05 2008-03-25 International Business Machines Corporation Structure and method of fabricating a hinge type MEMS switch
US20060177535A1 (en) * 2005-02-04 2006-08-10 Molecular Imprints, Inc. Imprint lithography template to facilitate control of liquid movement
JP4710435B2 (ja) * 2005-06-29 2011-06-29 ソニー株式会社 微小共振器、バンドパスフィルタ、半導体装置、並びに通信装置
US7759407B2 (en) 2005-07-22 2010-07-20 Molecular Imprints, Inc. Composition for adhering materials together
US8808808B2 (en) 2005-07-22 2014-08-19 Molecular Imprints, Inc. Method for imprint lithography utilizing an adhesion primer layer
US8557351B2 (en) * 2005-07-22 2013-10-15 Molecular Imprints, Inc. Method for adhering materials together
JP2007276089A (ja) 2006-04-11 2007-10-25 Sony Corp 電気機械素子とその製造方法、並びに共振器とその製造方法
JP2008062319A (ja) 2006-09-05 2008-03-21 Sony Corp 機能素子、半導体デバイスおよび電子機器
US20100090302A1 (en) * 2006-10-09 2010-04-15 Nxp, B.V. Resonator
CN100435408C (zh) * 2006-12-12 2008-11-19 中国电子科技集团公司第五十五研究所 基于mems技术的层叠式滤波器
JP5135628B2 (ja) * 2007-08-31 2013-02-06 セイコーインスツル株式会社 発振子およびそれを用いた発振器
DE102008044938B4 (de) 2008-08-29 2013-10-10 Schott Ag Verfahren zur Terminierung von lichtleitenden Faserbündeln sowie Hülse mit einem Faserbündel
US8058940B1 (en) * 2008-10-24 2011-11-15 Silicon Laboratories Inc. Dual in-situ mixing for extended tuning range of resonators
CN101870443A (zh) * 2009-04-22 2010-10-27 昆山西钛微电子科技有限公司 多层线路导通型晶圆级微机电系统芯片
CN102820504B (zh) * 2012-09-04 2014-10-15 中国电子科技集团公司第二十六研究所 全密封结构微机械滤波器
US9716485B2 (en) * 2014-06-08 2017-07-25 Board Of Trustees Of Michigan State University Frequency divider apparatus
US11185886B2 (en) 2018-11-30 2021-11-30 Vanguard Iniernational Semiconductor Singapore Pte. Ltd. Microelectromechanical systems, devices, and methods for fabricating a microelectromechanical systems device, and methods for generating a plurality of frequencies
KR102236099B1 (ko) * 2019-10-25 2021-04-05 삼성전기주식회사 멀티 터치의 위치 식별이 가능한 터치 센싱 장치 및 전자 기기
CN113448458A (zh) * 2020-03-25 2021-09-28 昇佳电子股份有限公司 电容感测电路

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532121A1 (fr) 1982-08-20 1984-02-24 Thomson Csf Melangeur d'ondes electromagnetiques hyperfrequences a recuperation de la frequence somme
US5083139A (en) 1990-04-06 1992-01-21 Sony Corporation Thermal head formed of a flat cable encapsulated in a supporting body
US5528769A (en) 1991-11-18 1996-06-18 Trw Inc. High electron mobility transistor monolithic integrated circuit receiver
US5625307A (en) 1992-03-03 1997-04-29 Anadigics, Inc. Low cost monolithic gallium arsenide upconverter chip
WO1994014240A1 (en) * 1992-12-11 1994-06-23 The Regents Of The University Of California Microelectromechanical signal processors
US5839062A (en) * 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
US5649312A (en) 1994-11-14 1997-07-15 Fujitsu Limited MMIC downconverter for a direct broadcast satellite low noise block downconverter
JPH08265205A (ja) 1995-03-27 1996-10-11 Toshiba Corp ダブルスーパーチューナ
US6121552A (en) 1997-06-13 2000-09-19 The Regents Of The University Of Caliofornia Microfabricated high aspect ratio device with an electrical isolation trench
US6087701A (en) 1997-12-23 2000-07-11 Motorola, Inc. Semiconductor device having a cavity and method of making
FI108583B (fi) * 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
US6236096B1 (en) 1998-10-06 2001-05-22 National Science Council Of Republic Of China Structure of a three-electrode capacitive pressure sensor
US6150901A (en) * 1998-11-20 2000-11-21 Rockwell Collins, Inc. Programmable RF/IF bandpass filter utilizing MEM devices
KR100344790B1 (ko) * 1999-10-07 2002-07-19 엘지전자주식회사 마이크로 기계구조를 이용한 주파수 가변 초고주파 필터

Also Published As

Publication number Publication date
MXPA01006272A (es) 2003-05-19
CA2344737C (en) 2005-07-19
KR20010113473A (ko) 2001-12-28
CN1206156C (zh) 2005-06-15
IL143008A0 (en) 2002-04-21
MY127203A (en) 2006-11-30
EP1168609A2 (de) 2002-01-02
US20010055864A1 (en) 2001-12-27
JP2002094328A (ja) 2002-03-29
CN1328955A (zh) 2002-01-02
TW497130B (en) 2002-08-01
CA2344737A1 (en) 2001-12-19
US6399406B2 (en) 2002-06-04
CN1286710C (zh) 2006-11-29
US6262464B1 (en) 2001-07-17
HK1041678B (zh) 2005-12-09
BR0101001B1 (pt) 2014-11-25
HK1041678A1 (en) 2002-07-19
SG91929A1 (en) 2002-10-15
EP1168609B1 (de) 2009-04-01
BR0101001A (pt) 2002-02-13
JP3823032B2 (ja) 2006-09-20
CN1618724A (zh) 2005-05-25
KR100477392B1 (ko) 2005-03-17
EP1168609A3 (de) 2002-01-30

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