DE60102523D1 - Hilfsmuster für lithographisches Belichtungsverfahren - Google Patents
Hilfsmuster für lithographisches BelichtungsverfahrenInfo
- Publication number
- DE60102523D1 DE60102523D1 DE60102523T DE60102523T DE60102523D1 DE 60102523 D1 DE60102523 D1 DE 60102523D1 DE 60102523 T DE60102523 T DE 60102523T DE 60102523 T DE60102523 T DE 60102523T DE 60102523 D1 DE60102523 D1 DE 60102523D1
- Authority
- DE
- Germany
- Prior art keywords
- exposure process
- auxiliary pattern
- lithographic exposure
- lithographic
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00306237 | 2000-07-21 | ||
EP00306237 | 2000-07-21 | ||
US24465700P | 2000-11-01 | 2000-11-01 | |
US244657P | 2000-11-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60102523D1 true DE60102523D1 (de) | 2004-05-06 |
DE60102523T2 DE60102523T2 (de) | 2005-04-07 |
Family
ID=26073249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60102523T Expired - Fee Related DE60102523T2 (de) | 2000-07-21 | 2001-07-19 | Hilfsmuster für lithographisches Belichtungsverfahren |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3996360B2 (de) |
KR (1) | KR100452732B1 (de) |
DE (1) | DE60102523T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002116529A (ja) * | 2000-10-06 | 2002-04-19 | Dainippon Printing Co Ltd | 半導体回路設計パタンデータの補正方法、該補正方法により得られたパタンデータにより作製されたフォトマスク |
US7217503B2 (en) | 2001-04-24 | 2007-05-15 | Canon Kabushiki Kaisha | Exposure method and apparatus |
JP4790350B2 (ja) * | 2005-08-31 | 2011-10-12 | 富士通セミコンダクター株式会社 | 露光用マスク及び露光用マスクの製造方法 |
JP4635085B2 (ja) * | 2008-03-03 | 2011-02-16 | 株式会社東芝 | 半導体装置の製造方法 |
KR101061357B1 (ko) * | 2009-02-17 | 2011-08-31 | 주식회사 하이닉스반도체 | 포토 마스크 |
SG185228A1 (en) * | 2011-04-25 | 2012-11-29 | Ultratech Inc | Phase-shift mask with assist phase regions |
KR101694275B1 (ko) | 2013-03-14 | 2017-01-23 | 에이에스엠엘 네델란즈 비.브이. | 패터닝 디바이스, 기판에 마커를 생성하는 방법 및 디바이스 제조 방법 |
-
2001
- 2001-07-19 KR KR10-2001-0043438A patent/KR100452732B1/ko active IP Right Grant
- 2001-07-19 DE DE60102523T patent/DE60102523T2/de not_active Expired - Fee Related
- 2001-07-19 JP JP2001218954A patent/JP3996360B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2002090979A (ja) | 2002-03-27 |
DE60102523T2 (de) | 2005-04-07 |
KR100452732B1 (ko) | 2004-10-12 |
KR20020009430A (ko) | 2002-02-01 |
JP3996360B2 (ja) | 2007-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |