IL143008A0 - Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof - Google Patents
Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereofInfo
- Publication number
- IL143008A0 IL143008A0 IL14300801A IL14300801A IL143008A0 IL 143008 A0 IL143008 A0 IL 143008A0 IL 14300801 A IL14300801 A IL 14300801A IL 14300801 A IL14300801 A IL 14300801A IL 143008 A0 IL143008 A0 IL 143008A0
- Authority
- IL
- Israel
- Prior art keywords
- fabrication
- pass filter
- integrated circuits
- encapsulated mems
- mems band
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2463—Clamped-clamped beam resonators
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
- Superheterodyne Receivers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/596,725 US6262464B1 (en) | 2000-06-19 | 2000-06-19 | Encapsulated MEMS brand-pass filter for integrated circuits |
Publications (1)
Publication Number | Publication Date |
---|---|
IL143008A0 true IL143008A0 (en) | 2002-04-21 |
Family
ID=24388434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14300801A IL143008A0 (en) | 2000-06-19 | 2001-05-07 | Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
Country Status (14)
Country | Link |
---|---|
US (2) | US6262464B1 (xx) |
EP (1) | EP1168609B1 (xx) |
JP (1) | JP3823032B2 (xx) |
KR (1) | KR100477392B1 (xx) |
CN (2) | CN1206156C (xx) |
BR (1) | BR0101001B1 (xx) |
CA (1) | CA2344737C (xx) |
DE (1) | DE60138161D1 (xx) |
HK (1) | HK1041678B (xx) |
IL (1) | IL143008A0 (xx) |
MX (1) | MXPA01006272A (xx) |
MY (1) | MY127203A (xx) |
SG (1) | SG91929A1 (xx) |
TW (1) | TW497130B (xx) |
Families Citing this family (50)
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US6677225B1 (en) * | 2000-07-14 | 2004-01-13 | Zyvex Corporation | System and method for constraining totally released microcomponents |
EP1303793B1 (en) | 2000-07-17 | 2015-01-28 | Board Of Regents, The University Of Texas System | Method and system of automatic fluid dispensing for imprint lithography processes |
KR101031528B1 (ko) * | 2000-10-12 | 2011-04-27 | 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 | 실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿 |
US6737939B2 (en) * | 2001-03-30 | 2004-05-18 | California Institute Of Technology | Carbon nanotube array RF filter |
WO2002080360A1 (en) * | 2001-03-30 | 2002-10-10 | California Institute Of Technology | Pattern-aligned carbon nanotube growth and tunable resonator apparatus |
US6610605B2 (en) * | 2001-06-28 | 2003-08-26 | Intel Corporation | Method and apparatus for fabricating encapsulated micro-channels in a substrate |
US20050064344A1 (en) * | 2003-09-18 | 2005-03-24 | University Of Texas System Board Of Regents | Imprint lithography templates having alignment marks |
EP1312580B1 (en) * | 2001-11-16 | 2007-01-24 | STMicroelectronics S.r.l. | Process for sealing devices incorporating microstructures |
US7115305B2 (en) * | 2002-02-01 | 2006-10-03 | California Institute Of Technology | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials |
US6621134B1 (en) | 2002-02-07 | 2003-09-16 | Shayne Zurn | Vacuum sealed RF/microwave microresonator |
US6605849B1 (en) | 2002-02-14 | 2003-08-12 | Symmetricom, Inc. | MEMS analog frequency divider |
KR100868386B1 (ko) * | 2002-04-15 | 2008-11-12 | 쇼오트 아게 | 기판의 패턴화 코팅 방법 및 상기 방법에 의해 생성된 코팅 기판 |
DE10222609B4 (de) * | 2002-04-15 | 2008-07-10 | Schott Ag | Verfahren zur Herstellung strukturierter Schichten auf Substraten und verfahrensgemäß beschichtetes Substrat |
FI115222B (fi) * | 2002-04-19 | 2005-03-31 | Outokumpu Oy | Menetelmä kuparikloridiliuoksen puhdistamiseksi |
US8273671B2 (en) | 2002-05-23 | 2012-09-25 | Schott Ag | Glass material for radio-frequency applications |
CA2485185A1 (en) | 2002-05-23 | 2003-12-04 | Schott Ag | Method for producing a component comprising a conductor structure that is suitable for use at high frequencies |
US6762116B1 (en) * | 2002-06-12 | 2004-07-13 | Zyvex Corporation | System and method for fabricating microcomponent parts on a substrate having pre-fabricated electronic circuitry thereon |
US20080160129A1 (en) | 2006-05-11 | 2008-07-03 | Molecular Imprints, Inc. | Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template |
US7179079B2 (en) * | 2002-07-08 | 2007-02-20 | Molecular Imprints, Inc. | Conforming template for patterning liquids disposed on substrates |
EP1626926A2 (en) * | 2002-10-25 | 2006-02-22 | Microbridge Technologies Inc. | Method for producing a packaged integrated circuit |
JP4123044B2 (ja) * | 2003-05-13 | 2008-07-23 | ソニー株式会社 | マイクロマシンおよびその製造方法 |
JP4114552B2 (ja) * | 2003-06-10 | 2008-07-09 | ソニー株式会社 | マイクロマシンの製造方法 |
US20060108710A1 (en) * | 2004-11-24 | 2006-05-25 | Molecular Imprints, Inc. | Method to reduce adhesion between a conformable region and a mold |
US20050084804A1 (en) * | 2003-10-16 | 2005-04-21 | Molecular Imprints, Inc. | Low surface energy templates |
US7140861B2 (en) * | 2004-04-27 | 2006-11-28 | Molecular Imprints, Inc. | Compliant hard template for UV imprinting |
US7491628B2 (en) * | 2004-05-05 | 2009-02-17 | California Institute Of Technology | Method for patterning large scale nano-fibrous surfaces using capillography |
US7785526B2 (en) * | 2004-07-20 | 2010-08-31 | Molecular Imprints, Inc. | Imprint alignment method, system, and template |
US7939131B2 (en) * | 2004-08-16 | 2011-05-10 | Molecular Imprints, Inc. | Method to provide a layer with uniform etch characteristics |
US20060062922A1 (en) * | 2004-09-23 | 2006-03-23 | Molecular Imprints, Inc. | Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor |
US8021967B2 (en) * | 2004-11-01 | 2011-09-20 | California Institute Of Technology | Nanoscale wicking methods and devices |
US8183946B2 (en) * | 2004-12-22 | 2012-05-22 | Nxp B.V. | Charge biased MEM resonator |
US7348870B2 (en) * | 2005-01-05 | 2008-03-25 | International Business Machines Corporation | Structure and method of fabricating a hinge type MEMS switch |
US20060177535A1 (en) * | 2005-02-04 | 2006-08-10 | Molecular Imprints, Inc. | Imprint lithography template to facilitate control of liquid movement |
JP4710435B2 (ja) * | 2005-06-29 | 2011-06-29 | ソニー株式会社 | 微小共振器、バンドパスフィルタ、半導体装置、並びに通信装置 |
US8557351B2 (en) * | 2005-07-22 | 2013-10-15 | Molecular Imprints, Inc. | Method for adhering materials together |
US8808808B2 (en) | 2005-07-22 | 2014-08-19 | Molecular Imprints, Inc. | Method for imprint lithography utilizing an adhesion primer layer |
US7759407B2 (en) | 2005-07-22 | 2010-07-20 | Molecular Imprints, Inc. | Composition for adhering materials together |
JP2007276089A (ja) | 2006-04-11 | 2007-10-25 | Sony Corp | 電気機械素子とその製造方法、並びに共振器とその製造方法 |
JP2008062319A (ja) | 2006-09-05 | 2008-03-21 | Sony Corp | 機能素子、半導体デバイスおよび電子機器 |
EP2082481B1 (en) * | 2006-10-09 | 2010-05-05 | Nxp B.V. | Resonator |
CN100435408C (zh) * | 2006-12-12 | 2008-11-19 | 中国电子科技集团公司第五十五研究所 | 基于mems技术的层叠式滤波器 |
JP5135628B2 (ja) * | 2007-08-31 | 2013-02-06 | セイコーインスツル株式会社 | 発振子およびそれを用いた発振器 |
DE102008044938B4 (de) | 2008-08-29 | 2013-10-10 | Schott Ag | Verfahren zur Terminierung von lichtleitenden Faserbündeln sowie Hülse mit einem Faserbündel |
US8058940B1 (en) | 2008-10-24 | 2011-11-15 | Silicon Laboratories Inc. | Dual in-situ mixing for extended tuning range of resonators |
CN101870443A (zh) * | 2009-04-22 | 2010-10-27 | 昆山西钛微电子科技有限公司 | 多层线路导通型晶圆级微机电系统芯片 |
CN102820504B (zh) * | 2012-09-04 | 2014-10-15 | 中国电子科技集团公司第二十六研究所 | 全密封结构微机械滤波器 |
US9716485B2 (en) * | 2014-06-08 | 2017-07-25 | Board Of Trustees Of Michigan State University | Frequency divider apparatus |
US11185886B2 (en) | 2018-11-30 | 2021-11-30 | Vanguard Iniernational Semiconductor Singapore Pte. Ltd. | Microelectromechanical systems, devices, and methods for fabricating a microelectromechanical systems device, and methods for generating a plurality of frequencies |
KR102236099B1 (ko) * | 2019-10-25 | 2021-04-05 | 삼성전기주식회사 | 멀티 터치의 위치 식별이 가능한 터치 센싱 장치 및 전자 기기 |
US11703983B2 (en) * | 2020-03-25 | 2023-07-18 | Sensortek Technology Corp | Capacitance sensing circuit |
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FR2532121A1 (fr) | 1982-08-20 | 1984-02-24 | Thomson Csf | Melangeur d'ondes electromagnetiques hyperfrequences a recuperation de la frequence somme |
DE69114167T2 (de) | 1990-04-06 | 1996-06-20 | Sony Corp | Thermodruckkopf. |
US5528769A (en) | 1991-11-18 | 1996-06-18 | Trw Inc. | High electron mobility transistor monolithic integrated circuit receiver |
US5625307A (en) | 1992-03-03 | 1997-04-29 | Anadigics, Inc. | Low cost monolithic gallium arsenide upconverter chip |
WO1994014240A1 (en) * | 1992-12-11 | 1994-06-23 | The Regents Of The University Of California | Microelectromechanical signal processors |
US5839062A (en) * | 1994-03-18 | 1998-11-17 | The Regents Of The University Of California | Mixing, modulation and demodulation via electromechanical resonators |
US5649312A (en) | 1994-11-14 | 1997-07-15 | Fujitsu Limited | MMIC downconverter for a direct broadcast satellite low noise block downconverter |
JPH08265205A (ja) | 1995-03-27 | 1996-10-11 | Toshiba Corp | ダブルスーパーチューナ |
US6121552A (en) | 1997-06-13 | 2000-09-19 | The Regents Of The University Of Caliofornia | Microfabricated high aspect ratio device with an electrical isolation trench |
US6087701A (en) | 1997-12-23 | 2000-07-11 | Motorola, Inc. | Semiconductor device having a cavity and method of making |
FI108583B (fi) * | 1998-06-02 | 2002-02-15 | Nokia Corp | Resonaattorirakenteita |
US6236096B1 (en) | 1998-10-06 | 2001-05-22 | National Science Council Of Republic Of China | Structure of a three-electrode capacitive pressure sensor |
US6150901A (en) * | 1998-11-20 | 2000-11-21 | Rockwell Collins, Inc. | Programmable RF/IF bandpass filter utilizing MEM devices |
KR100344790B1 (ko) * | 1999-10-07 | 2002-07-19 | 엘지전자주식회사 | 마이크로 기계구조를 이용한 주파수 가변 초고주파 필터 |
-
2000
- 2000-06-19 US US09/596,725 patent/US6262464B1/en not_active Expired - Fee Related
-
2001
- 2001-02-15 DE DE60138161T patent/DE60138161D1/de not_active Expired - Lifetime
- 2001-02-15 EP EP01480011A patent/EP1168609B1/en not_active Expired - Lifetime
- 2001-03-16 BR BRPI0101001-8A patent/BR0101001B1/pt active IP Right Grant
- 2001-04-20 CA CA002344737A patent/CA2344737C/en not_active Expired - Lifetime
- 2001-04-23 US US09/840,264 patent/US6399406B2/en not_active Expired - Fee Related
- 2001-05-07 IL IL14300801A patent/IL143008A0/xx not_active IP Right Cessation
- 2001-05-28 KR KR10-2001-0029443A patent/KR100477392B1/ko not_active IP Right Cessation
- 2001-06-07 SG SG200103386A patent/SG91929A1/en unknown
- 2001-06-13 TW TW090114315A patent/TW497130B/zh not_active IP Right Cessation
- 2001-06-14 JP JP2001180600A patent/JP3823032B2/ja not_active Expired - Fee Related
- 2001-06-14 MY MYPI20012790 patent/MY127203A/en unknown
- 2001-06-18 CN CNB011210850A patent/CN1206156C/zh not_active Expired - Fee Related
- 2001-06-18 CN CNB2004100947493A patent/CN1286710C/zh not_active Expired - Fee Related
- 2001-06-19 MX MXPA01006272A patent/MXPA01006272A/es active IP Right Grant
-
2002
- 2002-05-03 HK HK02103371.1A patent/HK1041678B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1618724A (zh) | 2005-05-25 |
EP1168609B1 (en) | 2009-04-01 |
KR20010113473A (ko) | 2001-12-28 |
KR100477392B1 (ko) | 2005-03-17 |
US6399406B2 (en) | 2002-06-04 |
DE60138161D1 (de) | 2009-05-14 |
CN1206156C (zh) | 2005-06-15 |
EP1168609A2 (en) | 2002-01-02 |
US20010055864A1 (en) | 2001-12-27 |
US6262464B1 (en) | 2001-07-17 |
HK1041678B (zh) | 2005-12-09 |
JP2002094328A (ja) | 2002-03-29 |
MXPA01006272A (es) | 2003-05-19 |
MY127203A (en) | 2006-11-30 |
CN1328955A (zh) | 2002-01-02 |
HK1041678A1 (en) | 2002-07-19 |
EP1168609A3 (en) | 2002-01-30 |
JP3823032B2 (ja) | 2006-09-20 |
SG91929A1 (en) | 2002-10-15 |
TW497130B (en) | 2002-08-01 |
CN1286710C (zh) | 2006-11-29 |
BR0101001B1 (pt) | 2014-11-25 |
BR0101001A (pt) | 2002-02-13 |
CA2344737A1 (en) | 2001-12-19 |
CA2344737C (en) | 2005-07-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
MM9K | Patent not in force due to non-payment of renewal fees |