DE60110149D1 - Testkopf für Mikrostrukturen - Google Patents
Testkopf für MikrostrukturenInfo
- Publication number
- DE60110149D1 DE60110149D1 DE60110149T DE60110149T DE60110149D1 DE 60110149 D1 DE60110149 D1 DE 60110149D1 DE 60110149 T DE60110149 T DE 60110149T DE 60110149 T DE60110149 T DE 60110149T DE 60110149 D1 DE60110149 D1 DE 60110149D1
- Authority
- DE
- Germany
- Prior art keywords
- microstructures
- test head
- test
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/0675—Needle-like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI001045A IT1317517B1 (it) | 2000-05-11 | 2000-05-11 | Testa di misura per microstrutture |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60110149D1 true DE60110149D1 (de) | 2005-05-25 |
Family
ID=11445027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60110149T Expired - Fee Related DE60110149D1 (de) | 2000-05-11 | 2001-05-10 | Testkopf für Mikrostrukturen |
Country Status (4)
Country | Link |
---|---|
US (1) | US6515496B2 (de) |
EP (1) | EP1154276B8 (de) |
DE (1) | DE60110149D1 (de) |
IT (1) | IT1317517B1 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20010567A1 (it) * | 2001-03-19 | 2002-09-19 | Technoprobe S R L | Testa di misura a sonde verticali per dispositivi elettronici integrati su semiconduttore |
JP2005050738A (ja) * | 2003-07-31 | 2005-02-24 | Jst Mfg Co Ltd | 電気コネクタ |
US7649372B2 (en) * | 2003-11-14 | 2010-01-19 | Wentworth Laboratories, Inc. | Die design with integrated assembly aid |
JP3791689B2 (ja) * | 2004-01-09 | 2006-06-28 | 日本電子材料株式会社 | プローブカード |
WO2006054329A1 (ja) * | 2004-11-16 | 2006-05-26 | Fujitsu Limited | コンタクタ及びコンタクタを用いた試験方法 |
CA2592901C (en) * | 2007-07-13 | 2012-03-27 | Martin Blouin | Semi-generic in-circuit test fixture |
EP2060922A1 (de) * | 2007-11-16 | 2009-05-20 | Technoprobe S.p.A | Mikrostrukturprüfkopf |
JP5064205B2 (ja) * | 2007-12-27 | 2012-10-31 | タイコエレクトロニクスジャパン合同会社 | コンタクトおよびインタポーザ |
US8808625B2 (en) * | 2008-01-11 | 2014-08-19 | National Institute Of Advanced Industrial Science And Technology | Dispensing apparatus and a dispensing method |
ATE519123T1 (de) * | 2008-02-08 | 2011-08-15 | Technoprobe Spa | Kontaktstift für einen prüfkopf mit vertikalen prüfnadeln mit verbesserter schrubb-bewegung |
DE102008023761B9 (de) * | 2008-05-09 | 2012-11-08 | Feinmetall Gmbh | Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung |
US8324919B2 (en) * | 2009-03-27 | 2012-12-04 | Delaware Capital Formation, Inc. | Scrub inducing compliant electrical contact |
JP5514619B2 (ja) * | 2009-12-24 | 2014-06-04 | ガーディアンジャパン株式会社 | 配線検査治具 |
ITMI20110352A1 (it) * | 2011-03-07 | 2012-09-08 | Technoprobe Spa | Testa di misura per un' apparecchiatura di test di dispositivi elettronici |
US10006938B2 (en) * | 2012-01-04 | 2018-06-26 | Formfactor, Inc. | Probes with programmable motion |
US9470715B2 (en) * | 2013-01-11 | 2016-10-18 | Mpi Corporation | Probe head |
CN107250808A (zh) * | 2014-12-04 | 2017-10-13 | 泰克诺探头公司 | 包括垂直探针的测试头 |
KR101656047B1 (ko) * | 2016-03-23 | 2016-09-09 | 주식회사 나노시스 | 기판 검사용 지그 |
KR101869044B1 (ko) * | 2016-11-10 | 2018-07-19 | 윌테크놀러지(주) | 스크럽 현상이 저감된 수직형 프로브 카드용 니들유닛 및 이를 이용한 프로브 카드 |
US11262384B2 (en) * | 2016-12-23 | 2022-03-01 | Intel Corporation | Fine pitch probe card methods and systems |
JP6872960B2 (ja) * | 2017-04-21 | 2021-05-19 | 株式会社日本マイクロニクス | 電気的接続装置 |
DE102017209510A1 (de) * | 2017-06-06 | 2018-12-06 | Feinmetall Gmbh | Kontaktelementsystem |
US11268983B2 (en) | 2017-06-30 | 2022-03-08 | Intel Corporation | Chevron interconnect for very fine pitch probing |
US10775414B2 (en) | 2017-09-29 | 2020-09-15 | Intel Corporation | Low-profile gimbal platform for high-resolution in situ co-planarity adjustment |
US11061068B2 (en) | 2017-12-05 | 2021-07-13 | Intel Corporation | Multi-member test probe structure |
US11204555B2 (en) | 2017-12-28 | 2021-12-21 | Intel Corporation | Method and apparatus to develop lithographically defined high aspect ratio interconnects |
US11073538B2 (en) | 2018-01-03 | 2021-07-27 | Intel Corporation | Electrical testing apparatus with lateral movement of a probe support substrate |
US10488438B2 (en) | 2018-01-05 | 2019-11-26 | Intel Corporation | High density and fine pitch interconnect structures in an electric test apparatus |
US10866264B2 (en) | 2018-01-05 | 2020-12-15 | Intel Corporation | Interconnect structure with varying modulus of elasticity |
DE102018204106A1 (de) * | 2018-03-16 | 2019-09-19 | Feinmetall Gmbh | Prüfkarte zum elektrischen Verbinden eines Prüflings mit einer elektrischen Prüfeinrichtung |
US11543454B2 (en) | 2018-09-25 | 2023-01-03 | Intel Corporation | Double-beam test probe |
US10935573B2 (en) | 2018-09-28 | 2021-03-02 | Intel Corporation | Slip-plane MEMS probe for high-density and fine pitch interconnects |
IT201800021253A1 (it) * | 2018-12-27 | 2020-06-27 | Technoprobe Spa | Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare |
US11768227B1 (en) | 2019-02-22 | 2023-09-26 | Microfabrica Inc. | Multi-layer probes having longitudinal axes and preferential probe bending axes that lie in planes that are nominally parallel to planes of probe layers |
CN112198346A (zh) * | 2019-07-08 | 2021-01-08 | 技鼎股份有限公司 | 探针头及探针头的导电探针 |
US20220236304A1 (en) * | 2021-01-28 | 2022-07-28 | Formfactor, Inc. | Probe Head Including a Guide Plate with Angled Holes to Determine Probe Flexure Direction |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3217283A (en) * | 1962-12-26 | 1965-11-09 | Amp Inc | Miniature printed circuit pinboard |
CH661129A5 (de) * | 1982-10-21 | 1987-06-30 | Feinmetall Gmbh | Kontaktiervorrichtung. |
US4686467A (en) * | 1984-03-21 | 1987-08-11 | Dit-Mco International Corp. | Circuit board testing system |
US4774462A (en) * | 1984-06-11 | 1988-09-27 | Black Thomas J | Automatic test system |
JPH0675415B2 (ja) * | 1991-03-15 | 1994-09-21 | 山一電機株式会社 | リードレス形icパッケージ用接続器 |
JPH11142433A (ja) * | 1997-11-10 | 1999-05-28 | Mitsubishi Electric Corp | 垂直針型プローブカード用のプローブ針とその製造方法 |
JPH11145215A (ja) * | 1997-11-11 | 1999-05-28 | Mitsubishi Electric Corp | 半導体検査装置およびその制御方法 |
US5952843A (en) * | 1998-03-24 | 1999-09-14 | Vinh; Nguyen T. | Variable contact pressure probe |
KR20000040104A (ko) * | 1998-12-17 | 2000-07-05 | 김영환 | 실리콘 온 인슐레이터 웨이퍼의 제조방법 |
-
2000
- 2000-05-11 IT IT2000MI001045A patent/IT1317517B1/it active
-
2001
- 2001-05-10 DE DE60110149T patent/DE60110149D1/de not_active Expired - Fee Related
- 2001-05-10 US US09/853,884 patent/US6515496B2/en not_active Expired - Fee Related
- 2001-05-10 EP EP01111419A patent/EP1154276B8/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6515496B2 (en) | 2003-02-04 |
EP1154276B8 (de) | 2005-06-15 |
IT1317517B1 (it) | 2003-07-09 |
EP1154276A2 (de) | 2001-11-14 |
EP1154276B1 (de) | 2005-04-20 |
ITMI20001045A0 (it) | 2000-05-11 |
EP1154276A3 (de) | 2003-01-08 |
US20020024347A1 (en) | 2002-02-28 |
ITMI20001045A1 (it) | 2001-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: TECHNOPROBE S.P.A, CERNUSCO LOMBARDONE, IT |
|
8339 | Ceased/non-payment of the annual fee |