IL143008A0 - Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof - Google Patents

Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof

Info

Publication number
IL143008A0
IL143008A0 IL14300801A IL14300801A IL143008A0 IL 143008 A0 IL143008 A0 IL 143008A0 IL 14300801 A IL14300801 A IL 14300801A IL 14300801 A IL14300801 A IL 14300801A IL 143008 A0 IL143008 A0 IL 143008A0
Authority
IL
Israel
Prior art keywords
fabrication
pass filter
integrated circuits
encapsulated mems
mems band
Prior art date
Application number
IL14300801A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IL143008A0 publication Critical patent/IL143008A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Superheterodyne Receivers (AREA)
IL14300801A 2000-06-19 2001-05-07 Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof IL143008A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/596,725 US6262464B1 (en) 2000-06-19 2000-06-19 Encapsulated MEMS brand-pass filter for integrated circuits

Publications (1)

Publication Number Publication Date
IL143008A0 true IL143008A0 (en) 2002-04-21

Family

ID=24388434

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14300801A IL143008A0 (en) 2000-06-19 2001-05-07 Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof

Country Status (14)

Country Link
US (2) US6262464B1 (de)
EP (1) EP1168609B1 (de)
JP (1) JP3823032B2 (de)
KR (1) KR100477392B1 (de)
CN (2) CN1286710C (de)
BR (1) BR0101001B1 (de)
CA (1) CA2344737C (de)
DE (1) DE60138161D1 (de)
HK (1) HK1041678B (de)
IL (1) IL143008A0 (de)
MX (1) MXPA01006272A (de)
MY (1) MY127203A (de)
SG (1) SG91929A1 (de)
TW (1) TW497130B (de)

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CN102820504B (zh) * 2012-09-04 2014-10-15 中国电子科技集团公司第二十六研究所 全密封结构微机械滤波器
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CN114424082A (zh) * 2019-05-30 2022-04-29 弗吉尼亚大学专利基金会 低功率接收器及相关电路
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CN113448458A (zh) * 2020-03-25 2021-09-28 昇佳电子股份有限公司 电容感测电路

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Also Published As

Publication number Publication date
US20010055864A1 (en) 2001-12-27
CN1206156C (zh) 2005-06-15
KR100477392B1 (ko) 2005-03-17
JP3823032B2 (ja) 2006-09-20
BR0101001A (pt) 2002-02-13
EP1168609A2 (de) 2002-01-02
MY127203A (en) 2006-11-30
SG91929A1 (en) 2002-10-15
MXPA01006272A (es) 2003-05-19
TW497130B (en) 2002-08-01
EP1168609B1 (de) 2009-04-01
US6262464B1 (en) 2001-07-17
CA2344737A1 (en) 2001-12-19
CA2344737C (en) 2005-07-19
DE60138161D1 (de) 2009-05-14
KR20010113473A (ko) 2001-12-28
CN1328955A (zh) 2002-01-02
HK1041678B (zh) 2005-12-09
US6399406B2 (en) 2002-06-04
JP2002094328A (ja) 2002-03-29
EP1168609A3 (de) 2002-01-30
HK1041678A1 (en) 2002-07-19
CN1618724A (zh) 2005-05-25
BR0101001B1 (pt) 2014-11-25
CN1286710C (zh) 2006-11-29

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