DE60114086D1 - Optisches Beugungselement und damit ausgestattetes optisches System - Google Patents

Optisches Beugungselement und damit ausgestattetes optisches System

Info

Publication number
DE60114086D1
DE60114086D1 DE60114086T DE60114086T DE60114086D1 DE 60114086 D1 DE60114086 D1 DE 60114086D1 DE 60114086 T DE60114086 T DE 60114086T DE 60114086 T DE60114086 T DE 60114086T DE 60114086 D1 DE60114086 D1 DE 60114086D1
Authority
DE
Germany
Prior art keywords
optical
diffraction element
system equipped
equipped therewith
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60114086T
Other languages
English (en)
Other versions
DE60114086T2 (de
Inventor
Takehiko Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60114086D1 publication Critical patent/DE60114086D1/de
Publication of DE60114086T2 publication Critical patent/DE60114086T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4261—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element with major polarization dependent properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Projection Apparatus (AREA)
DE60114086T 2000-05-31 2001-05-30 Optisches Beugungselement und damit ausgestattetes optisches System Expired - Lifetime DE60114086T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000162572 2000-05-31
JP2000162572A JP2001343512A (ja) 2000-05-31 2000-05-31 回折光学素子及びそれを有する光学系

Publications (2)

Publication Number Publication Date
DE60114086D1 true DE60114086D1 (de) 2006-03-02
DE60114086T2 DE60114086T2 (de) 2006-05-24

Family

ID=18666455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60114086T Expired - Lifetime DE60114086T2 (de) 2000-05-31 2001-05-30 Optisches Beugungselement und damit ausgestattetes optisches System

Country Status (4)

Country Link
US (1) US7075722B2 (de)
EP (1) EP1160589B1 (de)
JP (1) JP2001343512A (de)
DE (1) DE60114086T2 (de)

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US6747785B2 (en) * 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
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DE10322238B4 (de) 2003-05-17 2007-10-31 Carl Zeiss Smt Ag Diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
DE10322239B4 (de) * 2003-05-17 2011-06-30 Carl Zeiss SMT GmbH, 73447 Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
DE10324468B4 (de) * 2003-05-30 2006-11-09 Carl Zeiss Smt Ag Mikrolithografische Projektionsbelichtungsanlage, Projektionsobjektiv hierfür sowie darin enthaltenes optisches Element
US7239448B2 (en) * 2003-10-27 2007-07-03 Matsushita Electric Industrial Co., Ltd Light quantity distribution control element and optical apparatus using the same
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JP4951209B2 (ja) * 2004-03-31 2012-06-13 パナソニック株式会社 色分離装置及び撮像装置
JP2005322849A (ja) * 2004-05-11 2005-11-17 Nec Compound Semiconductor Devices Ltd 半導体レーザおよびその製造方法
US20060001969A1 (en) * 2004-07-02 2006-01-05 Nanoopto Corporation Gratings, related optical devices and systems, and methods of making such gratings
WO2006008666A1 (en) * 2004-07-13 2006-01-26 Koninklijke Philips Electronics N.V. Polarizing device
DE102004040535A1 (de) * 2004-08-20 2006-02-23 Carl Zeiss Ag Polarisationsselektiv geblazetes diffraktives optisches Element
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DE102006012034A1 (de) * 2006-03-14 2007-09-20 Carl Zeiss Smt Ag Optisches System, insbesondere in einer Beleuchtungseinrichtung einer Projektionsbelichtungsanlage
JP2007328096A (ja) * 2006-06-07 2007-12-20 Ricoh Co Ltd 回折光学素子とその作製方法および光学モジュール
JP5024859B2 (ja) * 2006-06-14 2012-09-12 株式会社リコー 画像表示装置
DE102006035022A1 (de) * 2006-07-28 2008-01-31 Carl Zeiss Smt Ag Verfahren zum Herstellen einer optischen Komponente, Interferometeranordnung und Beugungsgitter
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
EP2118693A4 (de) * 2007-02-23 2011-08-10 Nanocomp Ltd Verfahren zum entwurf einer beugungsgitterstruktur und beugungsgitterstruktur
US20080316599A1 (en) * 2007-06-22 2008-12-25 Bin Wang Reflection-Repressed Wire-Grid Polarizer
US8493658B2 (en) * 2007-07-06 2013-07-23 Semiconductor Energy Laboratory Co., Ltd. Polarizer and display device including polarizer
WO2009006919A1 (en) 2007-07-09 2009-01-15 Carl Zeiss Smt Ag Method of measuring a deviation an optical surface from a target shape
DE102007044994A1 (de) * 2007-09-20 2009-04-09 Carl Zeiss Ag Binär geblazetes diffraktives optisches Element
JP2009103915A (ja) * 2007-10-23 2009-05-14 Fuji Xerox Co Ltd 光導波路フィルム及びその製造方法、並びに、光送受信モジュール
JP4535121B2 (ja) * 2007-11-28 2010-09-01 セイコーエプソン株式会社 光学素子及びその製造方法、液晶装置、電子機器
JP5391670B2 (ja) * 2007-12-27 2014-01-15 セイコーエプソン株式会社 微細構造体の製造方法
DE102008005817A1 (de) * 2008-01-24 2009-07-30 Carl Zeiss Ag Optisches Anzeigegerät
JP4968234B2 (ja) * 2008-10-21 2012-07-04 セイコーエプソン株式会社 光学素子及び表示装置
US20100103517A1 (en) * 2008-10-29 2010-04-29 Mark Alan Davis Segmented film deposition
GB0821872D0 (en) * 2008-12-01 2009-01-07 Optaglio Sro Optical device offering multiple pattern switch and/or colour effect and method of manufacture
JP5218079B2 (ja) 2009-01-15 2013-06-26 株式会社リコー 光学素子、光ピックアップ、光情報処理装置、光減衰器、偏光変換素子、プロジェクタ光学系、光学機器
JP2010164752A (ja) * 2009-01-15 2010-07-29 Ricoh Co Ltd 光学素子、光ピックアップ、光情報処理装置、光減衰器、偏光変換素子、プロジェクタ光学系、光学機器
US8248696B2 (en) 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser
JP5604860B2 (ja) * 2009-12-16 2014-10-15 凸版印刷株式会社 偽造防止用紙
JP5188524B2 (ja) * 2010-03-05 2013-04-24 キヤノン株式会社 偏光分離素子
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
JP5632760B2 (ja) * 2011-01-20 2014-11-26 日本板硝子株式会社 無機偏光ブレーズド回折格子
KR20140031909A (ko) * 2011-04-28 2014-03-13 바스프 에스이 태양광 관리용 ir 반사체
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
AU2011100725B4 (en) * 2011-06-17 2011-09-22 Innovia Security Pty Ltd Diffraction grating
DE102011084055B4 (de) * 2011-10-05 2015-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer filter mit einem resonanten wellenleitergitter
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DE102014219663A1 (de) * 2014-09-29 2016-03-31 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Photonisch integrierter Chip, optisches Bauelement mit photonisch integriertem Chip und Verfahren zu deren Herstellung
KR102326522B1 (ko) * 2016-10-18 2021-11-12 몰레큘러 임프린츠 인코퍼레이티드 구조물들의 마이크로리소그래픽 제작
CN107179576B (zh) * 2017-06-05 2019-08-23 苏州大学 一种可见光波段的渐变相位金属光栅
US11067726B2 (en) 2018-04-23 2021-07-20 Facebook Technologies, Llc Gratings with variable depths for waveguide displays
US10732351B2 (en) 2018-04-23 2020-08-04 Facebook Technologies, Llc Gratings with variable depths formed using planarization for waveguide displays
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CN109459865B (zh) * 2018-11-20 2024-03-26 成都航空职业技术学院 一种3d显示装置
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Also Published As

Publication number Publication date
DE60114086T2 (de) 2006-05-24
EP1160589B1 (de) 2005-10-19
JP2001343512A (ja) 2001-12-14
US7075722B2 (en) 2006-07-11
US20020003661A1 (en) 2002-01-10
EP1160589A1 (de) 2001-12-05

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