DE60135602D1 - Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters - Google Patents

Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters

Info

Publication number
DE60135602D1
DE60135602D1 DE60135602T DE60135602T DE60135602D1 DE 60135602 D1 DE60135602 D1 DE 60135602D1 DE 60135602 T DE60135602 T DE 60135602T DE 60135602 T DE60135602 T DE 60135602T DE 60135602 D1 DE60135602 D1 DE 60135602D1
Authority
DE
Germany
Prior art keywords
laser beam
reflected laser
speckle pattern
pattern derived
measuring movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60135602T
Other languages
English (en)
Inventor
Kenichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Seiki Seisaku-sho Ltd
Original Assignee
Toyo Seiki Seisaku-sho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Seiki Seisaku-sho Ltd filed Critical Toyo Seiki Seisaku-sho Ltd
Application granted granted Critical
Publication of DE60135602D1 publication Critical patent/DE60135602D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE60135602T 2000-04-26 2001-04-19 Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters Expired - Lifetime DE60135602D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000166833A JP2001304816A (ja) 2000-04-26 2000-04-26 レーザ反射光による粒状斑点模様を利用した移動量測定方式とその装置
EP01109671A EP1152210B1 (de) 2000-04-26 2001-04-19 Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters

Publications (1)

Publication Number Publication Date
DE60135602D1 true DE60135602D1 (de) 2008-10-16

Family

ID=18670091

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60135602T Expired - Lifetime DE60135602D1 (de) 2000-04-26 2001-04-19 Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters

Country Status (5)

Country Link
US (5) US6847910B2 (de)
EP (1) EP1152210B1 (de)
JP (1) JP2001304816A (de)
KR (1) KR100995287B1 (de)
DE (1) DE60135602D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001304816A (ja) * 2000-04-26 2001-10-31 Kenichiro Kobayashi レーザ反射光による粒状斑点模様を利用した移動量測定方式とその装置
JP2002162355A (ja) * 2000-11-27 2002-06-07 Hiroyuki Konno レーザ反射光による粒状斑点模様の直接撮像方法とその装置
KR20030080162A (ko) * 2002-04-06 2003-10-11 김희식 촬상소자 센서를 이용한 실시간 구조물 변위 계측기
US7364081B2 (en) * 2003-12-02 2008-04-29 Hand Held Products, Inc. Method and apparatus for reading under sampled bar code symbols
US7825972B2 (en) * 2004-10-08 2010-11-02 Cooper Allan J Processing method device and system to produce a focused image signal from an unfocused image
CN1300548C (zh) * 2005-03-23 2007-02-14 天津大学 基于共面标定参照物的线结构光传感器快速标定方法
JP4914039B2 (ja) * 2005-07-27 2012-04-11 キヤノン株式会社 情報処理方法および装置
JP2007064864A (ja) * 2005-09-01 2007-03-15 Toyo Seiki Seisakusho:Kk 歪み計測方法、歪み計測装置
JP2007170955A (ja) * 2005-12-21 2007-07-05 Nagasaki Univ 変位/ひずみ計測方法及び変位/ひずみ計測装置
FI20065063A0 (fi) * 2006-01-30 2006-01-30 Visicamet Oy Menetelmä ja mittalaite mitata pinnan siirtymä
JP2008304190A (ja) * 2007-06-05 2008-12-18 Toyo Seiki Seisakusho:Kk レーザ反射光による被計測物の高精度変位計測方法とその装置
US9344736B2 (en) 2010-09-30 2016-05-17 Alcatel Lucent Systems and methods for compressive sense imaging
US20130201297A1 (en) * 2012-02-07 2013-08-08 Alcatel-Lucent Usa Inc. Lensless compressive image acquisition
KR102107345B1 (ko) 2019-12-11 2020-05-06 조성민 코킹 및 궤적연습용 골프 스윙 연습기
CN111856480B (zh) * 2020-07-29 2023-11-10 南京工程学院 一种设备位移快速检测方法及检测系统
CN111854623B (zh) * 2020-07-29 2022-02-11 南京工程学院 一种物体微小形变的快速检测方法及检测系统
KR20240028826A (ko) 2022-08-25 2024-03-05 (주)디엠비에이치 2개의 imu센서를 이용한 스윙연습기

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5219557Y2 (de) * 1971-03-31 1977-05-06
US4591996A (en) * 1981-05-18 1986-05-27 Vachon Reginald I Apparatus and method for determining stress and strain in pipes, pressure vessels, structural members and other deformable bodies
US4621063A (en) 1982-10-12 1986-11-04 The Center For Immunological Studies Methods for the detection and quantitation of immunological substances
US4794384A (en) 1984-09-27 1988-12-27 Xerox Corporation Optical translator device
US4798469A (en) * 1985-10-02 1989-01-17 Burke Victor B Noncontact gage system utilizing reflected light
US4824250A (en) * 1986-11-17 1989-04-25 Newman John W Non-destructive testing by laser scanning
JPH0421255A (ja) * 1990-05-16 1992-01-24 Canon Inc カラー画像読取装置
JPH05288516A (ja) * 1992-04-07 1993-11-02 Honda Motor Co Ltd 非接触式位置検出装置
JP2519375B2 (ja) * 1992-08-18 1996-07-31 新日本製鐵株式会社 レ―ザ距離計を用いた厚さ測定装置
FR2701762B1 (fr) 1993-02-19 1995-05-24 Centre Nat Etd Spatiales Dispositif de restitution d'orbite de corps célestes, notamment de satellites artificiels, par écartométrie.
US5343287A (en) 1993-04-05 1994-08-30 The United States Of America As Represented By The Secretary Of The Air Force Integrated atmospheric transverse coherence length/laser radiation angle-of-arrival measurement system
JP2681745B2 (ja) * 1993-10-08 1997-11-26 岸本産業株式会社 レーザ光を利用したスペックルパターンによる被計測物の上下および横移動量の測定方法。
US6097477A (en) * 1994-05-27 2000-08-01 American Research Corporation Of Virginia Laser speckle strain and deformation sensor using linear array image cross-correlation method for specifically arranged triple-beam triple-camera configuration
US5633714A (en) * 1994-12-19 1997-05-27 International Business Machines Corporation Preprocessing of image amplitude and phase data for CD and OL measurement
JP3029238B2 (ja) * 1995-08-08 2000-04-04 岸本産業株式会社 レーザ光を用いた被計測物の遠近方向の移動量測定方法
US5694480A (en) * 1995-08-30 1997-12-02 Tsukishima Kikai Co., Ltd. Molten slag flow rate measuring device and furnace facilities using the same
SG52900A1 (en) * 1996-01-08 1998-09-28 Matsushita Electric Ind Co Ltd Mounting apparatus of electronic components and mounting methods of the same
DE19620419A1 (de) * 1996-05-21 1997-11-27 Ettemeyer Gmbh & Co Mes Und Pr Verfahren zur berührungslosen und markierungsfreien Messung von Verschiebungen
DE19739679A1 (de) 1996-09-18 1998-10-01 Univ Ilmenau Tech Streulichtsensor
EP2295988A2 (de) * 1996-12-31 2011-03-16 High Throughput Genomics, Inc. Multiplex-Analysevorrichtung zur Analyse von Molekülen und zugehöriges Herstellungsverfahren
DE69806952T2 (de) * 1997-05-16 2002-11-21 Forskningsct Riso Roskilde Speckle verfahren und apparatur zur bestimmung von winkelverschiebung, oberflächenverschiebung und torsion
JP3867389B2 (ja) 1998-03-05 2007-01-10 フジノン株式会社 カメラのエクステンダー装置
US6424407B1 (en) * 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JP2961413B1 (ja) * 1998-04-16 1999-10-12 岸本産業株式会社 レーザ投影法による計測器から被計測物までの非接触による前後移動距離計測方法
DE19817664A1 (de) 1998-04-21 1999-11-04 Peter Lehmann Verfahren und Vorrichtung zur Rauheitsmessung an technischen Oberflächen bei Beleuchtung mit einem Specklemuster
KR100296668B1 (ko) * 1998-06-01 2001-10-26 윤종용 웨이퍼검사장비및이를이용한웨이퍼검사방법
US6262818B1 (en) * 1998-10-07 2001-07-17 Institute Of Applied Optics, Swiss Federal Institute Of Technology Method for simultaneous amplitude and quantitative phase contrast imaging by numerical reconstruction of digital holograms
JP2001304816A (ja) 2000-04-26 2001-10-31 Kenichiro Kobayashi レーザ反射光による粒状斑点模様を利用した移動量測定方式とその装置

Also Published As

Publication number Publication date
US7165007B2 (en) 2007-01-16
EP1152210A2 (de) 2001-11-07
US7257510B2 (en) 2007-08-14
JP2001304816A (ja) 2001-10-31
EP1152210A3 (de) 2002-06-12
US20050049817A1 (en) 2005-03-03
EP1152210B1 (de) 2008-09-03
US20050137820A1 (en) 2005-06-23
US20060293865A1 (en) 2006-12-28
US6847910B2 (en) 2005-01-25
KR100995287B1 (ko) 2010-11-22
US20020080264A1 (en) 2002-06-27
US20010037184A1 (en) 2001-11-01
KR20010098733A (ko) 2001-11-08

Similar Documents

Publication Publication Date Title
DE60135602D1 (de) Verfahren und Vorrichtung zur Bewegungsmessung unter Verwendung eines von einem reflektierten Laserstrahl stammenden körnigen Fleckenmusters
DE602004022900D1 (de) Verfahren und Vorrichtung zur optischen Zielverfolgung unter Verwendung von einer Triangulationstechnik
DE60128659D1 (de) Verfahren zur reparatur von lithographischen masken unter verwendung eines strahls geladener teilchen
DE60036443D1 (de) Verfahren und Vorrichtung zur Inspektion eines Retikels unter Verwendung von Luftbildern
DE59502439D1 (de) Verfahren und vorrichtung zum kalibrieren einer steuerung zur ablenkung eines laserstrahls
DE69714799D1 (de) Vorrichtung und Verfahren zur Ablenkung eines Laserstrahles mittels eines einzelnen Spiegels
DE60218174D1 (de) Verfahren und vorrichtung zur erzeugung eines fokussierten lichtstrahls
DE60114453D1 (de) Verfahren und vorrichtung zur herstellung eines dreidimensionalen metallteils unter verwendung von hochtemperatur-direktlaserschmelzen
DE50005174D1 (de) Verfahren zur erzeugung definiert konischer löcher mittels eines laserstrahls
DE60040363D1 (de) Vorrichtung und Verfahren zur In-Situ-Metrologie einer Projektionsoptik
DE59610463D1 (de) Vorrichtung zur materialabtragung von einem werkstück mittels laserbestrahlung
DE50304789D1 (de) Verfahren zur bestimmung der fokuslage eines laserstrahls
DE59912424D1 (de) Verfahren und Vorrichtung zur Justierung eines Strahlenganges eines strahlaussendenden Sensors
DE60215075D1 (de) Verfahren und Vorrichtung zur Erzeugung eines Sprühmusters von einem Kraftstoffeinspritzventil
DE69929976D1 (de) Verfahren zur auswahl eines synchronisationsmusters aus einem testsignal
DE50105000D1 (de) Verfahren und vorrichtung zur regelung eines lasers
DE60027531D1 (de) Verfahren und Vorrichtung zur Schlüsselverteilung unter Verwendung eines Basisschlüssels
DE69915449D1 (de) Verfahren zur bestimmunng von parametern eines statistischen sprachmodells
DE10084493T1 (de) Vorrichtung und Verfahren zur gesteuerten Anregung eines Servomechanismus
DE50014039D1 (de) Verfahren und Vorrichtung zum Ausrichten eines von einem Rotationslaser erzeugten Lichtstrahls
DE60120027D1 (de) Vorrichtung und Verfahren zur Bestimmung der Position eines beweglichen Körpers unter Verwendung von Ultraschallwellen
DE60132393D1 (de) Verfahren und Vorrichtung zum Giessen von Metallgegenständen unter Verwendung eines Fliessbettes
DE69626197T2 (de) Verfahren zur beurteilung des profilmusters eines reifens
DE59912912D1 (de) Verfahren und Vorrichtung zur Formung eines kollimierten Lichtstrahls aus den Emissionen mehrerer Lichtquellen
DE60326521D1 (de) Verfahren und Vorrichtung zur Messung der magnetischen Schreibweite eines Magnetkopfes unter Verwendung eines Burstmusters

Legal Events

Date Code Title Description
8364 No opposition during term of opposition