DE60132320D1 - Verfahren, system und vorrichtung zur präzisen positionierung und ausrichtung einer linse in einem optischen system - Google Patents

Verfahren, system und vorrichtung zur präzisen positionierung und ausrichtung einer linse in einem optischen system

Info

Publication number
DE60132320D1
DE60132320D1 DE60132320T DE60132320T DE60132320D1 DE 60132320 D1 DE60132320 D1 DE 60132320D1 DE 60132320 T DE60132320 T DE 60132320T DE 60132320 T DE60132320 T DE 60132320T DE 60132320 D1 DE60132320 D1 DE 60132320D1
Authority
DE
Germany
Prior art keywords
lens
orientation
precisely positioning
optical system
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60132320T
Other languages
English (en)
Other versions
DE60132320T2 (de
Inventor
Michael F Meehan
David G Taub
Daniel N Galburt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of DE60132320D1 publication Critical patent/DE60132320D1/de
Application granted granted Critical
Publication of DE60132320T2 publication Critical patent/DE60132320T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
DE60132320T 2000-04-25 2001-04-25 Verfahren, system und vorrichtung zur präzisen positionierung und ausrichtung einer linse in einem optischen system Expired - Fee Related DE60132320T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US19939300P 2000-04-25 2000-04-25
US199393P 2000-04-25
PCT/US2001/013140 WO2001081970A2 (en) 2000-04-25 2001-04-25 Apparatus, system, and method for precision positioning and alignment of a lens in an optical system

Publications (2)

Publication Number Publication Date
DE60132320D1 true DE60132320D1 (de) 2008-02-21
DE60132320T2 DE60132320T2 (de) 2008-05-08

Family

ID=22737319

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60132320T Expired - Fee Related DE60132320T2 (de) 2000-04-25 2001-04-25 Verfahren, system und vorrichtung zur präzisen positionierung und ausrichtung einer linse in einem optischen system

Country Status (7)

Country Link
US (2) US6556364B2 (de)
EP (1) EP1277071B1 (de)
JP (1) JP2003532136A (de)
KR (1) KR100714927B1 (de)
AU (1) AU2001253783A1 (de)
DE (1) DE60132320T2 (de)
WO (1) WO2001081970A2 (de)

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JP2004347814A (ja) * 2003-05-21 2004-12-09 Canon Inc 保持装置、露光装置及びデバイス製造方法
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US7722747B2 (en) * 2003-10-22 2010-05-25 Nexx Systems, Inc. Method and apparatus for fluid processing a workpiece
US7545481B2 (en) * 2003-11-24 2009-06-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20050286050A1 (en) * 2004-06-29 2005-12-29 Nikon Corporation Real-time through lens image measurement system and method
JP4582306B2 (ja) * 2004-11-30 2010-11-17 株式会社ニコン 光学系及び露光装置
US7324185B2 (en) 2005-03-04 2008-01-29 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8248577B2 (en) 2005-05-03 2012-08-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7715129B2 (en) * 2005-07-29 2010-05-11 Flextronics Ap, Llc Method for aligning and assembling two lens pieces, and a machine to accomplish this task
US7590505B2 (en) * 2005-09-08 2009-09-15 Flextronics Ap, Llc Manufacturable micropositioning system employing sensor target
US7531773B2 (en) 2005-09-08 2009-05-12 Flextronics Ap, Llc Auto-focus and zoom module having a lead screw with its rotation results in translation of an optics group
US7573011B2 (en) 2005-09-08 2009-08-11 Flextronics Ap, Llc Zoom module using actuator and lead screw with translating operation
WO2008027576A1 (en) 2006-08-31 2008-03-06 Flextronics Ap, Llc Discreetly positionable camera housing
EP1901101A1 (de) * 2006-09-14 2008-03-19 Carl Zeiss SMT AG Optische Elementeinheit und Verfahren zum Stützen eines optischen Elements
US7580209B2 (en) 2006-09-15 2009-08-25 Flextronics Ap, Llc Auto-focus and zoom module with vibrational actuator and position sensing method
CA2685080A1 (en) 2007-04-24 2008-11-06 Flextronics Ap Llc Small form factor modules using wafer level optics with bottom cavity and flip-chip assembly
US8083421B2 (en) * 2007-05-07 2011-12-27 Flextronics Ap, Llc AF/zoom shutter with two blades function
JP2010527030A (ja) * 2007-05-07 2010-08-05 フレクストロニクス エーピー，リミテッド ライアビリティ カンパニー 小型カメラシャッタモジュール及びその製造方法
US7825985B2 (en) * 2007-07-19 2010-11-02 Flextronics Ap, Llc Camera module back-focal length adjustment method and ultra compact components packaging
US8488046B2 (en) * 2007-12-27 2013-07-16 Digitaloptics Corporation Configurable tele wide module
DE102008032853A1 (de) 2008-07-14 2010-01-21 Carl Zeiss Smt Ag Optische Einrichtung mit einem deformierbaren optischen Element
DE102008034285A1 (de) 2008-07-22 2010-02-04 Carl Zeiss Smt Ag Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie
DE102009005954B4 (de) * 2009-01-20 2010-10-21 Carl Zeiss Smt Ag Dämpfungsvorrichtung
GB0918453D0 (en) * 2009-10-21 2009-12-09 Selexsensors And Airborne Syst Imaging device
US8702080B2 (en) * 2010-05-18 2014-04-22 Lawrence Livermore National Security, Llc Method and system for dual resolution translation stage
US8917963B2 (en) 2010-05-21 2014-12-23 Kaiam Corp. MEMS-based levers and their use for alignment of optical elements
US8545114B2 (en) 2011-03-11 2013-10-01 Digitaloptics Corporation Auto focus-zoom actuator or camera module contamination reduction feature with integrated protective membrane
US8982267B2 (en) 2011-07-27 2015-03-17 Flextronics Ap, Llc Camera module with particle trap
CN102565983B (zh) * 2011-11-18 2014-08-20 中国科学院光电技术研究所 一种动镜轴向微调装置
CN102565991B (zh) * 2012-02-14 2014-04-02 海信集团有限公司 一种镜片调节装置
EP2679551A1 (de) 2012-06-28 2014-01-01 Corning Incorporated Verfahren und System zur Feinabstimmung des Glastafel-Präzisionsbiegens
DE102014209147A1 (de) * 2014-05-14 2015-11-19 Carl Zeiss Smt Gmbh Optisches Modul
JP6730197B2 (ja) 2014-05-14 2020-07-29 カール・ツァイス・エスエムティー・ゲーエムベーハー ニアフィールドマニピュレータを有する投影露光装置
CN104238065B (zh) * 2014-08-27 2016-06-15 中国科学院长春光学精密机械与物理研究所 一种用于光刻投影物镜中可动机构的锁紧装置
KR101758971B1 (ko) 2015-03-17 2017-07-18 방진식 광학 렌즈 및 기구물 위치 정밀 정렬장치
CN105071200B (zh) * 2015-09-24 2018-10-26 江苏卓远激光科技有限公司 一种激光器镜片固定座活动安装结构
US10095089B2 (en) 2016-05-17 2018-10-09 Raytheon Company Lens mount assembly
FR3057434B1 (fr) * 2016-10-11 2018-11-02 Aptiv Technologies Limited Dispositif de camera comportant un systeme d'alignement avec un capteur d'image
DE102017200635A1 (de) * 2017-01-17 2018-07-19 Carl Zeiss Smt Gmbh Optische Anordnung, insbesondere Lithographiesystem
US11175595B2 (en) * 2017-03-21 2021-11-16 Carl Zeiss Smt Gmbh Method for localizing assembly errors
CN107991747B (zh) * 2017-09-15 2024-03-19 北京仿真中心 一种光学系统无热化机械装置
CN109917559A (zh) * 2017-12-13 2019-06-21 长光华大基因测序设备（长春）有限公司 高精度光学镜头偏心调整结构及方法
GB201804952D0 (en) * 2018-03-27 2018-05-09 Pxyl Ltd Improved scanning optical microscope
JP2023032241A (ja) * 2021-08-26 2023-03-09 キヤノン株式会社 駆動装置、露光装置および物品製造方法
WO2023091322A1 (en) * 2021-11-16 2023-05-25 Kokanee Research Llc Tunable lens controlled by an actuator
DE102023206344A1 (de) 2023-07-04 2024-06-06 Carl Zeiss Smt Gmbh Optisches system und projektionsbelichtungsanlage

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Also Published As

Publication number Publication date
WO2001081970A2 (en) 2001-11-01
EP1277071B1 (de) 2008-01-09
US20010033437A1 (en) 2001-10-25
JP2003532136A (ja) 2003-10-28
EP1277071A2 (de) 2003-01-22
WO2001081970A3 (en) 2002-07-25
KR20020065343A (ko) 2002-08-13
KR100714927B1 (ko) 2007-05-07
US20030202260A1 (en) 2003-10-30
DE60132320T2 (de) 2008-05-08
US6760167B2 (en) 2004-07-06
US6556364B2 (en) 2003-04-29
AU2001253783A1 (en) 2001-11-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee