DE60023464D1 - Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor - Google Patents

Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor

Info

Publication number
DE60023464D1
DE60023464D1 DE60023464T DE60023464T DE60023464D1 DE 60023464 D1 DE60023464 D1 DE 60023464D1 DE 60023464 T DE60023464 T DE 60023464T DE 60023464 T DE60023464 T DE 60023464T DE 60023464 D1 DE60023464 D1 DE 60023464D1
Authority
DE
Germany
Prior art keywords
integrated
production
semiconductor material
microreactor
chemical microreactors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60023464T
Other languages
English (en)
Other versions
DE60023464T2 (de
Inventor
Flavio Villa
Ubaldo Mastromatteo
Gabriele Barlocchi
Mauro Cattaneo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Application granted granted Critical
Publication of DE60023464D1 publication Critical patent/DE60023464D1/de
Publication of DE60023464T2 publication Critical patent/DE60023464T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
    • B01L7/525—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples with physical movement of samples between temperature zones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1838—Means for temperature control using fluid heat transfer medium
    • B01L2300/185—Means for temperature control using fluid heat transfer medium using a liquid as fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1883—Means for temperature control using thermal insulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/05—Temporary protection of devices or parts of the devices during manufacturing
    • B81C2201/053—Depositing a protective layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Hematology (AREA)
  • Biochemistry (AREA)
  • Molecular Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Micromachines (AREA)
DE60023464T 2000-06-05 2000-06-05 Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor Expired - Lifetime DE60023464T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00830400A EP1161985B1 (de) 2000-06-05 2000-06-05 Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor

Publications (2)

Publication Number Publication Date
DE60023464D1 true DE60023464D1 (de) 2005-12-01
DE60023464T2 DE60023464T2 (de) 2006-07-20

Family

ID=8175357

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60023464T Expired - Lifetime DE60023464T2 (de) 2000-06-05 2000-06-05 Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor

Country Status (3)

Country Link
US (2) US6710311B2 (de)
EP (1) EP1161985B1 (de)
DE (1) DE60023464T2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258003B2 (en) 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
EP1123739B1 (de) * 2000-02-11 2006-11-29 STMicroelectronics S.r.l. Integrierte Vorrichtung zur mikrofluidischen Temperaturregelung und dessen Herstellungsverfahren
US7732192B2 (en) * 2000-02-29 2010-06-08 Stmicroelectronics S.R.L. Integrated chemical microreactor with large area channels and manufacturing process thereof
US7230315B2 (en) * 2000-02-29 2007-06-12 Stmicroelectronics S.R.L. Integrated chemical microreactor with large area channels and manufacturing process thereof
DE60023464T2 (de) * 2000-06-05 2006-07-20 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor
DE60032772T2 (de) 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung
US6727479B2 (en) * 2001-04-23 2004-04-27 Stmicroelectronics S.R.L. Integrated device based upon semiconductor technology, in particular chemical microreactor
US6465357B1 (en) * 2001-07-05 2002-10-15 The Regents Of The University Of California Fabricating structures using chemo-mechanical polishing and chemically-selective endpoint detection
KR100401377B1 (ko) * 2001-07-09 2003-10-17 엘지.필립스 엘시디 주식회사 액정표시장치 및 그의 구동방법
US6504226B1 (en) * 2001-12-20 2003-01-07 Stmicroelectronics, Inc. Thin-film transistor used as heating element for microreaction chamber
US20030116552A1 (en) * 2001-12-20 2003-06-26 Stmicroelectronics Inc. Heating element for microfluidic and micromechanical applications
ITTO20020808A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Dispositivo integrato di analisi del dna.
ITTO20020809A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Micropompa, in particolare per un dispositivo integrato di analisi del dna.
EP1535665A1 (de) * 2003-11-28 2005-06-01 STMicroelectronics S.r.l. Integrierter chemischer Mikroreaktor mit separaten Kanälen zum Einschliessen von Flüssigkeiten und Verfahren zu dessen Herstellung
EP1541991A1 (de) 2003-12-12 2005-06-15 STMicroelectronics S.r.l. Integrierter chemischer Reaktor aus Halbleitermaterial zur Echtzeit-Überwachung von biologischen Reaktionen
US20050161327A1 (en) * 2003-12-23 2005-07-28 Michele Palmieri Microfluidic device and method for transporting electrically charged substances through a microchannel of a microfluidic device
EP1547688A1 (de) * 2003-12-23 2005-06-29 STMicroelectronics S.r.l. Vorrichtung und Verfahren zur lokalen Konzentrierung von geladenen Substanzen in einer mikrofluidischen Vorrichtung
DE602004030678D1 (de) * 2004-07-19 2011-02-03 St Microelectronics Srl Vorrichtung zur Detektion von biologischen Molekülen mit erhöhter Detektionsgeschwindigkeit und Verfahren zur schnellen Detektion von Biomolekülen
WO2006120221A1 (en) * 2005-05-12 2006-11-16 Stmicroelectronics S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
WO2006138211A2 (en) * 2005-06-17 2006-12-28 University Of Delaware Catalytic microcombustors for compact power or heat generation
KR100668342B1 (ko) * 2005-07-02 2007-01-12 삼성전자주식회사 유전자 검출용 소자의 제조 방법
KR100753979B1 (ko) * 2005-09-07 2007-08-31 삼성전자주식회사 Ｄｎａ 검출 장치
DE102006007040A1 (de) * 2006-02-15 2007-08-16 Austriamicrosystems Ag Bauelement mit integriertem Heizelement und Verfahren zum Beheizen eines Halbleiterkörpers
WO2007148358A1 (en) * 2006-06-23 2007-12-27 Stmicroelectronics S.R.L. Assembly of a microfluidic device for analysis of biological material
EP1876453A1 (de) * 2006-07-07 2008-01-09 Agilent Technologies, Inc. Temperatursteuerung für integrierten Chip
US7557002B2 (en) * 2006-08-18 2009-07-07 Micron Technology, Inc. Methods of forming transistor devices
US7989322B2 (en) 2007-02-07 2011-08-02 Micron Technology, Inc. Methods of forming transistors
US20110081367A1 (en) 2008-06-14 2011-04-07 Veredus Laboratories Pte Ltd Influenza sequences
US10491790B2 (en) * 2016-03-22 2019-11-26 Symbol Technologies, Llc Imaging module and reader for, and method of, variably illuminating targets to be read by image capture over a range of working distances
CN110072623B (zh) * 2016-12-13 2021-07-30 皇家飞利浦有限公司 流动控制设备
US20180270517A1 (en) * 2017-03-19 2018-09-20 Microsoft Technology Licensing, Llc Decoupled Playback of Media Content Streams
US11081424B2 (en) * 2019-06-18 2021-08-03 International Business Machines Corporation Micro-fluidic channels having various critical dimensions
CN113993624B (zh) * 2019-06-21 2024-02-09 亚德诺半导体国际无限责任公司 热平台和制造热平台的方法

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
US6051380A (en) * 1993-11-01 2000-04-18 Nanogen, Inc. Methods and procedures for molecular biological analysis and diagnostics
DE69233331T3 (de) * 1991-11-22 2007-08-30 Affymetrix, Inc., Santa Clara Kombinatorische Strategien zur Polymersynthese
US5726026A (en) * 1992-05-01 1998-03-10 Trustees Of The University Of Pennsylvania Mesoscale sample preparation device and systems for determination and processing of analytes
US5637469A (en) * 1992-05-01 1997-06-10 Trustees Of The University Of Pennsylvania Methods and apparatus for the detection of an analyte utilizing mesoscale flow systems
US5498392A (en) * 1992-05-01 1996-03-12 Trustees Of The University Of Pennsylvania Mesoscale polynucleotide amplification device and method
US5639423A (en) * 1992-08-31 1997-06-17 The Regents Of The University Of Calfornia Microfabricated reactor
US5429734A (en) * 1993-10-12 1995-07-04 Massachusetts Institute Of Technology Monolithic capillary electrophoretic device
SE9304145D0 (sv) * 1993-12-10 1993-12-10 Pharmacia Lkb Biotech Sätt att tillverka hålrumsstrukturer
US6403367B1 (en) * 1994-07-07 2002-06-11 Nanogen, Inc. Integrated portable biological detection system
CA2204912C (en) * 1994-11-10 2005-01-04 David Sarnoff Research Center, Inc. Liquid distribution system
DE19519015C1 (de) * 1995-05-24 1996-09-05 Inst Physikalische Hochtech Ev Miniaturisierter Mehrkammer-Thermocycler
DE69628016T2 (de) * 1995-06-16 2004-04-01 University Of Washington, Seattle Miniaturisierte differentielle extraktionsvorrichtung und verfahren
US6524532B1 (en) * 1995-06-20 2003-02-25 The Regents Of The University Of California Microfabricated sleeve devices for chemical reactions
US6168948B1 (en) * 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
US5856174A (en) * 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
US20020022261A1 (en) * 1995-06-29 2002-02-21 Anderson Rolfe C. Miniaturized genetic analysis systems and methods
US6057149A (en) * 1995-09-15 2000-05-02 The University Of Michigan Microscale devices and reactions in microscale devices
US6132580A (en) * 1995-09-28 2000-10-17 The Regents Of The University Of California Miniature reaction chamber and devices incorporating same
US20020068357A1 (en) * 1995-09-28 2002-06-06 Mathies Richard A. Miniaturized integrated nucleic acid processing and analysis device and method
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US6399023B1 (en) * 1996-04-16 2002-06-04 Caliper Technologies Corp. Analytical system and method
CN1173776C (zh) * 1996-06-28 2004-11-03 卡钳技术有限公司 在微规模流体性设备里的高通过量的筛选分析系统
US6475722B1 (en) * 1997-12-03 2002-11-05 Curagen Corporation Surface treatments for DNA processing devices
EP1042061A1 (de) * 1997-12-24 2000-10-11 Cepheid Integrierte kassette zur handhabung von flüssigkeiten
US6420143B1 (en) * 1998-02-13 2002-07-16 Caliper Technologies Corp. Methods and systems for performing superheated reactions in microscale fluidic systems
JP4398096B2 (ja) * 1998-10-16 2010-01-13 コミツサリア タ レネルジー アトミーク 分析支持体を有する、化学及び／又は生化学分析装置
US6261431B1 (en) * 1998-12-28 2001-07-17 Affymetrix, Inc. Process for microfabrication of an integrated PCR-CE device and products produced by the same
WO2000050642A1 (en) * 1999-02-23 2000-08-31 Caliper Technologies Corp. Sequencing by incorporation
EP1043770B1 (de) 1999-04-09 2006-03-01 STMicroelectronics S.r.l. Herstellung von vergrabenen Hohlräumen in einer einkristallinen Halbleiterscheibe und Halbleiterscheibe
US6238868B1 (en) * 1999-04-12 2001-05-29 Nanogen/Becton Dickinson Partnership Multiplex amplification and separation of nucleic acid sequences using ligation-dependant strand displacement amplification and bioelectronic chip technology
EP1049157B1 (de) 1999-04-29 2007-03-14 STMicroelectronics S.r.l. Herstellungsverfahren für vergrabene Kanäle und Hohlräume in Halbleiterscheiben
US6878540B2 (en) * 1999-06-25 2005-04-12 Cepheid Device for lysing cells, spores, or microorganisms
EP1123739B1 (de) 2000-02-11 2006-11-29 STMicroelectronics S.r.l. Integrierte Vorrichtung zur mikrofluidischen Temperaturregelung und dessen Herstellungsverfahren
EP1130631A1 (de) 2000-02-29 2001-09-05 STMicroelectronics S.r.l. Herstellungsverfahren eines vergrabenen Hohlraumes in einer Halbleiterscheibe
DE60023464T2 (de) * 2000-06-05 2006-07-20 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor
DE60034562T2 (de) * 2000-08-25 2008-01-17 Stmicroelectronics S.R.L., Agrate Brianza Ein System zur automatischen Bildanalyse von DNA Mikroarrays
DE10041853C1 (de) * 2000-08-25 2002-02-28 Gmd Gmbh Konfigurierbares Mikroreaktornetzwerk
DE60032772T2 (de) * 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung
US6727479B2 (en) * 2001-04-23 2004-04-27 Stmicroelectronics S.R.L. Integrated device based upon semiconductor technology, in particular chemical microreactor

Also Published As

Publication number Publication date
US20040164068A1 (en) 2004-08-26
EP1161985B1 (de) 2005-10-26
EP1161985A1 (de) 2001-12-12
US7009154B2 (en) 2006-03-07
US20020017660A1 (en) 2002-02-14
DE60023464T2 (de) 2006-07-20
US6710311B2 (en) 2004-03-23

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