DE60038994D1 - Etalon Spektrometer mit doppeltem Strahldurchgang - Google Patents
Etalon Spektrometer mit doppeltem StrahldurchgangInfo
- Publication number
- DE60038994D1 DE60038994D1 DE60038994T DE60038994T DE60038994D1 DE 60038994 D1 DE60038994 D1 DE 60038994D1 DE 60038994 T DE60038994 T DE 60038994T DE 60038994 T DE60038994 T DE 60038994T DE 60038994 D1 DE60038994 D1 DE 60038994D1
- Authority
- DE
- Germany
- Prior art keywords
- etalon
- transmitted
- spectrometer
- beam passage
- double beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 title abstract 4
- 230000003595 spectral effect Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 1
- 238000001393 microlithography Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/245,134 US6243170B1 (en) | 1999-02-04 | 1999-02-04 | Double pass etalon spectrometer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60038994D1 true DE60038994D1 (de) | 2008-07-10 |
Family
ID=22925424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60038994T Expired - Lifetime DE60038994D1 (de) | 1999-02-04 | 2000-02-03 | Etalon Spektrometer mit doppeltem Strahldurchgang |
Country Status (7)
Country | Link |
---|---|
US (1) | US6243170B1 (de) |
EP (1) | EP1026487B1 (de) |
JP (1) | JP3624783B2 (de) |
KR (1) | KR100356108B1 (de) |
AT (1) | ATE397201T1 (de) |
DE (1) | DE60038994D1 (de) |
TW (1) | TW459125B (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6580517B2 (en) | 2000-03-01 | 2003-06-17 | Lambda Physik Ag | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
US6160832A (en) | 1998-06-01 | 2000-12-12 | Lambda Physik Gmbh | Method and apparatus for wavelength calibration |
US7006541B2 (en) * | 1998-06-01 | 2006-02-28 | Lambda Physik Ag | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
US6597462B2 (en) | 2000-03-01 | 2003-07-22 | Lambda Physik Ag | Laser wavelength and bandwidth monitor |
US6819429B2 (en) * | 2000-04-07 | 2004-11-16 | Exfo Electro-Optical Engineering Inc. | Multi-pass optical spectrum analyzer having a polarization-dependent tunable filter |
US6807205B1 (en) | 2000-07-14 | 2004-10-19 | Lambda Physik Ag | Precise monitor etalon calibration technique |
US6747741B1 (en) * | 2000-10-12 | 2004-06-08 | Lambda Physik Ag | Multiple-pass interferometric device |
US20030161374A1 (en) * | 2001-11-21 | 2003-08-28 | Lambda Physik Ag | High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applications |
US6788726B2 (en) * | 2002-02-26 | 2004-09-07 | New Focus, Inc. | External cavity laser with high spectral purity output |
AU2002251525A1 (en) * | 2002-04-23 | 2003-11-10 | Hiromu Maeda | Small packaged spectroscopic sensor unit |
US6741348B2 (en) | 2002-04-29 | 2004-05-25 | The Curators Of The University Of Missouri | Ultrasensitive spectrophotometer |
TWI238269B (en) * | 2002-06-07 | 2005-08-21 | Delta Electronics Inc | Fabry-Perot optical filter device |
US20040071181A1 (en) * | 2002-10-15 | 2004-04-15 | Rong Huang | Retro-reflective etalon and the devices using the same |
US20040141182A1 (en) * | 2002-12-16 | 2004-07-22 | Thomas Schroder | Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laser |
US7050215B1 (en) | 2003-08-01 | 2006-05-23 | Ball Aerospace & Technologies Corp. | Method and apparatus for providing a gas correlation filter for remote sensing of atmospheric trace gases |
US7030991B1 (en) * | 2003-08-01 | 2006-04-18 | Ball Aerospace & Technologies Corp. | Field condensing imaging system for remote sensing of atmospheric trace gases |
US7268881B2 (en) * | 2004-02-17 | 2007-09-11 | The Curators Of The University Of Missouri | Light scattering detector |
US7903252B2 (en) * | 2005-01-13 | 2011-03-08 | The Curators Of The University Of Missouri | Noise cancellation in fourier transform spectrophotometry |
KR20090004926A (ko) | 2006-03-09 | 2009-01-12 | 올테크 어소시에이츠, 인크. | 복합 관형 부재, 관형 부재, 드리프트 튜브, 카트리지/임팩터 조립체, 카트리지, 전자 회로, 증기화 광 산란 검출기, 테스트 샘플 분석 방법 및 입력된 전압 신호 처리 방법 |
US7817274B2 (en) | 2007-10-05 | 2010-10-19 | Jingyun Zhang | Compact spectrometer |
WO2009070459A1 (en) | 2007-11-30 | 2009-06-04 | Jingyun Zhang | Miniature spectrometers working with cellular phones and other portable electronic devices |
US20110083493A1 (en) * | 2008-06-11 | 2011-04-14 | The Curators Of The University Of Missouri | Liquid Chromatography Detector and Flow Controller Therefor |
DE102008050867B4 (de) | 2008-09-30 | 2011-12-08 | Carl Zeiss Laser Optics Gmbh | Verfahren zum Messen eines Spektrums einer schmalbandigen Lichtquelle sowie Spektrometeranordnung |
JP5502623B2 (ja) * | 2010-07-07 | 2014-05-28 | 浜松ホトニクス株式会社 | 分光装置 |
US8599381B2 (en) | 2011-01-19 | 2013-12-03 | Massachusetts Institute Of Technology | Gas detector for atmospheric species detection |
JP5634291B2 (ja) * | 2011-02-10 | 2014-12-03 | アンリツ株式会社 | 光スペクトラム測定装置及び光スペクトラム測定方法 |
US9846079B2 (en) * | 2015-09-17 | 2017-12-19 | The United States Of America As Represented By The Administrator Of Nasa | Recirculating etalon spectrometer |
MX2018009833A (es) * | 2016-02-12 | 2018-09-11 | Massachusetts Gen Hospital | Sistema para realizar una espectroscopia. |
EP3921612A4 (de) | 2019-02-06 | 2022-11-02 | California Institute of Technology | Kompaktes hyperspektrales mittelinfrarot-spektrometer |
US11313722B2 (en) | 2019-11-08 | 2022-04-26 | California Institute Of Technology | Infrared spectrometer having dielectric-polymer-based spectral filter |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3729261A (en) | 1971-06-21 | 1973-04-24 | Rca Corp | Stabilized multipass interferometer |
US4005937A (en) * | 1974-11-26 | 1977-02-01 | Allied Chemical Corporation | Simultaneous interferometric transmission of periodic spectral components |
JPS5331027B2 (de) * | 1975-02-24 | 1978-08-30 | ||
JPS62203024A (ja) | 1986-03-04 | 1987-09-07 | Canon Inc | フアブリ・ペロ−分光装置 |
US4850709A (en) * | 1986-03-04 | 1989-07-25 | Canon Kabushiki Kaisha | Fabri-perot spectroscopy method and apparatus utilizing the same |
US5025445A (en) | 1989-11-22 | 1991-06-18 | Cymer Laser Technologies | System for, and method of, regulating the wavelength of a light beam |
JPH03173486A (ja) | 1989-12-01 | 1991-07-26 | Toshiba Corp | 狭帯域化レーザ装置 |
US5243614A (en) * | 1990-11-28 | 1993-09-07 | Mitsubishi Denki Kabushiki Kaisha | Wavelength stabilizer for narrow bandwidth laser |
JP2997956B2 (ja) | 1991-06-27 | 2000-01-11 | 株式会社小松製作所 | 波長検出装置 |
US5450207A (en) | 1993-07-16 | 1995-09-12 | Cymer Laser Technologies | Method and apparatus for calibrating a laser wavelength control mechanism |
JPH10300587A (ja) | 1997-04-30 | 1998-11-13 | Nikon Corp | 波長測定装置及び方法 |
-
1999
- 1999-02-04 US US09/245,134 patent/US6243170B1/en not_active Expired - Lifetime
-
2000
- 2000-02-03 KR KR1020000005502A patent/KR100356108B1/ko not_active IP Right Cessation
- 2000-02-03 EP EP00101694A patent/EP1026487B1/de not_active Expired - Lifetime
- 2000-02-03 AT AT00101694T patent/ATE397201T1/de not_active IP Right Cessation
- 2000-02-03 DE DE60038994T patent/DE60038994D1/de not_active Expired - Lifetime
- 2000-02-04 JP JP2000067720A patent/JP3624783B2/ja not_active Expired - Fee Related
- 2000-03-07 TW TW089101994A patent/TW459125B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1026487A3 (de) | 2000-12-13 |
TW459125B (en) | 2001-10-11 |
KR100356108B1 (ko) | 2002-10-19 |
JP3624783B2 (ja) | 2005-03-02 |
EP1026487B1 (de) | 2008-05-28 |
US6243170B1 (en) | 2001-06-05 |
JP2000283847A (ja) | 2000-10-13 |
EP1026487A2 (de) | 2000-08-09 |
KR20000057929A (ko) | 2000-09-25 |
ATE397201T1 (de) | 2008-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |