DE60118085D1 - Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben - Google Patents

Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben

Info

Publication number
DE60118085D1
DE60118085D1 DE60118085T DE60118085T DE60118085D1 DE 60118085 D1 DE60118085 D1 DE 60118085D1 DE 60118085 T DE60118085 T DE 60118085T DE 60118085 T DE60118085 T DE 60118085T DE 60118085 D1 DE60118085 D1 DE 60118085D1
Authority
DE
Germany
Prior art keywords
silicon
making
same
carbide composite
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60118085T
Other languages
English (en)
Other versions
DE60118085T2 (de
Inventor
Yushi Horiuchi
Masahiro Yamaguchi
Jianhui Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000398035A external-priority patent/JP2002201071A/ja
Priority claimed from JP2001084902A external-priority patent/JP2002274948A/ja
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Application granted granted Critical
Publication of DE60118085D1 publication Critical patent/DE60118085D1/de
Publication of DE60118085T2 publication Critical patent/DE60118085T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12528—Semiconductor component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE60118085T 2000-12-27 2001-12-21 Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben Expired - Lifetime DE60118085T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000398035 2000-12-27
JP2000398035A JP2002201071A (ja) 2000-12-27 2000-12-27 炭化ケイ素材の製造方法
JP2001084902A JP2002274948A (ja) 2001-03-23 2001-03-23 半導体熱処理用シリコン−炭化ケイ素複合部材
JP2001084902 2001-03-23

Publications (2)

Publication Number Publication Date
DE60118085D1 true DE60118085D1 (de) 2006-05-11
DE60118085T2 DE60118085T2 (de) 2006-11-02

Family

ID=26606861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60118085T Expired - Lifetime DE60118085T2 (de) 2000-12-27 2001-12-21 Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben

Country Status (3)

Country Link
US (1) US6841273B2 (de)
EP (1) EP1219578B1 (de)
DE (1) DE60118085T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002270614A (ja) * 2001-03-12 2002-09-20 Canon Inc Ｓｏｉ基体、その熱処理方法、それを有する半導体装置およびその製造方法
DE10161108A1 (de) 2001-12-12 2003-06-26 Schunk Kohlenstofftechnik Gmbh Verfahren zur Herstellung eines Keramikbauteils
US20030233977A1 (en) * 2002-06-20 2003-12-25 Yeshwanth Narendar Method for forming semiconductor processing components
US7083771B2 (en) * 2002-07-10 2006-08-01 Advanced Composite Materials Corporation Process for producing silicon carbide fibers essentially devoid of whiskers
US20040009112A1 (en) * 2002-07-10 2004-01-15 Advanced Composite Materials Corporation Silicon carbide fibers essentially devoid of whiskers and method for preparation thereof
TW200511473A (en) * 2003-03-31 2005-03-16 Nippon Oil Co Ltd Dummy wafer
JP2005039212A (ja) * 2003-06-27 2005-02-10 Bridgestone Corp ダミーウェハ及びその製造方法
DE10329822A1 (de) * 2003-06-30 2005-01-27 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung von Keramiken und Bauteil aus einer derartigen Keramik sowie Vorkörper zur Herstellung einer derartigen Keramik
DE10348798A1 (de) * 2003-10-21 2005-06-16 Papiertechnische Stiftung Karbidische und oxidische Keramik und Verfahren zu ihrer Herstellung
US7501370B2 (en) 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
DE102004014092B4 (de) * 2004-03-20 2012-04-19 Viessmann Werke Gmbh & Co Kg Vorrichtung zur Umwandlung von Kohlenwasserstoffgas und Wasserdampf in Wasserstoff und weitere Reformerprodukte
US7799375B2 (en) * 2004-06-30 2010-09-21 Poco Graphite, Inc. Process for the manufacturing of dense silicon carbide
US20060163773A1 (en) * 2005-01-24 2006-07-27 General Electric Company Method for performing silicon melt infiltration of ceramic matrix composites
US20070235450A1 (en) * 2006-03-30 2007-10-11 Advanced Composite Materials Corporation Composite materials and devices comprising single crystal silicon carbide heated by electromagnetic radiation
DE102006032636A1 (de) * 2006-07-13 2008-01-17 Schunk Kohlenstofftechnik Gmbh Verfahren zum Herstellen eines Keramiksubstrats sowie Keramiksubstrat
US20090001219A1 (en) * 2006-12-07 2009-01-01 Honeywell International, Inc. Fiber polymer matrix composites having silicon-containing inorganic-organic matrices and methods of making the same
KR100829759B1 (ko) * 2007-04-04 2008-05-15 삼성에스디아이 주식회사 카바이드 유도 탄소를 이용한 카본나노튜브 혼성체, 이를포함하는 전자 방출원 및 상기 전자 방출원을 구비한 전자방출 소자
WO2009085703A2 (en) 2007-12-20 2009-07-09 Saint-Gobain Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
US9328620B2 (en) * 2013-03-13 2016-05-03 Rolls-Royce Corporation Method for making gas turbine engine composite structure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2131792C3 (de) * 1971-06-26 1979-01-25 Sigri Elektrographit Gmbh, 8901 Meitingen Verfahren zur Herstellung von Kohlenstoffkörpern
FR2143654B1 (de) 1971-06-26 1974-07-26 Sigri Elektrographit Gmbh
JPS4939887A (de) 1972-08-26 1974-04-13
JPS63242969A (ja) 1987-03-30 1988-10-07 株式会社　利根ボ−リング 炭化珪素系セラミツクス
JPH0256307A (ja) 1988-05-24 1990-02-26 Nippon Pipe Conveyor Kenkyusho:Kk パイプコンベヤ
US6051096A (en) 1996-07-11 2000-04-18 Nagle; Dennis C. Carbonized wood and materials formed therefrom
US6024898A (en) * 1996-12-30 2000-02-15 General Electric Company Article and method for making complex shaped preform and silicon carbide composite by melt infiltration
JP3664421B2 (ja) * 1997-11-14 2005-06-29 東芝セラミックス株式会社 シリコン含浸炭化珪素材の製造方法
JP3096716B1 (ja) * 1999-03-01 2000-10-10 工業技術院長 繊維強化炭化ケイ素複合材の製造方法

Also Published As

Publication number Publication date
EP1219578B1 (de) 2006-03-22
DE60118085T2 (de) 2006-11-02
US20020151428A1 (en) 2002-10-17
EP1219578A3 (de) 2004-01-07
US6841273B2 (en) 2005-01-11
EP1219578A2 (de) 2002-07-03

Similar Documents

Publication Publication Date Title
DE60124246D1 (de) Polykristallines silicium und verfahren zur herstellung desselben
DE60118085D1 (de) Silicium/Siliciumkarbid-Komposit und Verfahren zur Herstellung desselben
DE60140736D1 (de) Wabenförmige struktur und verfahren zur herstellung derselben
DE60136884D1 (de) Verfahren zur Herstellung von Siliziumkarbid, sowie Siliziumkarbid, Verbundwerkstoff und Halbleiterbauelement
DE60217785D1 (de) Flasche und Verfahren zur Herstellung derselben
DE60130878D1 (de) Antireflexionsschicht und verfahren zur herstellung
DE69921909D1 (de) Sinterkörper aus Aluminiumnitrid und Verfahren zur Herstellung desselben
DE50113565D1 (de) Optoelektronisches bauelement und verfahren zur herstellung
DE60235798D1 (de) Wabenförmige struktur und verfahren zur herstellung derselben
DE60218549D1 (de) Abriebsbeständiges Siliziumnitridbauteil und Verfahren zur Herstellung des Bauteils
DE60101069D1 (de) Siliziumkarbid und Verfahren zu seiner Herstellung
DE60129815D1 (de) Wabenförmige keramische struktur und verfahren zur herstellung derselben
DE60235690D1 (de) Auf siliciumcarbid basierender poröser körper und verfahren zur herstellung desselben
DE60132554D1 (de) STATORBLECHKöRPER UND VERFAHREN ZUR HERSTELLUNG DESSELBEN
DE69933907D1 (de) Akustischer Resonator und Verfahren zur Herstellung desselben
DE60143831D1 (de) Massgeschneidertes rohteil und verfahren zur herstellung des teiles
DE69921533D1 (de) Schleifwerkzeug und Verfahren zur Herstellung desselben
DE60033924D1 (de) Wasser- und ölabweisende zusammensetzung und verfahren zur herstellung derselben
DE60144416D1 (de) Verfahren zur bestimmung unter welchen konditionen der siliziumeinkristall hergestellt wurde und verfahren zur herstellung des siliziumwafers
DE60119685D1 (de) Komprimierbare schaumbänder und verfahren zur herstellung
DE69705331T2 (de) Poröser Siliciumnitridkörper hoher Festigkeit und Verfahren zur Herstellung desselben
DE60105218D1 (de) Siliciumkarbid und Verfahren zu seiner Herstellung
DE60022818D1 (de) Tastenfolie und Verfahren zur Herstellung derselben
DE60038663D1 (de) Thyristoren und verfahren zur herstellung
DE50213682D1 (de) Verfahren zur herstellung von hydrogen-bis(chelato)boraten und alkalimetall-bis(chelato)boraten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COVALENT MATERIALS CORP., TOKYO, JP