DE60101364T2 - Strahlteiler zur Reduktion von polarisationsabhängigen Effekten - Google Patents

Strahlteiler zur Reduktion von polarisationsabhängigen Effekten Download PDF

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Publication number
DE60101364T2
DE60101364T2 DE60101364T DE60101364T DE60101364T2 DE 60101364 T2 DE60101364 T2 DE 60101364T2 DE 60101364 T DE60101364 T DE 60101364T DE 60101364 T DE60101364 T DE 60101364T DE 60101364 T2 DE60101364 T2 DE 60101364T2
Authority
DE
Germany
Prior art keywords
incident beam
reflected
dividing device
beam splitter
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60101364T
Other languages
German (de)
English (en)
Other versions
DE60101364D1 (de
Inventor
Rüdiger Mästle
Bernd Nebendahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE60101364D1 publication Critical patent/DE60101364D1/de
Application granted granted Critical
Publication of DE60101364T2 publication Critical patent/DE60101364T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2848Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers having refractive means, e.g. imaging elements between light guides as splitting, branching and/or combining devices, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/144Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Polarising Elements (AREA)
DE60101364T 2001-12-14 2001-12-14 Strahlteiler zur Reduktion von polarisationsabhängigen Effekten Expired - Fee Related DE60101364T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP01129780A EP1223456B1 (en) 2001-12-14 2001-12-14 Low polarisation dependent loss beam splitter

Publications (2)

Publication Number Publication Date
DE60101364D1 DE60101364D1 (de) 2004-01-15
DE60101364T2 true DE60101364T2 (de) 2004-10-28

Family

ID=8179538

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60101364T Expired - Fee Related DE60101364T2 (de) 2001-12-14 2001-12-14 Strahlteiler zur Reduktion von polarisationsabhängigen Effekten

Country Status (4)

Country Link
US (1) US6847486B2 (enExample)
EP (1) EP1223456B1 (enExample)
JP (1) JP2003222710A (enExample)
DE (1) DE60101364T2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447511B (zh) * 2010-11-12 2014-08-01 Asia Optical Co Inc Projector light source module
JP2012156536A (ja) * 2012-03-28 2012-08-16 Nikon Corp 照明光学装置、露光装置および露光方法
JP5644921B2 (ja) * 2013-09-09 2014-12-24 株式会社ニコン 照明光学装置
JP5761329B2 (ja) * 2013-12-27 2015-08-12 株式会社ニコン 照明光学装置、露光装置および露光方法
JP5928632B2 (ja) * 2015-04-03 2016-06-01 株式会社ニコン 照明光学装置、露光装置および露光方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3741625A (en) * 1971-06-21 1973-06-26 Bell Telephone Labor Inc Polarization-insensitive millimeter-wave directional coupler
US4492436A (en) * 1983-01-03 1985-01-08 At&T Bell Laboratories Polarization independent beam splitter
US5699187A (en) * 1992-06-19 1997-12-16 Fujitsu Limited Optical coupler
US5740288A (en) * 1995-02-22 1998-04-14 E-Tek Dynamics, Inc. Variable polarization beam splitter, combiner and mixer
JP2774467B2 (ja) * 1995-08-14 1998-07-09 彰二郎 川上 偏波無依存型光アイソレータ装置
AUPN714295A0 (en) * 1995-12-14 1996-01-11 Photonic Technologies Pty Ltd Fibre optic circulator
JP2897746B2 (ja) * 1997-01-28 1999-05-31 日本電気株式会社 波長可変フィルタ
US6016216A (en) * 1997-05-17 2000-01-18 Aurora Photonics, Inc. Polarization-independent acousto-optic tunable filter
US6441934B1 (en) * 1998-02-13 2002-08-27 Apa Optics, Inc. Multiplexer and demultiplexer for single mode optical fiber communication links
US6647209B1 (en) * 1998-02-13 2003-11-11 Apa Optics, Inc. Multiplexer and demultiplexer for single mode optical fiber communication links
EP1200861A2 (en) * 1999-07-29 2002-05-02 Apa Optics, Inc. Polarization-independent, dense wavelength division multiplexer (dwdm)
US6430323B1 (en) * 1999-10-20 2002-08-06 Micro-Optics, Inc. Polarization maintaining optical isolators
US6339661B1 (en) * 1999-10-20 2002-01-15 Micro-Optics, Inc. Polarization maintaining fiber optic circulators
US20020118904A1 (en) * 2001-02-27 2002-08-29 Agere Systems Optical fiber systems for transmitting laser light with reduced back reflection interference
US6631238B2 (en) * 2001-03-16 2003-10-07 Primanex Corporation Variable optical attenuator

Also Published As

Publication number Publication date
US6847486B2 (en) 2005-01-25
JP2003222710A (ja) 2003-08-08
DE60101364D1 (de) 2004-01-15
US20030112524A1 (en) 2003-06-19
EP1223456A1 (en) 2002-07-17
EP1223456B1 (en) 2003-12-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee