DE60011031D1 - Optische Säule für Teilchenstrahlvorrichtung - Google Patents

Optische Säule für Teilchenstrahlvorrichtung

Info

Publication number
DE60011031D1
DE60011031D1 DE60011031T DE60011031T DE60011031D1 DE 60011031 D1 DE60011031 D1 DE 60011031D1 DE 60011031 T DE60011031 T DE 60011031T DE 60011031 T DE60011031 T DE 60011031T DE 60011031 D1 DE60011031 D1 DE 60011031D1
Authority
DE
Germany
Prior art keywords
particle beam
beam device
optical column
column
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60011031T
Other languages
English (en)
Other versions
DE60011031T2 (de
Inventor
Hans-Peter Feuerbaum
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of DE60011031D1 publication Critical patent/DE60011031D1/de
Application granted granted Critical
Publication of DE60011031T2 publication Critical patent/DE60011031T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE60011031T 2000-02-01 2000-02-01 Optische Säule für Teilchenstrahlvorrichtung Expired - Lifetime DE60011031T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00101987A EP1122761B1 (de) 2000-02-01 2000-02-01 Optische Säule für Teilchenstrahlvorrichtung

Publications (2)

Publication Number Publication Date
DE60011031D1 true DE60011031D1 (de) 2004-07-01
DE60011031T2 DE60011031T2 (de) 2005-06-23

Family

ID=8167745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60011031T Expired - Lifetime DE60011031T2 (de) 2000-02-01 2000-02-01 Optische Säule für Teilchenstrahlvorrichtung

Country Status (8)

Country Link
US (1) US6936817B2 (de)
EP (1) EP1122761B1 (de)
JP (1) JP3905382B2 (de)
KR (1) KR100496496B1 (de)
CN (1) CN1222980C (de)
AU (1) AU2001228515A1 (de)
DE (1) DE60011031T2 (de)
WO (1) WO2001057910A1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60011031T2 (de) * 2000-02-01 2005-06-23 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Optische Säule für Teilchenstrahlvorrichtung
FR2837931B1 (fr) * 2002-03-29 2004-12-10 Cameca Dispositif de mesure de l'emission de rayons x produite par un objet soumis a un faisceau d'electrons
US7791290B2 (en) 2005-09-30 2010-09-07 Virgin Islands Microsystems, Inc. Ultra-small resonating charged particle beam modulator
US7626179B2 (en) 2005-09-30 2009-12-01 Virgin Island Microsystems, Inc. Electron beam induced resonance
US7586097B2 (en) 2006-01-05 2009-09-08 Virgin Islands Microsystems, Inc. Switching micro-resonant structures using at least one director
WO2006018840A2 (en) * 2004-08-16 2006-02-23 Ellumina Vision Ltd. Electron microscope array for inspection and lithography
JP2006114225A (ja) 2004-10-12 2006-04-27 Hitachi High-Technologies Corp 荷電粒子線装置
EP1801838B1 (de) * 2005-12-20 2012-05-09 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung für die Emission von Teilchenstrahlen und Verfahren zu deren Betrieb
US7443358B2 (en) 2006-02-28 2008-10-28 Virgin Island Microsystems, Inc. Integrated filter in antenna-based detector
US20070200071A1 (en) * 2006-02-28 2007-08-30 Virgin Islands Microsystems, Inc. Coupling output from a micro resonator to a plasmon transmission line
US7876793B2 (en) 2006-04-26 2011-01-25 Virgin Islands Microsystems, Inc. Micro free electron laser (FEL)
US7646991B2 (en) 2006-04-26 2010-01-12 Virgin Island Microsystems, Inc. Selectable frequency EMR emitter
US7723698B2 (en) * 2006-05-05 2010-05-25 Virgin Islands Microsystems, Inc. Top metal layer shield for ultra-small resonant structures
US7728397B2 (en) 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Coupled nano-resonating energy emitting structures
US7436177B2 (en) 2006-05-05 2008-10-14 Virgin Islands Microsystems, Inc. SEM test apparatus
US7718977B2 (en) * 2006-05-05 2010-05-18 Virgin Island Microsystems, Inc. Stray charged particle removal device
US20070258492A1 (en) * 2006-05-05 2007-11-08 Virgin Islands Microsystems, Inc. Light-emitting resonant structure driving raman laser
US7986113B2 (en) 2006-05-05 2011-07-26 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US7656094B2 (en) 2006-05-05 2010-02-02 Virgin Islands Microsystems, Inc. Electron accelerator for ultra-small resonant structures
US7746532B2 (en) 2006-05-05 2010-06-29 Virgin Island Microsystems, Inc. Electro-optical switching system and method
US7728702B2 (en) 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Shielding of integrated circuit package with high-permeability magnetic material
US7359589B2 (en) * 2006-05-05 2008-04-15 Virgin Islands Microsystems, Inc. Coupling electromagnetic wave through microcircuit
US8188431B2 (en) 2006-05-05 2012-05-29 Jonathan Gorrell Integration of vacuum microelectronic device with integrated circuit
US7732786B2 (en) 2006-05-05 2010-06-08 Virgin Islands Microsystems, Inc. Coupling energy in a plasmon wave to an electron beam
US7741934B2 (en) 2006-05-05 2010-06-22 Virgin Islands Microsystems, Inc. Coupling a signal through a window
US7342441B2 (en) * 2006-05-05 2008-03-11 Virgin Islands Microsystems, Inc. Heterodyne receiver array using resonant structures
US7442940B2 (en) * 2006-05-05 2008-10-28 Virgin Island Microsystems, Inc. Focal plane array incorporating ultra-small resonant structures
US7710040B2 (en) 2006-05-05 2010-05-04 Virgin Islands Microsystems, Inc. Single layer construction for ultra small devices
US7443577B2 (en) * 2006-05-05 2008-10-28 Virgin Islands Microsystems, Inc. Reflecting filtering cover
US7679067B2 (en) 2006-05-26 2010-03-16 Virgin Island Microsystems, Inc. Receiver array using shared electron beam
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
ATE512457T1 (de) 2006-06-07 2011-06-15 Fei Co Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung
US7655934B2 (en) 2006-06-28 2010-02-02 Virgin Island Microsystems, Inc. Data on light bulb
US7450794B2 (en) * 2006-09-19 2008-11-11 Virgin Islands Microsystems, Inc. Microcircuit using electromagnetic wave routing
US7659513B2 (en) 2006-12-20 2010-02-09 Virgin Islands Microsystems, Inc. Low terahertz source and detector
WO2008098084A1 (en) * 2007-02-06 2008-08-14 Fei Company High pressure charged particle beam system
US7863563B2 (en) * 2007-03-08 2011-01-04 International Business Machines Corporation Carbon tube for electron beam application
US7990336B2 (en) 2007-06-19 2011-08-02 Virgin Islands Microsystems, Inc. Microwave coupled excitation of solid state resonant arrays
DE602007005631D1 (de) * 2007-07-27 2010-05-12 Integrated Circuit Testing Elektrostatische Linsenanordnung
US7791053B2 (en) 2007-10-10 2010-09-07 Virgin Islands Microsystems, Inc. Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
JP5702552B2 (ja) * 2009-05-28 2015-04-15 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ デュアルビームシステムの制御方法
JP5023199B2 (ja) * 2010-07-29 2012-09-12 株式会社日立ハイテクノロジーズ 荷電粒子線放射装置
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2573796B1 (de) * 2011-09-22 2014-05-07 Carl Zeiss Microscopy Limited Teilchenstrahlsystem mit hohlem Lichtleiter
EP2592314B1 (de) 2011-11-10 2016-08-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung mit geladenem Teilchenstrahl, Vakuumventil dafür und Betrieb davon
EP2607847B1 (de) 2011-12-19 2017-02-01 Kabushiki Kaisha TOPCON Drehwinkelerkennungsvorrichtung und Überwachungsinstrument
JP6055179B2 (ja) * 2011-12-19 2016-12-27 株式会社トプコン 回転角検出装置及び測量装置
JP5936424B2 (ja) * 2012-04-20 2016-06-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
EP2879155B1 (de) * 2013-12-02 2018-04-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Mehrstrahlsystem mit Hochdurchsatz-EBI
US20160090976A1 (en) * 2014-09-30 2016-03-31 Honeywell International Inc. Systems and methods for a dual purpose getter container
WO2017112937A1 (en) * 2015-12-23 2017-06-29 Massachusetts Institute Of Technology Electron transparent membrane for cold cathode devices
JP2019003863A (ja) * 2017-06-16 2019-01-10 株式会社島津製作所 電子ビーム装置、ならびに、これを備えるｘ線発生装置および走査電子顕微鏡

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
US4713543A (en) * 1984-08-13 1987-12-15 Siemens Aktiengesellschaft Scanning particle microscope
NL9000057A (nl) * 1990-01-10 1991-08-01 Philips Nv Thermisch bedienbare vacuumklep voor deeltjesbundel apparaat.
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
JP3730263B2 (ja) * 1992-05-27 2005-12-21 ケーエルエー・インストルメンツ・コーポレーション 荷電粒子ビームを用いた自動基板検査の装置及び方法
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US5576483A (en) * 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
JPH08195180A (ja) * 1995-01-13 1996-07-30 Jeol Ltd 電子顕微鏡仕切弁制御装置
US5563415A (en) * 1995-06-07 1996-10-08 Arch Development Corporation Magnetic lens apparatus for a low-voltage high-resolution electron microscope
US6051839A (en) * 1996-06-07 2000-04-18 Arch Development Corporation Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
US5998790A (en) * 1997-06-18 1999-12-07 The Regents Of The University Of California Transmission electron microscope CCD camera
US6023060A (en) * 1998-03-03 2000-02-08 Etec Systems, Inc. T-shaped electron-beam microcolumn as a general purpose scanning electron microscope
DE60011031T2 (de) * 2000-02-01 2005-06-23 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Optische Säule für Teilchenstrahlvorrichtung
US6700127B2 (en) * 2002-01-09 2004-03-02 Biomed Solutions Llc Point source for producing electrons beams
JP4261806B2 (ja) * 2002-02-15 2009-04-30 株式会社日立ハイテクノロジーズ 電子線装置及びその高電圧放電防止方法

Also Published As

Publication number Publication date
CN1222980C (zh) 2005-10-12
AU2001228515A1 (en) 2001-08-14
WO2001057910A1 (en) 2001-08-09
JP2003522381A (ja) 2003-07-22
EP1122761B1 (de) 2004-05-26
KR20020077411A (ko) 2002-10-11
CN1406391A (zh) 2003-03-26
KR100496496B1 (ko) 2005-06-22
US20030155521A1 (en) 2003-08-21
JP3905382B2 (ja) 2007-04-18
US6936817B2 (en) 2005-08-30
EP1122761A1 (de) 2001-08-08
DE60011031T2 (de) 2005-06-23

Similar Documents

Publication Publication Date Title
DE60011031D1 (de) Optische Säule für Teilchenstrahlvorrichtung
DE50113273D1 (de) Optische kollimierungsoptik
DE60039403D1 (de) Optische Vorrichtung
DE60037616D1 (de) Optische Querverbindungsvorrichtung
DE50113813D1 (de) Optische messvorrichtung
DE69937641D1 (de) Optische bauelemente
DE60036049D1 (de) Optische vorrichtung
DE60235781D1 (de) Optische Vorrichtung
DE60027113D1 (de) Optische Prüfvorrichtung
DE60001479D1 (de) Mikroelektromechanische optische Vorrichtung
DE60102733D1 (de) Optisches Plattengerät
DE69905622D1 (de) Optische vorrichtung
DE60007803D1 (de) Optische Verstärker
DE69934144D1 (de) Optische messvorrichtung
DE60301838D1 (de) Optisches Präzisionsausrichtsystem
DE60126706D1 (de) Optisches Plattengerät
DE60121842D1 (de) Optische Wellenleiterstruktur
DE60000565D1 (de) Mikro-Elektromekanische Optische Vorrichtung
DE69932957D1 (de) Optische untersuchungsvorrichtung
DE60028761D1 (de) Vorrichtung für optische verbindung
DE60127146D1 (de) Optische vorrichtung
DE69928157D1 (de) Optische Vorrichtung
DE50107120D1 (de) Abtasteinheit für eine optische positionsmesseinrichtung
DE60038081D1 (de) Optische verstärkervorrichtung
DE60107170D1 (de) Optische Verbindungsvorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition