DE60106312D1 - Fluidregelvorrichtung - Google Patents

Fluidregelvorrichtung

Info

Publication number
DE60106312D1
DE60106312D1 DE2001606312 DE60106312T DE60106312D1 DE 60106312 D1 DE60106312 D1 DE 60106312D1 DE 2001606312 DE2001606312 DE 2001606312 DE 60106312 T DE60106312 T DE 60106312T DE 60106312 D1 DE60106312 D1 DE 60106312D1
Authority
DE
Germany
Prior art keywords
management device
fluid management
fluid
management
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE2001606312
Other languages
English (en)
Other versions
DE60106312T2 (de
Inventor
Ishi Sawai-Ku Ken
Okabe Tsuneyuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000065986A external-priority patent/JP4238453B2/ja
Priority claimed from JP2000065981A external-priority patent/JP3455800B2/ja
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE60106312D1 publication Critical patent/DE60106312D1/de
Publication of DE60106312T2 publication Critical patent/DE60106312T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00—Installations or systems with accumulators; Supply reservoir or sump assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
DE2001606312 2000-03-10 2001-03-08 Fluidregelvorrichtung Expired - Lifetime DE60106312T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000065986 2000-03-10
JP2000065986A JP4238453B2 (ja) 2000-03-10 2000-03-10 流体制御装置
JP2000065981A JP3455800B2 (ja) 2000-03-10 2000-03-10 遮断開放器
JP2000065981 2000-03-10

Publications (2)

Publication Number Publication Date
DE60106312D1 true DE60106312D1 (de) 2004-11-18
DE60106312T2 DE60106312T2 (de) 2005-11-17

Family

ID=26587150

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001606312 Expired - Lifetime DE60106312T2 (de) 2000-03-10 2001-03-08 Fluidregelvorrichtung

Country Status (5)

Country Link
US (1) US6382238B2 (de)
EP (1) EP1132669B1 (de)
KR (1) KR100714755B1 (de)
DE (1) DE60106312T2 (de)
TW (1) TW500891B (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
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WO1999045302A1 (en) * 1998-03-05 1999-09-10 The Swagelok Company Modular surface mount manifold
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
AU2003262953A1 (en) 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
CN100339629C (zh) * 2002-10-21 2007-09-26 喜开理株式会社 集成气阀
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
WO2004088772A2 (en) * 2003-03-26 2004-10-14 Swagelok Company Modular fluid components and assembly
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US8196480B1 (en) * 2006-04-03 2012-06-12 A+ Manufacturing, Llc Modular sample conditioning system
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
WO2008030501A2 (en) * 2006-09-06 2008-03-13 Ultra Clean Holdings, Incorporated Pre-certified process chamber and method
JP5001757B2 (ja) * 2007-08-31 2012-08-15 シーケーディ株式会社 流体混合システム及び流体混合装置
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
JP5775696B2 (ja) * 2011-01-31 2015-09-09 株式会社フジキン 流体制御装置
JP5798766B2 (ja) * 2011-03-11 2015-10-21 東京エレクトロン株式会社 ボルトの緩み防止装置ならびにその取付方法および取付治具
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
JP5797010B2 (ja) * 2011-05-20 2015-10-21 株式会社フジキン 流体制御装置
JP5868219B2 (ja) 2012-02-29 2016-02-24 株式会社フジキン 流体制御装置
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US11357966B2 (en) 2015-04-23 2022-06-14 B. Braun Medical Inc. Compounding device, system, kit, software, and method
KR102177916B1 (ko) * 2016-09-12 2020-11-12 가부시키가이샤 후지킨 유체제어장치, 이것에 사용하는 베이스 블록 및 유체제어장치의 제조 방법
CN106426839B (zh) * 2016-11-09 2018-08-24 上海普莱克斯自动设备制造有限公司 模具管路检测装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR102543591B1 (ko) * 2018-10-31 2023-06-13 가부시키가이샤 후지킨 유체 제어 장치 및 유체 제어 장치의 제조 방법
JP2022529263A (ja) * 2019-04-15 2022-06-20 ラム リサーチ コーポレーション ガス送給用のモジュール式構成要素システム
TW202117217A (zh) 2019-09-19 2021-05-01 美商應用材料股份有限公司 清潔減少滯留區的隔離閥

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2600751B1 (fr) * 1986-06-27 1988-09-23 Asm Sud Europe Systeme modulaire de montage de lignes pour la distribution, le controle et la mesure de debits de fluides humides ou gazeux, notamment de gaz de haute purete et elements constitutifs dudit systeme
WO1994028315A1 (fr) * 1993-06-02 1994-12-08 Kabushiki-Kaisha Yaskawa Denki Source hydraulique et machine hydraulique
JPH0929996A (ja) 1995-07-18 1997-02-04 Seiko Epson Corp インクジェット記録方法
JP3595083B2 (ja) 1996-11-12 2004-12-02 シーケーディ株式会社 ガス供給ユニット
JP3997337B2 (ja) * 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
JPH10169881A (ja) 1996-12-03 1998-06-26 Benkan Corp 集積化ガスパネル及びその組立方法
JPH10300000A (ja) * 1997-02-28 1998-11-13 Benkan Corp 集積化ガス制御装置
JP3871438B2 (ja) * 1997-06-06 2007-01-24 シーケーディ株式会社 プロセスガス供給ユニット
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
US6076543A (en) * 1997-11-06 2000-06-20 United States Filter Corporation Gas handling device
JPH11294615A (ja) * 1998-04-10 1999-10-29 Ckd Corp 集積弁
JP4288629B2 (ja) 1998-06-05 2009-07-01 日立金属株式会社 集積形流体制御装置
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
EP1132669A1 (de) 2001-09-12
DE60106312T2 (de) 2005-11-17
KR20010089213A (ko) 2001-09-29
US20010020488A1 (en) 2001-09-13
TW500891B (en) 2002-09-01
KR100714755B1 (ko) 2007-05-07
EP1132669B1 (de) 2004-10-13
US6382238B2 (en) 2002-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: TOKYO ELECTRON LTD., TOKIO/TOKYO, JP