DE60111496D1 - Teilchenstrahl-Raster-Spiegelmikroskop - Google Patents

Teilchenstrahl-Raster-Spiegelmikroskop

Info

Publication number
DE60111496D1
DE60111496D1 DE60111496T DE60111496T DE60111496D1 DE 60111496 D1 DE60111496 D1 DE 60111496D1 DE 60111496 T DE60111496 T DE 60111496T DE 60111496 T DE60111496 T DE 60111496T DE 60111496 D1 DE60111496 D1 DE 60111496D1
Authority
DE
Germany
Prior art keywords
particle beam
beam scanning
scanning mirror
mirror microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60111496T
Other languages
English (en)
Other versions
DE60111496T2 (de
Inventor
Dr Frosien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Application granted granted Critical
Publication of DE60111496D1 publication Critical patent/DE60111496D1/de
Publication of DE60111496T2 publication Critical patent/DE60111496T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H01J37/292—Reflection microscopes using scanning ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H01J2237/0475—Changing particle velocity decelerating
    • H01J2237/04756—Changing particle velocity decelerating with electrostatic means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE60111496T 2001-04-24 2001-04-24 Rasterteilchenspiegelmikroskop Expired - Fee Related DE60111496T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01109943A EP1255278B1 (de) 2001-04-24 2001-04-24 Teilchenstrahl-Raster-Spiegelmikroskop

Publications (2)

Publication Number Publication Date
DE60111496D1 true DE60111496D1 (de) 2005-07-21
DE60111496T2 DE60111496T2 (de) 2005-12-15

Family

ID=8177217

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60111496T Expired - Fee Related DE60111496T2 (de) 2001-04-24 2001-04-24 Rasterteilchenspiegelmikroskop

Country Status (4)

Country Link
US (1) US20030020016A1 (de)
EP (1) EP1255278B1 (de)
JP (1) JP2003022775A (de)
DE (1) DE60111496T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138629B2 (en) 2003-04-22 2006-11-21 Ebara Corporation Testing apparatus using charged particles and device manufacturing method using the testing apparatus
JP2004363085A (ja) * 2003-05-09 2004-12-24 Ebara Corp 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法
CN101630623B (zh) * 2003-05-09 2012-02-22 株式会社荏原制作所 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法
DE602004021750D1 (de) * 2003-07-14 2009-08-13 Fei Co Zweistrahlsystem
JP4316394B2 (ja) * 2004-01-21 2009-08-19 株式会社東芝 荷電ビーム装置
EP2088614B1 (de) * 2008-02-08 2010-12-15 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Strahlstromkalibriersystem
JP5702552B2 (ja) * 2009-05-28 2015-04-15 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ デュアルビームシステムの制御方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7100609A (de) * 1970-02-07 1971-08-10

Also Published As

Publication number Publication date
DE60111496T2 (de) 2005-12-15
JP2003022775A (ja) 2003-01-24
US20030020016A1 (en) 2003-01-30
EP1255278A1 (de) 2002-11-06
EP1255278B1 (de) 2005-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee