DE60131961D1 - Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung - Google Patents

Verfahren zur abbildungsmessung, abbildungsmesseinrichtung und verwendung gemessener informationen bei der prozesssteuerung

Info

Publication number
DE60131961D1
DE60131961D1 DE60131961T DE60131961T DE60131961D1 DE 60131961 D1 DE60131961 D1 DE 60131961D1 DE 60131961 T DE60131961 T DE 60131961T DE 60131961 T DE60131961 T DE 60131961T DE 60131961 D1 DE60131961 D1 DE 60131961D1
Authority
DE
Germany
Prior art keywords
target
imaging
detector
filter
screen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60131961T
Other languages
English (en)
Other versions
DE60131961T2 (de
Inventor
Esa Haemaelaeinen
Juha Vattulainen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oseir Oy
Original Assignee
Oseir Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oseir Oy filed Critical Oseir Oy
Publication of DE60131961D1 publication Critical patent/DE60131961D1/de
Application granted granted Critical
Publication of DE60131961T2 publication Critical patent/DE60131961T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measurement Of Radiation (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Radiation Pyrometers (AREA)
DE60131961T 2000-03-31 2001-03-30 Verfahren zur bildgebenden Messung, bildgebende Messeinrichtung und Verwendung gemessener Informationen bei der Verfahrenssteuerung Expired - Lifetime DE60131961T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20000737A FI111192B (fi) 2000-03-31 2000-03-31 Menetelmä kuvantavaan mittaukseen, kuvantava mittalaite ja mitatun informaation käyttö prosessin valvonnassa
FI20000737 2000-03-31
PCT/FI2001/000313 WO2001073384A1 (en) 2000-03-31 2001-03-30 Method for imaging measurement, imaging measuring device and use of measured information in process control

Publications (2)

Publication Number Publication Date
DE60131961D1 true DE60131961D1 (de) 2008-01-31
DE60131961T2 DE60131961T2 (de) 2008-12-04

Family

ID=8558062

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60131961T Expired - Lifetime DE60131961T2 (de) 2000-03-31 2001-03-30 Verfahren zur bildgebenden Messung, bildgebende Messeinrichtung und Verwendung gemessener Informationen bei der Verfahrenssteuerung

Country Status (9)

Country Link
US (1) US6927856B2 (de)
EP (1) EP1281052B1 (de)
JP (1) JP2003529066A (de)
CN (1) CN1432126A (de)
AT (1) ATE381709T1 (de)
AU (1) AU2001252288A1 (de)
DE (1) DE60131961T2 (de)
FI (1) FI111192B (de)
WO (1) WO2001073384A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1329860B1 (de) * 2002-01-11 2006-11-08 Hochiki Corporation Vorrichtung zur Flammenerkennung
WO2005115737A2 (en) * 2004-03-22 2005-12-08 Quantaspec Inc. System and method for detecting and identifying an analyte
US20070177650A1 (en) * 2006-01-31 2007-08-02 Diamond Power International, Inc. Two-color flame imaging pyrometer
FI119708B (fi) * 2006-02-01 2009-02-13 Viconsys Oy Laite rainan tarkkailemiseksi
US20070196005A1 (en) * 2006-02-23 2007-08-23 White Christopher A Feature Tracing Process for M-mode Images
DE102006028204A1 (de) * 2006-06-20 2007-12-27 Mtu Aero Engines Gmbh Verfahren zur Beschichtung eines Werkstücks
US9795285B2 (en) * 2011-07-07 2017-10-24 Boston Scientific Scimed, Inc. Imaging system for endoscope
DE102013225676B4 (de) * 2012-12-17 2018-06-07 pmdtechnologies ag Lichtlaufzeitkamera mit einer Bewegungserkennung
GB2516078A (en) * 2013-07-10 2015-01-14 Trinean Nv Shaped filter for spectrometer detector arrays
US11573124B2 (en) 2016-04-14 2023-02-07 National University Corporation Hokkaido University Computer storage medium, network system for distributing spectral camera control program and spectral image capturing method using spectral camera control device
JP6321895B2 (ja) 2016-04-14 2018-05-09 国立大学法人北海道大学 スペクトルカメラ制御装置、スペクトルカメラ制御プログラム、スペクトルカメラ制御システム、このシステムを搭載した飛行体およびスペクトル画像撮像方法
KR102375624B1 (ko) * 2017-11-10 2022-03-17 세메스 주식회사 기판 처리 장치 및 약액 검사 방법
US10837897B2 (en) * 2018-01-09 2020-11-17 Shahid Abbas HAIDER System, method and apparatus for measuring polarization using spatially-varying polarization beams
US11986845B2 (en) 2019-06-24 2024-05-21 Oseir Oy Method and apparatus for controlling cold spraying
US20230336846A1 (en) * 2022-04-19 2023-10-19 United States Of America As Represented By The Administrator Of Nasa Methods and Apparatus for Multi-Spectral Imaging Pyrometer Utilizing Tunable Optics

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4346992A (en) * 1969-02-07 1982-08-31 Sanders Associates, Inc. Laser detector and spectral analyzer
US4222663A (en) * 1977-08-01 1980-09-16 United Technologies Corporation Optical pyrometer and technique for temperature measurement
US4413324A (en) * 1981-02-25 1983-11-01 Sumitomo Kinzoku Kogyo Kabushiki Kaisha Temperature pattern measuring method and a device therefor
US5225883A (en) 1991-06-05 1993-07-06 The Babcock & Wilcox Company Video temperature monitor
JPH07301569A (ja) 1994-05-06 1995-11-14 Tetsudo Kizai Kogyo Kk ２つのフィルタを使用した赤外線温度画像処理方法及び装置
DE4422861C2 (de) 1994-06-30 1996-05-09 Honeywell Ag Vorrichtung zur Bestimmung von Materialeigenschaften von bewegtem blattförmigem Material
US5822222A (en) * 1995-04-05 1998-10-13 New Jersey Institute Of Technology Multi-wavelength imaging pyrometer
US5963311A (en) 1997-09-12 1999-10-05 Stratonics, Inc. Surface and particle imaging pyrometer and method of use
US6357910B1 (en) * 1999-08-04 2002-03-19 Photosonic, Inc. Multiwavelength pyrometer for measurement in hostile environments

Also Published As

Publication number Publication date
US6927856B2 (en) 2005-08-09
EP1281052B1 (de) 2007-12-19
AU2001252288A1 (en) 2001-10-08
WO2001073384A1 (en) 2001-10-04
FI20000737A (fi) 2001-10-01
US20030038944A1 (en) 2003-02-27
JP2003529066A (ja) 2003-09-30
FI111192B (fi) 2003-06-13
FI20000737A0 (fi) 2000-03-31
CN1432126A (zh) 2003-07-23
EP1281052A1 (de) 2003-02-05
DE60131961T2 (de) 2008-12-04
ATE381709T1 (de) 2008-01-15

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