DE60040392D1 - Filmherstellungsvorrichtung - Google Patents
FilmherstellungsvorrichtungInfo
- Publication number
- DE60040392D1 DE60040392D1 DE60040392T DE60040392T DE60040392D1 DE 60040392 D1 DE60040392 D1 DE 60040392D1 DE 60040392 T DE60040392 T DE 60040392T DE 60040392 T DE60040392 T DE 60040392T DE 60040392 D1 DE60040392 D1 DE 60040392D1
- Authority
- DE
- Germany
- Prior art keywords
- production device
- film production
- film
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36570099A JP4419237B2 (ja) | 1999-12-22 | 1999-12-22 | 成膜装置及び被処理体の処理方法 |
PCT/JP2000/009153 WO2001046491A1 (fr) | 1999-12-22 | 2000-12-22 | Dispositif filmogene |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60040392D1 true DE60040392D1 (de) | 2008-11-13 |
Family
ID=18484898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60040392T Expired - Fee Related DE60040392D1 (de) | 1999-12-22 | 2000-12-22 | Filmherstellungsvorrichtung |
Country Status (8)
Country | Link |
---|---|
US (2) | US20020166509A1 (de) |
EP (1) | EP1199380B1 (de) |
JP (1) | JP4419237B2 (de) |
KR (1) | KR100754007B1 (de) |
DE (1) | DE60040392D1 (de) |
SG (1) | SG139537A1 (de) |
TW (1) | TW466578B (de) |
WO (1) | WO2001046491A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7024105B2 (en) | 2003-10-10 | 2006-04-04 | Applied Materials Inc. | Substrate heater assembly |
US20050176252A1 (en) * | 2004-02-10 | 2005-08-11 | Goodman Matthew G. | Two-stage load for processing both sides of a wafer |
US20060219172A1 (en) * | 2005-04-05 | 2006-10-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | PVD equipment and electrode and deposition ring thereof |
US20080289686A1 (en) * | 2007-05-23 | 2008-11-27 | Tae Kyung Won | Method and apparatus for depositing a silicon layer on a transmitting conductive oxide layer suitable for use in solar cell applications |
US8999106B2 (en) | 2007-12-19 | 2015-04-07 | Applied Materials, Inc. | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber |
US9698042B1 (en) * | 2016-07-22 | 2017-07-04 | Lam Research Corporation | Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge |
JP2021012952A (ja) * | 2019-07-05 | 2021-02-04 | 東京エレクトロン株式会社 | 載置台、基板処理装置及び載置台の組立方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5447570A (en) * | 1990-04-23 | 1995-09-05 | Genus, Inc. | Purge gas in wafer coating area selection |
US5273588A (en) * | 1992-06-15 | 1993-12-28 | Materials Research Corporation | Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means |
US5803977A (en) * | 1992-09-30 | 1998-09-08 | Applied Materials, Inc. | Apparatus for full wafer deposition |
US5695568A (en) * | 1993-04-05 | 1997-12-09 | Applied Materials, Inc. | Chemical vapor deposition chamber |
TW357404B (en) * | 1993-12-24 | 1999-05-01 | Tokyo Electron Ltd | Apparatus and method for processing of plasma |
JPH07201829A (ja) * | 1993-12-28 | 1995-08-04 | Tokyo Electron Ltd | プラズマ処理装置の洗浄方法 |
US5968379A (en) * | 1995-07-14 | 1999-10-19 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability and related methods |
US5635244A (en) * | 1995-08-28 | 1997-06-03 | Lsi Logic Corporation | Method of forming a layer of material on a wafer |
US5891348A (en) * | 1996-01-26 | 1999-04-06 | Applied Materials, Inc. | Process gas focusing apparatus and method |
US5846332A (en) * | 1996-07-12 | 1998-12-08 | Applied Materials, Inc. | Thermally floating pedestal collar in a chemical vapor deposition chamber |
WO1998014636A1 (en) * | 1996-09-30 | 1998-04-09 | Lam Research Corporation | Apparatus for reducing polymer deposition on substrate support |
JP3476638B2 (ja) * | 1996-12-20 | 2003-12-10 | 東京エレクトロン株式会社 | Cvd成膜方法 |
US6051286A (en) * | 1997-02-12 | 2000-04-18 | Applied Materials, Inc. | High temperature, high deposition rate process and apparatus for depositing titanium layers |
US5942042A (en) * | 1997-05-23 | 1999-08-24 | Applied Materials, Inc. | Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system |
US6051122A (en) * | 1997-08-21 | 2000-04-18 | Applied Materials, Inc. | Deposition shield assembly for a semiconductor wafer processing system |
KR100292410B1 (ko) * | 1998-09-23 | 2001-06-01 | 윤종용 | 불순물 오염이 억제된 반도체 제조용 반응 챔버 |
WO2000026939A1 (en) * | 1998-10-29 | 2000-05-11 | Applied Materials, Inc. | Apparatus for coupling power through a workpiece in a semiconductor wafer processing system |
US6159299A (en) * | 1999-02-09 | 2000-12-12 | Applied Materials, Inc. | Wafer pedestal with a purge ring |
US6451181B1 (en) * | 1999-03-02 | 2002-09-17 | Motorola, Inc. | Method of forming a semiconductor device barrier layer |
US6162336A (en) * | 1999-07-12 | 2000-12-19 | Chartered Semiconductor Manufacturing Ltd. | Clamping ring design to reduce wafer sticking problem in metal deposition |
US6375748B1 (en) * | 1999-09-01 | 2002-04-23 | Applied Materials, Inc. | Method and apparatus for preventing edge deposition |
-
1999
- 1999-12-22 JP JP36570099A patent/JP4419237B2/ja not_active Expired - Lifetime
-
2000
- 2000-12-21 TW TW089127540A patent/TW466578B/zh not_active IP Right Cessation
- 2000-12-22 WO PCT/JP2000/009153 patent/WO2001046491A1/ja active IP Right Grant
- 2000-12-22 EP EP00985841A patent/EP1199380B1/de not_active Expired - Lifetime
- 2000-12-22 KR KR1020017010632A patent/KR100754007B1/ko active IP Right Grant
- 2000-12-22 DE DE60040392T patent/DE60040392D1/de not_active Expired - Fee Related
- 2000-12-22 US US09/914,013 patent/US20020166509A1/en not_active Abandoned
- 2000-12-22 SG SG200402185-3A patent/SG139537A1/en unknown
-
2003
- 2003-10-16 US US10/685,415 patent/US20040168642A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20020166509A1 (en) | 2002-11-14 |
JP2001181845A (ja) | 2001-07-03 |
KR100754007B1 (ko) | 2007-09-03 |
EP1199380A4 (de) | 2005-01-19 |
US20040168642A1 (en) | 2004-09-02 |
TW466578B (en) | 2001-12-01 |
EP1199380A1 (de) | 2002-04-24 |
WO2001046491A1 (fr) | 2001-06-28 |
KR20010102302A (ko) | 2001-11-15 |
JP4419237B2 (ja) | 2010-02-24 |
SG139537A1 (en) | 2008-02-29 |
EP1199380B1 (de) | 2008-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |