DE60022377D1 - Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma - Google Patents

Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma

Info

Publication number
DE60022377D1
DE60022377D1 DE60022377T DE60022377T DE60022377D1 DE 60022377 D1 DE60022377 D1 DE 60022377D1 DE 60022377 T DE60022377 T DE 60022377T DE 60022377 T DE60022377 T DE 60022377T DE 60022377 D1 DE60022377 D1 DE 60022377D1
Authority
DE
Germany
Prior art keywords
container
cavity
low pressure
cover
pressure plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60022377T
Other languages
English (en)
Other versions
DE60022377T2 (de
Inventor
Jean-Michel Rius
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sidel Actis Services
Original Assignee
Sidel Actis Services
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidel Actis Services filed Critical Sidel Actis Services
Publication of DE60022377D1 publication Critical patent/DE60022377D1/de
Application granted granted Critical
Publication of DE60022377T2 publication Critical patent/DE60022377T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Discharge Heating (AREA)
  • Plasma Technology (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Closures For Containers (AREA)
  • ing And Chemical Polishing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Furnace Details (AREA)
DE60022377T 1999-10-25 2000-10-23 Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma Expired - Lifetime DE60022377T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9913638A FR2799994B1 (fr) 1999-10-25 1999-10-25 Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne
FR9913638 1999-10-25
PCT/FR2000/002941 WO2001031680A1 (fr) 1999-10-25 2000-10-23 Circuit de vide pour un dispositif de traitement d'un recipient a l'aide d'un plasma a basse pression

Publications (2)

Publication Number Publication Date
DE60022377D1 true DE60022377D1 (de) 2005-10-06
DE60022377T2 DE60022377T2 (de) 2006-06-08

Family

ID=9551574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60022377T Expired - Lifetime DE60022377T2 (de) 1999-10-25 2000-10-23 Vakuumsystem für eine vorrichtung zur behandlung eines behälters mittels niederdruckplasma

Country Status (14)

Country Link
US (1) US6328805B1 (de)
EP (1) EP1228522B1 (de)
JP (1) JP3663174B2 (de)
KR (1) KR100472217B1 (de)
CN (1) CN1253917C (de)
AT (1) ATE303656T1 (de)
AU (1) AU1032801A (de)
BR (1) BR0014986A (de)
CA (1) CA2388335A1 (de)
DE (1) DE60022377T2 (de)
ES (1) ES2248135T3 (de)
FR (1) FR2799994B1 (de)
MX (1) MXPA02004041A (de)
WO (1) WO2001031680A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7854805B2 (en) 2007-09-20 2010-12-21 Krones Ag Plasma processing plant

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Publication number Priority date Publication date Assignee Title
DE10054653A1 (de) * 2000-11-03 2002-05-08 Ver Foerderung Inst Kunststoff Verfahren und Vorrichtung zum Beschichten von Hohlkörper
EP1229068B1 (de) * 2001-02-06 2005-09-14 Shibuya Kogyo Co., Ltd. Verfahren und Vorrichtung zum Modifizieren der inneren Oberfläche von Behältern aus Kunststoff
DE10202311B4 (de) * 2002-01-23 2007-01-04 Schott Ag Vorrichtung und Verfahren zur Plasmabehandlung von dielektrischen Körpern
US8961688B2 (en) 2002-05-24 2015-02-24 Khs Corpoplast Gmbh Method and device for plasma treating workpieces
AU2003233770A1 (en) 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
DE10228898B4 (de) * 2002-06-27 2005-01-27 Schott Ag Vorrichtung und Verfahren für CVD-Behandlungen
EP1507887B1 (de) * 2002-05-24 2008-07-09 Schott Ag Mehrplatz-beschichtungsvorrichtung und verfahren zur plasmabeschichtung
EP1367145B1 (de) * 2002-05-24 2006-05-17 Schott Ag Vorrichtung für CVD-Behandlungen
AU2003229287A1 (en) 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treatment of work pieces
WO2003100127A1 (de) 2002-05-24 2003-12-04 Sig Technology Ltd. Verfahren und vorrichtung zur plasmabehandlung von werkstücken
DE10224547B4 (de) * 2002-05-24 2020-06-25 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10253513B4 (de) * 2002-11-16 2005-12-15 Schott Ag Mehrplatz-Beschichtungsvorrichtung und Verfahren zur Plasmabeschichtung
EP1507889B1 (de) 2002-05-24 2014-08-06 KHS Corpoplast GmbH Verfahren und vorrichtung zur plasmabehandlung von werkstücken
AU2003233771A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
WO2003100120A2 (de) * 2002-05-24 2003-12-04 Schott Ag Vorrichtung und verfahren zur behandlung von werkstücken
WO2003100116A1 (de) 2002-05-24 2003-12-04 Sig Technology Ltd. Verfahren und vorrichtung zur plasmabehandlung von werkstücken
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置
DE10236683B4 (de) * 2002-08-09 2016-05-12 Krones Aktiengesellschaft Vorrichtung zur Plasmabehandlung von Hohlkörpern, insbesondere Flaschen
DE10242086A1 (de) 2002-09-11 2004-04-15 Sig Technology Ltd. Behälter zur Verpackung von Produkten, Vorrichtung zur Verarbeitung von Kunstoff sowie Verfahren zur Behälterherstellung
FR2847912B1 (fr) * 2002-11-28 2005-02-18 Sidel Sa Procede et dispositif pour deposer par plasma micro-ondes un revetement sur une face d'un recipient en materiau thermoplastique
DE10300734A1 (de) * 2003-01-11 2004-07-22 Sig Technology Ltd. Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
FR2871091B1 (fr) * 2004-06-03 2008-01-18 Commissariat Energie Atomique Procede de fabrication d'une vitesse d'etancheite d'un reservoir de type iv et reservoir de type iv
FR2872148B1 (fr) * 2004-06-24 2006-09-22 Sidel Sas Machine de traitement de bouteilles equipee d'une cartouche de raccordement interchangeable
FR2872555B1 (fr) * 2004-06-30 2006-10-06 Sidel Sas Circuit de pompage a vide et machine de traitement de recipients equipee de ce circuit
FR2889204B1 (fr) * 2005-07-26 2007-11-30 Sidel Sas Appareil pour le depot pecvd d'une couche barriere interne sur un recipient, comprenant une ligne de gaz isolee par electrovanne
FR2892425B1 (fr) * 2005-10-24 2008-01-04 Sidel Sas Appareil refroidi pour le depot par plasma d'une couche barriere sur un recipient.
FR2892652B1 (fr) * 2005-10-28 2009-06-05 Sidel Sas Machine rotative de traitement de recipients
FR2893622B1 (fr) 2005-11-24 2007-12-21 Commissariat Energie Atomique Composition a base de caprolactame,procede de fabrication d'un element d'etancheite,et reservoir
EP1884249A1 (de) * 2006-08-01 2008-02-06 L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Verfahren und Vorrichtung zur Plasmabehandlung von Kunststoffflaschen
FR2907036B1 (fr) * 2006-10-11 2008-12-26 Sidel Participations Installation de depot, au moyen d'un plasma micro-ondes, d'un revetement barriere interne dans des recipients thermoplastiques
FR2907037B1 (fr) * 2006-10-13 2009-01-09 Sidel Participations Installation de depot,au moyen d'un plasma micro-ondes,d'un revetement barriere interne dans des recipients thermoplastiques
DE102007017938C5 (de) 2007-04-13 2017-09-21 Khs Gmbh Behälterherstellungsvorrichtung und Herstellverfahren für Formkörper
EP2179842B1 (de) * 2007-08-14 2016-11-09 Toyo Seikan Kaisha, Ltd. Biologisch abbaubarer harzbehälter mit aufgetragenem film und verfahren zur herstellung des aufgetragenen films
DE102007045216A1 (de) 2007-09-21 2009-04-02 Khs Corpoplast Gmbh & Co. Kg Vorrichtung zur Plasmabehandlung von Werkstücken
DE102008016923A1 (de) 2008-03-31 2009-10-01 Khs Corpoplast Gmbh & Co. Kg Vorrichtung zur Plasmabehandlung von Werkstücken
FR2932395B1 (fr) * 2008-06-13 2011-06-10 Sidel Participations Procede de protection d'appareil(s) de mesure ou autre(s)
DE102010012501A1 (de) 2010-03-12 2011-09-15 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010023119A1 (de) 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010048960A1 (de) 2010-10-18 2012-04-19 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE102010055155A1 (de) 2010-12-15 2012-06-21 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
WO2012122559A2 (en) 2011-03-10 2012-09-13 KaiaTech, Inc. Method and apparatus for treating containers
DE102011104730A1 (de) 2011-06-16 2012-12-20 Khs Corpoplast Gmbh Verfahren zur Plasmabehandlung von Werkstücken sowie Werkstück mit Gasbarriereschicht
DE102015121773B4 (de) 2015-12-14 2019-10-24 Khs Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
DE102016105548A1 (de) 2016-03-24 2017-09-28 Khs Plasmax Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Behältern
KR101965317B1 (ko) * 2017-07-14 2019-08-07 손부경 진공 밀폐 케이스
CN108131274B (zh) * 2017-11-15 2019-10-15 中国科学院合肥物质科学研究院 一种真空抽气系统
DE102018132609A1 (de) * 2018-12-18 2020-06-18 Krones Ag Vorrichtung und Verfahren zum Beschichten von Behältnissen

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DE3632748A1 (de) 1986-09-26 1988-04-07 Ver Foerderung Inst Kunststoff Verfahren zur beschichtung von hohlkoerpern
DE4316349C2 (de) 1993-05-15 1996-09-05 Ver Foerderung Inst Kunststoff Verfahren zur Innenbeschichtung von Hohlkörpern mit organischen Deckschichten durch Plasmapolymerisation, sowie Vorrichtung zur Durchführung des Verfahrens
EP0778089A1 (de) 1993-06-01 1997-06-11 Kautex Werke Reinold Hagen Ag Einrichtung zum Herstellen einer polymeren Beschichtung an Kunststoff-Hohlkörpern
MX9504279A (es) * 1994-02-16 1997-05-31 Coca Cola Co Envases huecos que tienen una capa superficial interna, inerte o impermeable, obtenida mediante polimerizacion sobre la superficie o reaccion de la superficie asistida por plasma.
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
WO1997044503A1 (en) 1996-05-22 1997-11-27 Tetra Laval Holdings & Finance S.A. Method and apparatus for treating inside surfaces of containers
US6112695A (en) * 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
RU2199792C2 (ru) 1997-09-30 2003-02-27 Тетра Лаваль Холдинг Энд Финанс С.А. Способ и устройство для плазменной обработки внутренней поверхности пластиковых бутылок
DE19802333A1 (de) * 1998-01-23 1999-07-29 Leybold Systems Gmbh Barriereschicht für Verpackungsmaterial und Verfahren zur Herstellung einer Barriereschicht für Verpackungsmaterial
DE19806519A1 (de) * 1998-02-17 1999-08-19 Ruediger Haaga Gmbh Vorrichtung zum Sterilisieren von Behältern mittels eines Niederdruckplasmas
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7854805B2 (en) 2007-09-20 2010-12-21 Krones Ag Plasma processing plant

Also Published As

Publication number Publication date
BR0014986A (pt) 2002-06-18
ES2248135T3 (es) 2006-03-16
KR100472217B1 (ko) 2005-03-10
FR2799994A1 (fr) 2001-04-27
CN1382303A (zh) 2002-11-27
EP1228522A1 (de) 2002-08-07
CA2388335A1 (fr) 2001-05-03
JP2003512977A (ja) 2003-04-08
JP3663174B2 (ja) 2005-06-22
WO2001031680A1 (fr) 2001-05-03
AU1032801A (en) 2001-05-08
US6328805B1 (en) 2001-12-11
EP1228522B1 (de) 2005-08-31
CN1253917C (zh) 2006-04-26
DE60022377T2 (de) 2006-06-08
FR2799994B1 (fr) 2002-06-07
ATE303656T1 (de) 2005-09-15
KR20020053826A (ko) 2002-07-05
MXPA02004041A (es) 2003-12-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN